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1. 发明授权

US07384730B2 Top coating composition for photoresist and method of forming photoresist pattern using same 有权
标题翻译：用于光致抗蚀剂的顶涂层组合物和使用其形成光刻胶图案的方法
公开(公告)号：US07384730B2
公开(公告)日：2008-06-10
申请号：US11281775
申请日：2005-11-17
申请人： Mitsuhiro Hata , Man-Hyoung Ryoo , Sang-Gyun Woo , Hyun-Woo Kim , Jin-Young Yoon , Jung-Hwan Hah
发明人： Mitsuhiro Hata , Man-Hyoung Ryoo , Sang-Gyun Woo , Hyun-Woo Kim , Jin-Young Yoon , Jung-Hwan Hah
IPC分类号： G03F7/38 , H01L21/027 , G03F7/11
CPC分类号： G03F7/11 , C08F220/06 , C08F220/18 , G03F7/2041 , Y10S430/146 , Y10S430/162
摘要： Top coating compositions capable of being used in immersion lithography, and methods of forming photoresist patterns using the same, are provided. The top coating composition includes: a polymer, a base; and a solvent, wherein the polymer may be represented by Formula I: wherein R1 and R2 are independently selected from the group consisting of hydrogen, fluoro, methyl, and trifluoromethyl; X is a carboxylic acid group or a sulfonic acid group; Y is a carboxylic acid group or a sulfonic acid group, wherein the carboxylic acid group or sulfonic acid group is protected; Z is a monomer selected from the group consisting of a vinyl monomer, an alkyleneglycol, a maleic anhydride, an ethyleneimine, an oxazoline-containing monomer, acrylonitrile, an allylamide, a 3,4-dihydropyran, a 2,3-dihydrofuran, tetrafluoroethylene, or a combination thereof; and m, n, and q are integers wherein 0.03≦m/(m+n+q)≦0.97, 0.03≦n/(m+n+q)≦0.97, 0≦q/(m+n+q)≦0.5; and wherein the solvent includes deionized water.
摘要翻译：提供能够用于浸没式光刻的顶涂层组合物，以及使用其形成光刻胶图案的方法。顶部涂料组合物包括：聚合物，碱; 和溶剂，其中所述聚合物可以由式I表示：其中R 1和R 2独立地选自氢，氟，甲基和三氟甲基 ; X是羧酸基或磺酸基; Y是羧酸基或磺酸基，其中羧酸基或磺酸基被保护; Z是选自乙烯基单体，亚烷基二醇，马来酸酐，乙烯亚胺，含恶唑啉的单体，丙烯腈，烯丙基酰胺，3,4-二氢吡喃，2,3-二氢呋喃，四氟乙烯，或其组合; 并且m，n和q是整数，其中<？in-line-formula description =“In-line Formulas”end =“lead”？> 0.03 <= m /（m + n + q）<= 0.97， in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> 0.03 <= n /（m + n + q）<= 0.97，<？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead” α> 0 <= q /（m + n + q）<= 0.5; <？in-line-formula description =“In-line Formulas”end =“tail”？>，其中溶剂包括去离子水。

2. 发明申请

US20060275697A1 Top coating composition for photoresist and method of forming photoresist pattern using the same 审中-公开
标题翻译：用于光致抗蚀剂的顶涂层组合物和使用其形成光刻胶图案的方法
公开(公告)号：US20060275697A1
公开(公告)日：2006-12-07
申请号：US11364707
申请日：2006-02-27
申请人： Mitsuhiro Hata , Man-Hyoung Ryoo , Hyun-Woo Kim , Sang-Gyun Woo , Jin-Young Yoon , Jung-Hwan Hah
发明人： Mitsuhiro Hata , Man-Hyoung Ryoo , Hyun-Woo Kim , Sang-Gyun Woo , Jin-Young Yoon , Jung-Hwan Hah
IPC分类号： G03C1/00
CPC分类号： G03F7/11 , G03F7/2041
摘要： Provided are a top coating composition for a photoresist which can be used in immersion lithography, and a method of forming a photoresist pattern using the same. The top coating composition includes: a polymer including at least three different structural repeating units including a first repeating unit comprising a carboxy group substituted by an alkyl protecting group or an acid-labile group, a second repeating unit comprising an acid group, and a third repeating unit comprising a polar group, and an organic solvent comprising an alcohol.
摘要翻译：提供了可用于浸没式光刻的光致抗蚀剂的顶涂层组合物，以及使用其形成光致抗蚀剂图案的方法。顶部涂料组合物包括：包含至少三种不同结构重复单元的聚合物，其包括第一重复单元，其包含被烷基保护基团或酸不稳定基团取代的羧基，第二重复单元包含酸基，和第三重复单元包含极性基团的重复单元和包含醇的有机溶剂。

