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    • 2. 发明申请
    • SWITCHING CIRCUIT FOR MILLIMETER WAVEBAND CONTROL CIRCUIT
    • 用于微波波形控制电路的切换电路
    • US20090146724A1
    • 2009-06-11
    • US12139046
    • 2008-06-13
    • Jae Kyoung MunDong Young KimJong Won LimHo Kyun AhnHae Cheon KimHyun Kyu Yu
    • Jae Kyoung MunDong Young KimJong Won LimHo Kyun AhnHae Cheon KimHyun Kyu Yu
    • H03K17/06
    • H03K17/063H01P1/15H03K17/693H03K2017/066
    • Provided is a switching circuit for a millimeter waveband control circuit. The switching circuit for a millimeter waveband control circuit includes a switching cell disposed on a signal port path to match an interested frequency and including at least one transistor coupled vertically to an input/output transmission line and a plurality of ground via holes disposed symmetrically in an upper portion and a lower portion of the input/output transmission line; capacitors for stabilizing a bias of the switching cell; and bias pads coupled in parallel to the capacitor to control the switching cell. Therefore, the switching circuit may be useful to improve its isolation by simplifying its design and layout through the use of symmetrical structure of optimized switching cells without the separate use of different switch elements, and also to reduce its manufacturing cost through the improved yield of the manufacturing process and the enhanced integration since it is possible to reduce a chip size of an integrated circuit in addition to its low insertion loss.
    • 提供了一种用于毫米波段控制电路的开关电路。 毫米波段控制电路的开关电路包括设置在信号端口路径上以匹配感兴趣频率并且包括垂直于输入/输出传输线耦合的至少一个晶体管的开关单元和对称地布置在其中的多个接地通孔 输入/输出传输线的上部和下部; 用于稳定开关电池的偏置的电容器; 以及与电容器并联耦合的偏置焊盘以控制开关单元。 因此,切换电路可能有助于通过简化其设计和布局来改善其隔离,通过使用优化的开关电池的对称结构,而不需要分开使用不同的开关元件,并且还可以通过提高产量来提高其制造成本 制造工艺和增强的集成,因为除了低插入损耗之外,可以减小集成电路的芯片尺寸。
    • 4. 发明授权
    • Method of manufacturing field effect transistor
    • 制造场效应晶体管的方法
    • US07183149B2
    • 2007-02-27
    • US11180726
    • 2005-07-14
    • Ho Kyun AhnJong Won LimHong Gu JiWoo Jin ChangJae Kyoung MunHae Cheon Kim
    • Ho Kyun AhnJong Won LimHong Gu JiWoo Jin ChangJae Kyoung MunHae Cheon Kim
    • H01L21/338
    • H01L29/66856H01L29/66462
    • Provided is a method of manufacturing a field effect transistor (FET). The method includes steps of: forming an ohmic metal layer on a substrate in source and drain regions; sequentially forming an insulating layer and a multilayered resist layer on the entire surface of the resultant structure and simultaneously forming resist patterns having respectively different shapes in both a first region excluding the ohmic metal layer and a second region excluding the ohmic metal layer, wherein a lowermost resist pattern is exposed in the first region, and the insulating layer is exposed in the second region; exposing the substrate and the insulating layer by simultaneously etching the exposed insulating layer and the exposed lowermost resist pattern using the resist patterns as etch masks, respectively; performing a recess process on the exposed substrate and etching the exposed insulating layer to expose the substrate; and forming gate recess regions having different etching depths from each other over the substrate, depositing a predetermined gate metal, and removing the resist patterns. In this method, transistors having different threshold voltages can be manufactured without additional mask patterns using the least number of processes, with the results that the cost of production can be reduced and the stability and productivity of semiconductor devices can be improved.
    • 提供了制造场效应晶体管(FET)的方法。 该方法包括以下步骤:在源极和漏极区域的衬底上形成欧姆金属层; 在所得结构的整个表面上顺序地形成绝缘层和多层抗蚀剂层,并且同时形成除了欧姆金属层以外的第一区域和不包括欧姆金属层的第二区域中具有不同形状的抗蚀剂图案,其中最下面 抗蚀剂图案在第一区域中暴露,并且绝缘层在第二区域中暴露; 通过分别使用抗蚀剂图案作为蚀刻掩模,同时蚀刻暴露的绝缘层和暴露的最下面的抗蚀剂图案来暴露衬底和绝缘层; 对曝光的衬底进行凹陷处理并蚀刻暴露的绝缘层以露出衬底; 以及在衬底上形成具有彼此不同蚀刻深度的栅极凹陷区域,沉积预定的栅极金属和去除抗蚀剂图案。 在该方法中,可以使用最少数量的工艺来制造具有不同阈值电压的晶体管,而不需要额外的掩模图案,结果可以降低生产成本,并且可以提高半导体器件的稳定性和生产率。
    • 6. 发明授权
    • High-isolation switching device for millimeter-wave band control circuit
    • 用于毫米波段控制电路的高隔离开关装置
    • US07671697B2
    • 2010-03-02
    • US11928410
    • 2007-10-30
    • Jae Kyoung MunHae Cheon KimDong Young KimJong Won LimHo Kyun AhnHyun Kyu Yu
    • Jae Kyoung MunHae Cheon KimDong Young KimJong Won LimHo Kyun AhnHyun Kyu Yu
    • H01P1/10H01L29/80
    • H01P1/15
    • Provided is a high-isolation switching device for a millimeter-wave band control circuit. By optimizing a cell structure to improve the isolation of an off-state without deteriorating the insertion loss of an on-state, it is possible to implement a high-isolation switching device useful in the design and manufacture of a millimeter-wave band control circuit such as a phase shifter or digital attenuator using switching characteristics. In addition, when a switch microwave monolithic integrated circuit (MMIC) is designed to use the switching device, it is not necessary to use a multi-stage shunt field effect transistor (FET) to improve isolation, nor to dispose an additional λ/4 transformer transmission line, inductor or capacitor near the switching device. Thus, chip size can be reduced, degree of integration can be enhanced, and manufacturing yield can be increased. Consequently, it is possible to reduce manufacturing cost.
