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    • 1. 发明授权
    • Apparatus for detecting particles on a glass surface and a method thereof
    • 用于检测玻璃表面上的颗粒的装置及其方法
    • US08027036B2
    • 2011-09-27
    • US12417318
    • 2009-04-02
    • Hyunwoo KimYoungchae KoSungjong PyoTaeho Keem
    • Hyunwoo KimYoungchae KoSungjong PyoTaeho Keem
    • G01N21/00G01N21/47
    • G01N21/896G01N21/958
    • The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.
    • 本发明涉及一种用于检测玻璃表面上的颗粒的装置及其方法,更具体地,涉及一种用于检测玻璃表面上的颗粒的装置及其方法,用于精确检查可能在玻璃表面上产生的颗粒 微电路被沉积。 根据本发明的用于检测玻璃表面上的颗粒的装置包括分别用于以一定间隔检测在玻璃基板的上侧和下侧的玻璃基板上的颗粒的激光束照射器,并且其中, 可以在垂直于玻璃基板的传送方向的方向上照射从激光束照射器发射的光束,从而精确地检测除玻璃表面之外的颗粒。
    • 2. 发明申请
    • NONCONTACT TYPE SUCTION GRIPPING DEVICE AND NONCONTACT TYPE SUCTION GRIPPING FRAME HAVING THE SAME
    • 非接合式吸附装置和非接合型吸附器具
    • US20100320786A1
    • 2010-12-23
    • US12732717
    • 2010-03-26
    • Youngchae KoHyukki KwonTaeho KeemChangha LeeYoungtae KimYoung Bae Chang
    • Youngchae KoHyukki KwonTaeho KeemChangha LeeYoungtae KimYoung Bae Chang
    • B25J15/06B66C1/02
    • B25J15/0616B65G49/061B65G2249/04B65G2249/045H01L21/6838
    • A noncontact type suction gripping device suitable for lifting a flat object in a noncontact manner includes a housing section including a pressing part which forms a closed surface when being placed to closely face one surface of a flat object, an R part which extends from the pressing part to be convexly rounded when viewed from the flat object, a sidewall part which is formed such that at least a portion thereof linearly extends from the R part in a direction facing away from the flat object, and an air inlet part which is connected to the sidewall part to introduce air, supplied from the outside, into the housing section; and a nozzle section including a nozzle tip which is separated from an inner surface of the sidewall part by a predetermined gap such that air supplied through the air inlet part can be discharged toward the perpendicular direction on the flat object, and an inclined surface which is formed to have a gradually decreasing diameter from the nozzle tip toward the air inlet part, the nozzle section having a funnel-shaped configuration and being inserted into a space defined in the housing section.
    • 适用于以非接触方式提升扁平物体的非接触型吸引夹持装置包括:壳体部分,包括当被放置成紧密地面对平坦物体的一个表面时形成闭合表面的按压部分;从压制件延伸的R部分 从扁平物体观察时要凸起成圆形的部分,形成为使得其至少一部分在远离平坦物体的方向上从R部分线性延伸的侧壁部分,以及连接到 所述侧壁部将从外部供给的空气引入所述壳体部; 以及喷嘴部,其包括以与所述侧壁部的内表面隔开预定间隙的喷嘴头,使得通过所述进气部供给的空气能够朝向所述平坦物体的垂直方向排出, 形成为从喷嘴尖端朝向空气入口部分的直径逐渐减小,所述喷嘴部分具有漏斗形构造并插入到限定在所述壳体部分中的空间中。