3. 发明授权

US08241837B2 Mask pattern for semiconductor device fabrication, method of forming the same, and method of fabricating finely patterned semiconductor device 失效
标题翻译：用于半导体器件制造的掩模图案，其形成方法以及制造精细图案化的半导体器件的方法
公开(公告)号：US08241837B2
公开(公告)日：2012-08-14
申请号：US12946964
申请日：2010-11-16
申请人： Jung-Hwan Hah , Jin Hong , Hyun-Woo Kim , Hata Mitsuhiro , Kolake Mayya Subramanya , Sang-Gyun Woo
发明人： Jung-Hwan Hah , Jin Hong , Hyun-Woo Kim , Hata Mitsuhiro , Kolake Mayya Subramanya , Sang-Gyun Woo
IPC分类号： G03F7/20 , G03F7/30 , G03F7/36 , G03F7/40
CPC分类号： G03F7/40 , B82Y30/00 , G03F7/0752 , G03F7/165 , H01L21/0274
摘要： Provided are a mask pattern including a silicon-containing self-assembled molecular layer, a method of forming the same, and a method of fabricating a semiconductor device. The mask pattern includes a resist pattern formed on a semiconductor substrate and the self-assembled molecular layer formed on the resist pattern. The self-assembled molecular layer has a silica network formed by a sol-gel reaction. To form the mask pattern, first, the resist pattern is formed with openings on an underlayer covering the substrate to expose the underlayer to a first width. Then, the self-assembled molecular layer is selectively formed only on a surface of the resist pattern to expose the underlayer to a second width smaller than the first width. The underlayer is etched by using the resist pattern and the self-assembled molecular layer as an etching mask to obtain a fine pattern.
摘要翻译：提供了包括含硅自组装分子层的掩模图案，其形成方法和制造半导体器件的方法。掩模图案包括形成在半导体衬底上的抗蚀剂图案和形成在抗蚀剂图案上的自组装分子层。自组装分子层具有通过溶胶 - 凝胶反应形成的二氧化硅网络。为了形成掩模图案，首先，在覆盖基板的下层上形成抗蚀剂图案，使底层暴露于第一宽度。然后，仅在抗蚀剂图案的表面上选择性地形成自组装分子层，以使底层暴露于小于第一宽度的第二宽度。通过使用抗蚀剂图案和自组装分子层作为蚀刻掩模来蚀刻底层以获得精细图案。

4. 发明申请

US20060111550A1 Top coating composition for photoresist and method of forming photoresist pattern using same 有权
标题翻译：用于光致抗蚀剂的顶涂层组合物和使用其形成光刻胶图案的方法
公开(公告)号：US20060111550A1
公开(公告)日：2006-05-25
申请号：US11281775
申请日：2005-11-17
申请人： Mitsuhiro Hata , Man-Hyoung Ryoo , Sang-Gyun Woo , Hyun-Woo Kim , Jin-Young Yoon , Jung-Hwan Hah
发明人： Mitsuhiro Hata , Man-Hyoung Ryoo , Sang-Gyun Woo , Hyun-Woo Kim , Jin-Young Yoon , Jung-Hwan Hah
IPC分类号： C08F6/00
CPC分类号： G03F7/11 , C08F220/06 , C08F220/18 , G03F7/2041 , Y10S430/146 , Y10S430/162
摘要： Top coating compositions capable of being used in immersion lithography, and methods of forming photoresist patterns using the same, are provided. The top coating composition includes: a polymer, a base; and a solvent, wherein the polymer may be represented by Formula I: wherein R1 and R2 are independently selected from the group consisting of hydrogen, fluoro, methyl, and trifluoromethyl; X is a carboxylic acid group or a sulfonic acid group; Y is a carboxylic acid group or a sulfonic acid group, wherein the carboxylic acid group or sulfonic acid group is protected; Z is a monomer selected from the group consisting of a vinyl monomer, an alkyleneglycol, a maleic anhydride, an ethyleneimine, an oxazoline-containing monomer, acrylonitrile, an allylamide, a 3,4-dihydropyran, a 2,3-dihydrofuran, tetrafluoroethylene, or a combination thereof; and m, n, and q are integers wherein 0.03≦m/(m+n+q)≦0.97, 0.03≦n/(m+n+q)≦0.97, 0≦q/(m+n+q)≦0.5; and wherein the solvent includes deionized water.
摘要翻译：提供能够用于浸没式光刻的顶涂层组合物，以及使用其形成光刻胶图案的方法。顶部涂料组合物包括：聚合物，碱; 和溶剂，其中所述聚合物可以由式I表示：其中R 1和R 2独立地选自氢，氟，甲基和三氟甲基 ; X是羧酸基或磺酸基; Y是羧酸基或磺酸基，其中羧酸基或磺酸基被保护; Z是选自乙烯基单体，亚烷基二醇，马来酸酐，乙烯亚胺，含恶唑啉的单体，丙烯腈，烯丙基酰胺，3,4-二氢吡喃，2,3-二氢呋喃，四氟乙烯，或其组合; 并且m，n和q是其中0.03 <= m /（m + n + q）<=0.97,0.03≤n/（m + n + q）<= 0.97,0 <= q /（m + n + q）<= 0.5; 并且其中所述溶剂包括去离子水。

