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    • 2. 发明申请
    • IN-BAND BEATING REMOVAL FOR A MEMS GYROSCOPE
    • 用于MEMS陀螺仪的带内去除
    • US20160290804A1
    • 2016-10-06
    • US15035869
    • 2013-11-22
    • Thierry CASSAGNESHugues BEAULATONLaurent CORNIBERTYean Ling TEO
    • Thierry CassagnesHugues BeaulatonLaurent CornibertYean Ling Teo
    • G01C19/5726H04L7/033G06F1/08
    • G01C19/5726G01C19/04G06F1/08G06F1/1694H04L7/033H04L7/06
    • A vibration gyroscope circuitry (VCIRC) connectable to a vibrating MEMS gyroscope (VMEMS). The circuitry comprises drive circuitry (DRIVE) arranged to drive, when the circuitry is connected, the vibration MEMS gyroscope (VMEMS) and a measurement unit (DMU) which provides a drive measurement voltage signal (DMV) forming a measure of a displacement of a mass along a drive axis. A sense circuitry (SENSE) is arranged to process a sense measurement signal of the vibration MEMS gyroscope (VMEMS) forming a measure for a displacement of the mass along a sense axis. A digital sample clock generator (SCG) is arranged to generate a sample clock signal (SCLK) from an input signal (FDxy) derivable from a drive measurement voltage signal (DMV). The sample clock generator (SCG) comprises an oscillator (HFOSC) arranged to generate a master clock (MOSC), and a counter unit (OSCCNTR) arranged to count master clock periods during one period of the input signal. The clock generator also comprises a number count monitor (NCM) arranged to determine during how many input signal periods the number count stays constant, and to compare the number of constant periods (Ncp) with a critical number of constant periods (Ncp_crit). A frequency shifter (FSH) will trigger the oscillator to shift the master clock frequency whenever the number count monitor (NCM) has determined that the number of constant periods (Ncp) exceeds the critical number of constant periods (Ncp_crit).
    • 振动陀螺仪电路(VCIRC)可连接到振动MEMS陀螺仪(VMEMS)。 电路包括驱动电路(DRIVE),驱动电路(DRIVE)被布置成在电路连接时驱动振动MEMS陀螺仪(VMEMS)和测量单元(DMU),其提供驱动测量电压信号(DMV),其形成一个 沿驱动轴的质量。 感测电路(SENSE)被布置为处理振动MEMS陀螺仪(VMEMS)的感测测量信号,其形成沿着感测轴的质量位移的测量。 数字采样时钟发生器(SCG)被布置成从可从驱动测量电压信号(DMV)导出的输入信号(FDxy)产生采样时钟信号(SCLK)。 采样时钟发生器(SCG)包括布置成产生主时钟(MOSC)的振荡器(HFOSC)和被配置为在输入信号的一个周期期间对主时钟周期进行计数的计数器单元(OSCCNTR)。 时钟发生器还包括一个数字计数监视器(NCM),用于确定在数量保持不变的多少个输入信号周期内,以及将常数周期数(Ncp)与临界数量的恒定周期(Ncp_crit)进行比较。 每当数字监视(NCM)确定恒定周期数(Ncp)超过常数周期(Ncp_crit)的临界数时,移频器(FSH)将触发振荡器来移动主时钟频率。