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    • 1. 发明授权
    • Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate
    • 薄膜晶体管阵列基板及其制造方法以及检查基板的系统
    • US07863620B2
    • 2011-01-04
    • US12574915
    • 2009-10-07
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • H01L29/76H01L21/00
    • G02F1/1362G02F1/13458G02F2001/136254H01L21/32134H01L21/32136H01L27/124H01L27/1255H01L27/1288
    • Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).
    • 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 所述栅极焊盘或数据焊盘并传输相应的信号,其中用于接触所述栅极焊盘或所述数据焊盘的所述探针的远端处的接触尖端是圆形的,并且所述圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。
    • 2. 发明申请
    • Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate
    • 薄膜晶体管阵列基板及其制造方法以及检查基板的系统
    • US20050087770A1
    • 2005-04-28
    • US10986930
    • 2004-11-15
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • G02F1/136H01L21/3213H01L21/77H01L21/84H01L27/12H01L27/13H01L29/73
    • G02F1/1362G02F1/13458G02F2001/136254H01L21/32134H01L21/32136H01L27/124H01L27/1255H01L27/1288
    • Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).
    • 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号,其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的,并且圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。
    • 4. 发明授权
    • Thin film transistor array substrate, method for manufacturing the same and system for inspecting the substrate
    • 薄膜晶体管阵列基板及其制造方法以及检查基板的系统
    • US07187003B2
    • 2007-03-06
    • US10986930
    • 2004-11-15
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • H01L31/036H01L21/00
    • G02F1/1362G02F1/13458G02F2001/136254H01L21/32134H01L21/32136H01L27/124H01L27/1255H01L27/1288
    • Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).
    • 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号,其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的,并且圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。
    • 5. 发明授权
    • Thin film transistor array panel
    • 薄膜晶体管阵列面板
    • US06872976B2
    • 2005-03-29
    • US10602052
    • 2003-06-24
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • Hyang-Shik KongSung-Wook HuhYoung-Bae Park
    • G02F1/136H01L21/3213H01L21/77H01L21/84H01L27/12H01L27/13H01L29/04H01L31/036H01L31/20
    • G02F1/1362G02F1/13458G02F2001/136254H01L21/32134H01L21/32136H01L27/124H01L27/1255H01L27/1288
    • Disclosed is a thin film transistor substrate and a system for inspecting the same. The thin film transistor substrate comprises gate wiring formed on an insulation substrate and including gate lines, and gate electrodes and gate pads connected to the gate lines; a gate insulation layer covering the gate wiring; a semiconductor layer formed over the gate insulation layer; data wiring formed over the gate insulation layer and including data pads; a protection layer covering the data wiring; auxiliary pads connected to the data pads through contact holes formed in the protection layer; and a pad auxiliary layer formed protruding a predetermined height under the data pads. The inspection system for determining whether a thin film transistor substrate is defective, in which the thin film transistor substrate comprises gate wiring including gate lines, gate electrodes and gate pads, and data wiring including source electrodes and drain electrodes, includes a probe pin for contacting the gate pads or data pads and transmitting a corresponding signal, wherein a contact tip at a distal end of the probe pin for contacting the gate pads or the data pads is rounded, and a radius of the rounded contact tip is 2 μm or less, or the rounded contact tip is coated with gold (Au).
    • 公开了一种薄膜晶体管基板及其检查系统。 薄膜晶体管基板包括形成在绝缘基板上并包括栅极线的栅极布线,以及连接到栅极线的栅电极和栅极焊盘; 覆盖栅极布线的栅极绝缘层; 形成在所述栅绝缘层上的半导体层; 数据布线形成在栅极绝缘层上并包括数据焊盘; 覆盖数据线的保护层; 辅助焊盘通过形成在保护层中的接触孔连接到数据焊盘; 以及在数据焊盘下方突出预定高度形成的焊盘辅助层。 用于确定薄膜晶体管基板是否缺陷的检查系统,其中薄膜晶体管基板包括包括栅极线,栅电极和栅极焊盘的栅极布线,以及包括源电极和漏电极的数据布线,包括用于接触的探针 栅极焊盘或数据焊盘并传输相应的信号,其中用于接触栅极焊盘或数据焊盘的探针的远端处的接触尖端是圆形的,并且圆形接触尖端的半径为2μm或更小, 或圆形接触尖端涂有金(Au)。