5. 发明授权

US06962768B2 Ether monomers and polymers having multi-ring structures, and photosensitive polymers and resist compositions obtained from the same 失效
标题翻译：具有多环结构的醚单体和聚合物，以及由其获得的光敏聚合物和抗蚀剂组合物
公开(公告)号：US06962768B2
公开(公告)日：2005-11-08
申请号：US10799025
申请日：2004-03-12
申请人： Hyun-Woo Kim , Sang-Gyun Woo
发明人： Hyun-Woo Kim , Sang-Gyun Woo
IPC分类号： G03F7/039 , C08F16/18 , C08F20/22 , C08F220/22 , C08F234/02 , G03F7/004 , G03F7/027 , C07D311/78 , C08F34/02
CPC分类号： G03F7/0046 , C07D311/78 , C08F34/02 , G03F7/0395 , Y10S430/106 , Y10S430/108 , Y10S430/115
摘要： Provided are a variety of monomers suitable of producing photosensitive polymers, that are in turn, useful in photoresist compositions, through radical (cationic) polymerization including at least one multi-ring alkenyl ethers and one α-fluorinated acrylate. The resulting photoresist compositions exhibit both acceptable resistance to dry etching processing and light transmittance suitable for use with various light sources such as KrF excimer lasers, ArF excimer lasers or F2 excimer lasers, in a photolithography process to produce fine photoresist patterns. In addition to the multi-ring alkenyl ethers and α-fluorinated acrylates, additional monomers comprising one or more cyclic aliphatic and heterocyclic compounds, both unsubstituted and substituted, in particular dihydropyrans, may be incorporated into the photosensitive polymers. Photosensitive polymers can then be produced by combining these various monomer units to form copolymers, terpolymers and higher order polymers, an exemplary embodiment of which may be generally represented by the formula V:
摘要翻译：提供适合于通过包括至少一个多环烯基醚和一个α-氟化丙烯酸酯的自由基（阳离子）聚合生产光敏聚合物的各种单体，其又可用于光致抗蚀剂组合物。所得光致抗蚀剂组合物在光刻工艺中表现出可接受的干蚀刻处理耐受性和适用于各种光源（例如KrF准分子激光器，ArF准分子激光器或F 2/2准分子激光器）的光透射率，以产生精细的光刻胶图案。除了多环烯基醚和α-氟化丙烯酸酯之外，还可以将包含一种或多种环状脂族和杂环化合物，未取代的和取代的，特别是二氢吡喃的附加单体引入光敏聚合物中。然后可以通过组合这些各种单体单元以形成共聚物，三元共聚物和更高级的聚合物来生产光敏聚合物，其典型的实施方案通常可以由式V表示：