    • 提供了一种用于毫米波段控制电路的高隔离开关装置。 通过优化单元结构以改善断开状态的隔离而不会导致导通状态的插入损耗的恶化,可以实现用于设计和制造毫米波段控制电路的高隔离开关装置 例如使用开关特性的移相器或数字衰减器。 另外,当开关微波单片集成电路(MMIC)设计为使用开关器件时,不需要使用多级并联场效应晶体管(FET)来改善隔离度,也不需要设置额外的λ/ 4 变压器输电线路,电感器或电容器附近的开关装置。 因此,可以降低芯片尺寸,可以提高集成度,并且可以提高制造成品率。 因此,可以降低制造成本。
    • 7. 发明申请
    • HIGH-ISOLATION SWITCHING DEVICE FOR MILLIMETER-WAVE BAND CONTROL CIRCUIT
    • 用于微波波段控制电路的高隔离开关装置
    • US20080129427A1
    • 2008-06-05
    • US11928410
    • 2007-10-30
    • Jae Kyoung MUNHae Cheon KimDong Young KimJong Won LimHo Kyun AhnHyun Kyu Yu
    • Jae Kyoung MUNHae Cheon KimDong Young KimJong Won LimHo Kyun AhnHyun Kyu Yu
    • H01P1/10
    • H01P1/15
    • Provided is a high-isolation switching device for a millimeter-wave band control circuit. By optimizing a cell structure to improve the isolation of an off-state without deteriorating the insertion loss of an on-state, it is possible to implement a high-isolation switching device useful in the design and manufacture of a millimeter-wave band control circuit such as a phase shifter or digital attenuator using switching characteristics. In addition, when a switch microwave monolithic integrated circuit (MMIC) is designed to use the switching device, it is not necessary to use a multi-stage shunt field effect transistor (FET) to improve isolation, nor to dispose an additional λ/4 transformer transmission line, inductor or capacitor near the switching device. Thus, chip size can be reduced, degree of integration can be enhanced, and manufacturing yield can be increased. Consequently, it is possible to reduce manufacturing cost.
    • 提供了一种用于毫米波段控制电路的高隔离开关装置。 通过优化单元结构以改善断开状态的隔离而不会导致导通状态的插入损耗的恶化,可以实现用于设计和制造毫米波段控制电路的高隔离开关装置 例如使用开关特性的移相器或数字衰减器。 另外,当开关微波单片集成电路(MMIC)被设计为使用开关器件时,不需要使用多级并联场效应晶体管(FET)来改善隔离度,也不需要配置额外的λ/ 4 变压器输电线路,电感器或电容器附近的开关装置。 因此,可以降低芯片尺寸,可以提高集成度,并且可以提高制造成品率。 因此,可以降低制造成本。
    • 8. 发明申请
    • Method of forming T- or gamma-shaped electrode
    • 形成T形或γ形电极的方法
    • US20080124852A1
    • 2008-05-29
    • US11605508
    • 2006-11-28
    • Ho Kyun AhnJong Won LimJae Kyoung MunWoo Jin ChangHong Gu JiHae Cheon Kim
    • Ho Kyun AhnJong Won LimJae Kyoung MunWoo Jin ChangHong Gu JiHae Cheon Kim
    • H01L21/338
    • H01L29/4232H01L21/28587H01L21/28593
    • A method of forming a fine T- or gamma-shaped gate electrode is provided, which is performed by a lithography process using a multi-layered photoresist layer having various sensitivities, deposition of an insulating layer, and an etching process. The method includes: a first step of depositing a first insulating layer on a semiconductor substrate; a second step of coating at least two photoresist layers with different sensitivities from each other on the first insulating layer, and patterning the photoresist layers to have openings which are different in size; a third step of etching the first insulating layer using the photoresist layers as etch masks to form a step hole in which a part contacting the substrate is narrower than an upper part thereof, and removing the photoresist layers; a fourth step of forming a photoresist layer on the first insulating layer, and forming an opening in the photoresist layer to have a T- or gamma-shaped gate head pattern; a fifth step of performing a gate recess process with respect to the gate pattern; and a sixth step of depositing a gate metal on the gate pattern, and removing the photoresist layers.
    • 提供了一种通过使用具有各种灵敏度的多层光致抗蚀剂层,沉积绝缘层和蚀刻工艺的光刻工艺来形成精细的T形或γ形栅电极的方法。 该方法包括:在半导体衬底上沉积第一绝缘层的第一步骤; 在所述第一绝缘层上涂覆彼此具有不同灵敏度的至少两个光致抗蚀剂层的第二步骤,以及使所述光致抗蚀剂层图案化以具有尺寸不同的开口; 使用光致抗蚀剂层作为蚀刻掩模来蚀刻第一绝缘层以形成步骤孔的第三步骤,其中与衬底接触的部分比其上部更窄,并且去除光致抗蚀剂层; 在所述第一绝缘层上形成光致抗蚀剂层,以及在所述光致抗蚀剂层中形成具有T形或γ形门头图案的开口的第四步骤; 执行相对于栅极图案的栅极凹槽工艺的第五步骤; 以及在栅极图案上沉积栅极金属和去除光致抗蚀剂层的第六步骤。