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1. 发明申请

US20070008534A1 Systems and methods for distinguishing reflections of multiple laser beams for calibration for semiconductor structure processing 有权
标题翻译：用于区分多个激光束的反射用于半导体结构处理的校准的系统和方法
公开(公告)号：US20070008534A1
公开(公告)日：2007-01-11
申请号：US11499394
申请日：2006-08-03
申请人： Ho Lo , David Hemenway , Brady Nilsen , Kelly Bruland
发明人： Ho Lo , David Hemenway , Brady Nilsen , Kelly Bruland
IPC分类号： G01B11/00
CPC分类号： H01L23/5258 , G11C17/14 , G11C17/143 , H01L2924/0002 , H01L2924/00
摘要： A system determines relative positions of a semiconductor substrate and a plurality of laser beam spots on or within the semiconductor substrate in a machine for selectively irradiating structures on or within the substrate using a plurality of laser beams. The system comprises a laser source, first and second laser beam propagation paths, first and second reflection sensors, and a processor. The laser source produces at least the first and second laser beams, which propagate toward the substrate along the first and second propagation paths, respectively, which have respective first and second axes that intersects the substrate at respective first and second spots. The reflection sensors are positioned to detect reflection of the spots, as the spots moves relative to the substrate, thereby generating reflection signals. The processor is configured to determine, based on the reflection signals, positions of the spots on or within the substrate.
摘要翻译：系统确定半导体衬底和机器中半导体衬底上或半导体衬底内的多个激光束点的相对位置，用于使用多个激光束选择性地照射衬底上或衬底内的结构。该系统包括激光源，第一和第二激光束传播路径，第一和第二反射传感器以及处理器。激光源至少产生第一和第二激光束，其分别沿着第一和第二传播路径朝着衬底传播，其具有在相应的第一和第二点处与衬底相交的相应的第一和第二轴。反射传感器被定位成检测点的反射，因为光点相对于基板移动，从而产生反射信号。处理器被配置为基于反射信号确定基板上或内部的斑点的位置。

2. 发明申请

US20070012667A1 Method of suppressing distortion of a working laser beam of a laser link processing system 有权
标题翻译：一种抑制激光连接处理系统的工作激光束变形的方法
公开(公告)号：US20070012667A1
公开(公告)日：2007-01-18
申请号：US11440696
申请日：2006-05-24
申请人： David Hemenway , Brady Nilsen , Ho Lo , Keith Grant
发明人： David Hemenway , Brady Nilsen , Ho Lo , Keith Grant
IPC分类号： B23K26/38 , B23K26/06
CPC分类号： B23K26/0665 , B23K26/032 , B23K26/064 , B23K26/0648 , B23K2101/40
摘要： A method of suppressing distortion of a working laser beam directed for incidence on a target specimen presented for processing by a laser link processing system uses a spatial filter to remove stray light-induced distortion from the working laser beam.
摘要翻译：一种抑制由激光连接处理系统处理的用于入射到目标样品上的工作激光束的变形的方法使用空间滤光器从工作激光束去除杂散光诱导的失真。

3. 发明申请

US20050224469A1 Efficient micro-machining apparatus and method employing multiple laser beams 审中-公开
标题翻译：高效的微加工设备和采用多个激光束的方法
公开(公告)号：US20050224469A1
公开(公告)日：2005-10-13
申请号：US11000333
申请日：2004-11-29
申请人： Donald Cutler , Brian Baird , Richard Harris , David Hemenway , Ho Lo , Brady Nilsen , Yasu Osako , Lei Sun , Yunlong Sun , Mark Unrath
发明人： Donald Cutler , Brian Baird , Richard Harris , David Hemenway , Ho Lo , Brady Nilsen , Yasu Osako , Lei Sun , Yunlong Sun , Mark Unrath
IPC分类号： B23K26/06 , B23K26/00
CPC分类号： B23K26/06
摘要： A laser beam switching system employs a laser coupled to a beam switching device that causes a laser beam to switch between first and second beam positioning heads such that while the first beam positioning head is directing the laser beam to process a workpiece target location, the second beam positioning head is moving to another target location and vice versa. A preferred beam switching device includes first and second AOMs positioned such that the laser beam passes through the AOMs without being deflected. When RF is applied to the first AOM, the laser beam is diffracted toward the first beam positioning head, and when RF is applied to the second AOM, the laser beam is diffracted toward the second beam positioning head.
摘要翻译：激光束切换系统采用耦合到光束切换装置的激光器，其使激光束在第一和第二光束定位头之间切换，使得当第一光束定位头引导激光束来处理工件目标位置时，第二光束定位头正在移动到另一个目标位置，反之亦然。优选的光束切换装置包括第一和第二AOM，其被定位成使得激光束不经偏转地穿过AOM。当RF施加到第一AOM时，激光束朝向第一光束定位头衍射，并且当RF施加到第二AOM时，激光束被朝向第二光束定位头衍射。

4. 发明申请

US20070127122A1 OPTICAL COMPONENT CLEANLINESS AND DEBRIS MANAGEMENT IN LASER MICROMACHINING APPLICATIONS 有权
标题翻译：光学组件清洁和清洁管理在激光微型应用中
公开(公告)号：US20070127122A1
公开(公告)日：2007-06-07
申请号：US11565356
申请日：2006-11-30
申请人： Bryan Bolt , David Hemenway , Mark Kosmowski , A. Lerner , Brady Nilsen , Richard Pope
发明人： Bryan Bolt , David Hemenway , Mark Kosmowski , A. Lerner , Brady Nilsen , Richard Pope
IPC分类号： B60R1/06
CPC分类号： B23K26/12 , B23K26/064 , B23K26/0643 , B23K26/128 , B23K26/14 , B23K26/142
摘要： Preferred embodiments of a purge gas port, laser beam attenuating input window, and laser shutter constitute subsystems of a UV laser optical system in which a laser beam is completely enclosed to reduce contamination of the optical system components. Purge gas is injected through multiple locations in a beam tube assembly to ensure that the optical component surfaces sensitive to contamination are in the flow path of the purge gas. The input window functions as a fixed level attenuator to limit photopolymerization of airborne molecules and particles. Periodically rotating optical elements asymmetrically in their holders reduces burn damage to the optics.
摘要翻译：吹扫气体端口，激光束衰减输入窗口和激光快门的优选实施例构成UV激光光学系统的子系统，其中激光束被完全封闭以减少光学系统部件的污染。吹扫气体通过射束管组件中的多个位置注入，以确保对污染敏感的光学部件表面位于吹扫气体的流动路径中。输入窗口用作固定电平衰减器，以限制空气传播的分子和颗粒的光聚合。在其支架中不对称地定期旋转的光学元件减少了对光学元件的烧伤。

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