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    • 3. 发明授权
    • High capacitance dynamic random access memory manufacturing process
    • 高电容动态随机存取存储器制造工艺
    • US5578516A
    • 1996-11-26
    • US499745
    • 1995-07-07
    • Hsiang-Ming Chou
    • Hsiang-Ming Chou
    • H01L21/8242H01L27/108H01L21/70H01L27/00
    • H01L27/10852H01L27/10817
    • A method for manufacturing an array of dynamic random access memory (DRAM) cells having high capacitance stacked capacitors, is accomplished. The method involves forming node contact openings to the capacitor source/drain contact areas of the field effect transistors, and forming the capacitor bottom electrodes using patterned layers of heavily doped and undoped polysilicon. The selective etch property of the heavily doped polysilicon to the undoped polysilicon is used to form bottom electrodes having sidewall spacers extending upward and increasing the effective capacitor area. After doping the bottom electrode by either ion implantation or out-diffusion, the stacked capacitors on the array of DRAM cells is completed by forming an inter-electrode dielectric layer on the bottom electrode surfaces and forming a top electrodes from a patterned doped polysilicon layer.
    • 实现了具有高电容堆叠电容器的动态随机存取存储器(DRAM)单元阵列的制造方法。 该方法包括在场效应晶体管的电容器源极/漏极接触区域形成节点接触开口,以及使用重掺杂和未掺杂多晶硅的图案化层形成电容器底部电极。 重掺杂多晶硅对未掺杂多晶硅的选择性蚀刻性质用于形成具有向上延伸的侧壁间隔并增加有效电容器面积的底部电极。 在通过离子注入或外扩散掺杂底部电极之后,通过在底部电极表面上形成电极间介电层并从图案化的掺杂多晶硅层形成顶部电极来完成DRAM单元阵列上的层叠电容器。