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    • 2. 再颁专利
    • Manufacturing process of thin film transistor
    • 薄膜晶体管的制造工艺
    • USRE44531E1
    • 2013-10-08
    • US13403800
    • 2012-02-23
    • Min-Ching HsuYung-Lung Mo
    • Min-Ching HsuYung-Lung Mo
    • H01L21/84
    • H01L29/78618H01L29/66765
    • A thin film transistor includes a gate, a gate insulator layer, a channel layer, a source, a drain, and an ohmic contact layer. The gate insulator layer covers the gate; the channel layer is disposed on the gate insulator layer above the gate; the source and the drain are disposed on the channel layer; the ohmic contact layer is disposed between the channel layer and the source and drain. The ohmic contact layer is constituted by a number of film layers. As mentioned above, the thin film transistor has an ohmic contact layer constituted by a number of film layers. When the thin film transistor is turned off, the current leakage thereof is lowered than that of a conventional thin film transistor.
    • 薄膜晶体管包括栅极,栅极绝缘体层,沟道层,源极,漏极和欧姆接触层。 栅极绝缘体层覆盖栅极; 沟道层设置在栅极上方的栅极绝缘体层上; 源极和漏极设置在沟道层上; 欧姆接触层设置在沟道层和源极和漏极之间。 欧姆接触层由多个膜层构成。 如上所述,薄膜晶体管具有由多个膜层构成的欧姆接触层。 当薄膜晶体管截止时,其电流泄漏比传统的薄膜晶体管低。
    • 3. 发明授权
    • Manufacturing process of thin film transistor
    • 薄膜晶体管的制造工艺
    • US07666725B2
    • 2010-02-23
    • US12338511
    • 2008-12-18
    • Min-Ching HsuYung-Lung Mo
    • Min-Ching HsuYung-Lung Mo
    • H01L21/84
    • H01L29/78618H01L29/66765
    • A thin film transistor includes a gate, a gate insulator layer, a channel layer, a source, a drain, and an ohmic contact layer. The gate insulator layer covers the gate; the channel layer is disposed on the gate insulator layer above the gate; the source and the drain are disposed on the channel layer; the ohmic contact layer is disposed between the channel layer and the source and drain. The ohmic contact layer is constituted by a number of film layers. As mentioned above, the thin film transistor has an ohmic contact layer constituted by a number of film layers. When the thin film transistor is turned off, the current leakage thereof is lowered than that of a conventional thin film transistor.
    • 薄膜晶体管包括栅极,栅极绝缘体层,沟道层,源极,漏极和欧姆接触层。 栅极绝缘体层覆盖栅极; 沟道层设置在栅极上方的栅极绝缘体层上; 源极和漏极设置在沟道层上; 欧姆接触层设置在沟道层和源极和漏极之间。 欧姆接触层由多个膜层构成。 如上所述,薄膜晶体管具有由多个膜层构成的欧姆接触层。 当薄膜晶体管截止时,其电流泄漏比传统的薄膜晶体管低。
    • 4. 发明申请
    • MANUFACTURING PROCESS OF THIN FILM TRANSISTOR
    • 薄膜晶体管的制造工艺
    • US20090098691A1
    • 2009-04-16
    • US12338511
    • 2008-12-18
    • Min-Ching HsuYung-Lung Mo
    • Min-Ching HsuYung-Lung Mo
    • H01L21/336
    • H01L29/78618H01L29/66765
    • A thin film transistor includes a gate, a gate insulator layer, a channel layer, a source, a drain, and an ohmic contact layer. The gate insulator layer covers the gate; the channel layer is disposed on the gate insulator layer above the gate; the source and the drain are disposed on the channel layer; the ohmic contact layer is disposed between the channel layer and the source and drain. The ohmic contact layer is constituted by a number of film layers. As mentioned above, the thin film transistor has an ohmic contact layer constituted by a number of film layers. When the thin film transistor is turned off, the current leakage thereof is lowered than that of a conventional thin film transistor.
    • 薄膜晶体管包括栅极,栅极绝缘体层,沟道层,源极,漏极和欧姆接触层。 栅极绝缘体层覆盖栅极; 沟道层设置在栅极上方的栅极绝缘体层上; 源极和漏极设置在沟道层上; 欧姆接触层设置在沟道层和源极和漏极之间。 欧姆接触层由多个膜层构成。 如上所述,薄膜晶体管具有由多个膜层构成的欧姆接触层。 当薄膜晶体管截止时,其电流泄漏比传统的薄膜晶体管低。