6. 发明申请

US20050227151A1 Mask pattern for semiconductor device fabrication, method of forming the same, method for preparing coating composition for fine pattern formation, and method of fabricating semiconductor device 有权
标题翻译：用于半导体器件制造的掩模图案，其形成方法，用于制备精细图案形成的涂料组合物的方法，以及制造半导体器件的方法
公开(公告)号：US20050227151A1
公开(公告)日：2005-10-13
申请号：US10972302
申请日：2004-10-23
申请人： Mitsuhiro Hata , Jung-Hwan Hah , Hyun-Woo Kim , Sang-Gyun Woo
发明人： Mitsuhiro Hata , Jung-Hwan Hah , Hyun-Woo Kim , Sang-Gyun Woo
IPC分类号： G03F7/40 , G03F9/00 , H01L21/027
CPC分类号： G03F7/40
摘要： A mask pattern for semiconductor device fabrication comprises a resist pattern formed on a semiconductor substrate, and an interpolymer complex film formd on the resist pattern, wherein the interpolymer complex film includes a network formed by a hydrogen bond between a proton donor polymer and a proton acceptor polymer.
摘要翻译：用于半导体器件制造的掩模图案包括形成在半导体衬底上的抗蚀剂图案和形成在抗蚀剂图案上的互聚物复合膜，其中互聚物复合膜包括由质子供体聚合物和质子受体之间的氢键形成的网络聚合物。

7. 发明授权

US06713228B2 Ether monomers and polymers having multi-ring structures, and photosensitive polymers and resist compositions obtained from the same 失效
标题翻译：具有多环结构的醚单体和聚合物，以及由其获得的光敏聚合物和抗蚀剂组合物
公开(公告)号：US06713228B2
公开(公告)日：2004-03-30
申请号：US10132804
申请日：2002-04-24
申请人： Hyun-Woo Kim , Sang-Gyun Woo , Sung-Ho Lee
发明人： Hyun-Woo Kim , Sang-Gyun Woo , Sung-Ho Lee
IPC分类号： G03F7039
CPC分类号： C08F34/02 , C07D311/78 , G03F7/0046 , G03F7/0395 , Y10S430/106 , Y10S430/108 , Y10S430/111
摘要： Provided are alkenyl ether-based monomers having multi-ring structure, and photosensitive polymers and resist compositions obtained from the same. The photosensitive polymer includes a monomer unit represented by the following formula: wherein R4 and R5 are independently -H or -CH3, and R4 are independently -H, -OH or a alkyl group having 1-20 carbon atoms.
摘要翻译：提供具有多环结构的烯基醚类单体，以及由其获得的感光性聚合物和抗蚀剂组合物。光敏聚合物包括由下式表示的单体单元：其中R4和R5独立地是-H或-CH3，R4独立地是-H，-OH或具有1-20个碳原子的烷基。

8. 发明授权

US07604911B2 Mask pattern for semiconductor device fabrication, method of forming the same, method for preparing coating, composition for fine pattern formation, and method of fabricating semiconductor device 有权
标题翻译：用于半导体器件制造的掩模图案，其形成方法，制备涂层的方法，精细图案形成的组合物以及制造半导体器件的方法
公开(公告)号：US07604911B2
公开(公告)日：2009-10-20
申请号：US11949443
申请日：2007-12-03
申请人： Mitsuhiro Hata , Jung-Hwan Hah , Hyun-Woo Kim , Sang-Gyun Woo
发明人： Mitsuhiro Hata , Jung-Hwan Hah , Hyun-Woo Kim , Sang-Gyun Woo
IPC分类号： G03F7/004 , G03F7/30
CPC分类号： G03F7/40
摘要： A mask pattern for semiconductor device fabrication comprises a resist pattern formed on a semiconductor substrate, and an interpolymer complex film formed on the resist pattern, wherein the interpolymer complex film includes a network formed by a hydrogen bond between a proton donor polymer and a proton acceptor polymer.
摘要翻译：用于半导体器件制造的掩模图案包括形成在半导体衬底上的抗蚀剂图案和形成在抗蚀剂图案上的互聚物复合膜，其中互聚物复合膜包括由质子供体聚合物和质子受体之间的氢键形成的网络聚合物。

