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热词
    • 2. 发明授权
    • Semiconductor device and method of forming the same
    • 半导体器件及其形成方法
    • US08786016B2
    • 2014-07-22
    • US13908300
    • 2013-06-03
    • Jae-June Jang
    • Jae-June Jang
    • H01L29/66
    • H01L29/7816H01L21/02233H01L21/76224H01L29/0649H01L29/0653H01L29/0878H01L29/1079H01L29/1083H01L29/1095H01L29/66659H01L29/66681
    • A semiconductor device may include a semiconductor substrate, a first conductive type well and a second conductive type drift region in the semiconductor substrate, the drift region including a first drift doping region and a second drift doping region, the second drift doping region vertically overlapping the well, and a first conductive type body region in the well, the body region being in contact with a side of the first drift doping region. The first drift doping region and the second doping region may include a first conductive type dopant and a second conductive type dopant, and an average density of the first conductive type dopant in the first drift doping region may be less than an average density of the first conductive type dopant in the second drift doping region.
    • 半导体器件可以包括半导体衬底,半导体衬底中的第一导电类型阱和第二导电类型漂移区,漂移区包括第一漂移掺杂区和第二漂移掺杂区,第二漂移掺杂区垂直重叠 以及阱中的第一导电类型体区域,所述体区域与第一漂移掺杂区域的侧面接触。 第一漂移掺杂区域和第二掺杂区域可以包括第一导电型掺杂剂和第二导电型掺杂剂,并且第一漂移掺杂区域中的第一导电类型掺杂剂的平均密度可以小于第一掺杂区域的第一掺杂区域的平均密度 导电型掺杂剂。