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    • 1. 发明申请
    • METHOD FOR DUMMY METAL AND DUMMY VIA INSERTION
    • 用于金属和DUMMY通过插入的方法
    • US20100242008A1
    • 2010-09-23
    • US12728728
    • 2010-03-22
    • Hung-Yi LIUChung-Hsing WANGChih-Chieh CHENJian-Yi LI
    • Hung-Yi LIUChung-Hsing WANGChih-Chieh CHENJian-Yi LI
    • G06F17/50
    • G06F17/5077G06F17/5045G06F17/5068G06F17/5072G06F17/5081
    • A method for dummy metal and dummy via insertion is provided. In one embodiment, dummy metals are inserted using a place and route tool, where the place and route tool has timing-awareness. Then, dummy vias arrays are inserted inside an overlap area of dummy metals using a design-rule-checking utility. Fine-grained dummy vias arrays are inserted in available space far away from main patterns. The dummy-patterns resulting from the inserted dummy vias are compressed using the design-rule-checking utility to reduce the size of a graphic data system file generated from the integrated circuit design. The dummy vias can be inserted with relaxed via spacing rules. The dummy metals are inserted with a constant line-end spacing between them for better process control and the maximum length of the dummy metal can be limited for smaller coupling effects. The dummy vias can have various sizes and a square or rectangular shape.
    • 提供了一种用于虚拟金属和虚拟通孔插入的方法。 在一个实施例中,使用地点和路线工具插入虚拟金属,其中地点和路线工具具有时间意识。 然后,使用设计规则检查实用程序将虚拟过孔阵列插入到虚拟金属的重叠区域内。 细粒度的虚拟通孔阵列插入到远离主图案的可用空间中。 使用设计规则检查实用程序对插入的虚拟通孔产生的虚拟模式进行压缩,以减小从集成电路设计生成的图形数据系统文件的大小。 虚拟通孔可以放松通过间隔规则插入。 虚拟金属以它们之间的恒定的线端间隔插入,以获得更好的工艺控制,并且可以限制虚拟金属的最大长度以减小耦合效应。 虚拟通孔可以具有各种尺寸和正方形或矩形形状。