9. 发明申请

US20050227492A1 Mask pattern for semiconductor device fabrication, method of forming the same, and method of fabricating finely patterned semiconductor device 审中-公开
标题翻译：用于半导体器件制造的掩模图案，其形成方法以及制造精细图案化的半导体器件的方法
公开(公告)号：US20050227492A1
公开(公告)日：2005-10-13
申请号：US11092003
申请日：2005-03-29
申请人： Jung-Hwan Hah , Hyun-Woo Kim , Jin-Young Yoon , Mitsuhiro Hata , Kolake Subramanya , Sang-Gyun Woo
发明人： Jung-Hwan Hah , Hyun-Woo Kim , Jin-Young Yoon , Mitsuhiro Hata , Kolake Subramanya , Sang-Gyun Woo
IPC分类号： G03F7/40 , G03F7/004 , G03F7/16 , H01L21/027 , H01L21/033 , H01L21/3065 , H01L21/308 , H01L21/311 , H01L21/3213
CPC分类号： G03F7/40 , B82Y30/00 , G03F7/165 , H01L21/0273 , H01L21/0337 , H01L21/0338 , H01L21/3081 , H01L21/3086 , H01L21/3088 , H01L21/31144 , H01L21/32139
摘要： Provided are a mask pattern including a self-assembled molecular layer, a method of forming the same, and a method of fabricating a semiconductor device. The mask pattern includes a resist pattern formed on a semiconductor substrate and the self-assembled molecular layer formed on at least a sidewall of the resist pattern. To form the mask pattern, first, the resist pattern is formed with openings on an underlayer covering the substrate to expose the underlayer to a first width. Then, the self-assembled molecular layer is selectively formed on a surface of the resist pattern to expose the underlayer to a second width smaller than the first width. The underlayer is etched using the resist pattern and the self-assembled molecular layer as an etching mask to obtain a fine pattern.
摘要翻译：提供了包括自组装分子层的掩模图案，其形成方法和制造半导体器件的方法。掩模图案包括形成在半导体衬底上的抗蚀剂图案和形成在抗蚀图案的至少侧壁上的自组装分子层。为了形成掩模图案，首先，在覆盖基板的下层上形成抗蚀剂图案，使底层暴露于第一宽度。然后，在抗蚀剂图案的表面上选择性地形成自组装分子层，以使底层暴露于小于第一宽度的第二宽度。使用抗蚀剂图案和自组装分子层作为蚀刻掩模来蚀刻底层以获得精细图案。

10. 发明申请

US20110059613A1 MASK PATTERN FOR SEMICONDUCTOR DEVICE FABRICATION, METHOD OF FORMING THE SAME, AND METHOD OF FABRICATING FINELY PATTERNED SEMICONDUCTOR DEVICE 失效
标题翻译：用于半导体器件制造的掩模图案，其形成方法以及制造精细图案半导体器件的方法
公开(公告)号：US20110059613A1
公开(公告)日：2011-03-10
申请号：US12946964
申请日：2010-11-16
申请人： Jung-Hwan Hah , Jin Hong , Hyun-Woo Kim , Hata Mitsuhiro , Kolake Mayya Subramanya , Sang-Gyun Woo
发明人： Jung-Hwan Hah , Jin Hong , Hyun-Woo Kim , Hata Mitsuhiro , Kolake Mayya Subramanya , Sang-Gyun Woo
IPC分类号： H01L21/31 , H01L21/20
CPC分类号： G03F7/40 , B82Y30/00 , G03F7/0752 , G03F7/165 , H01L21/0274
摘要： Provided are a mask pattern including a silicon-containing self-assembled molecular layer, a method of forming the same, and a method of fabricating a semiconductor device. The mask pattern includes a resist pattern formed on a semiconductor substrate and the self-assembled molecular layer formed on the resist pattern. The self-assembled molecular layer has a silica network formed by a sol-gel reaction. To form the mask pattern, first, the resist pattern is formed with openings on an underlayer covering the substrate to expose the underlayer to a first width. Then, the self-assembled molecular layer is selectively formed only on a surface of the resist pattern to expose the underlayer to a second width smaller than the first width. The underlayer is etched by using the resist pattern and the self-assembled molecular layer as an etching mask to obtain a fine pattern.
摘要翻译：提供了包括含硅自组装分子层的掩模图案，其形成方法和制造半导体器件的方法。掩模图案包括形成在半导体衬底上的抗蚀剂图案和形成在抗蚀剂图案上的自组装分子层。自组装分子层具有通过溶胶 - 凝胶反应形成的二氧化硅网络。为了形成掩模图案，首先，在覆盖基板的下层上形成抗蚀剂图案，使底层暴露于第一宽度。然后，仅在抗蚀剂图案的表面上选择性地形成自组装分子层，以使底层暴露于小于第一宽度的第二宽度。通过使用抗蚀剂图案和自组装分子层作为蚀刻掩模来蚀刻底层以获得精细图案。

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