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    • 10. 发明授权
    • Apparatus for polishing notch portion of wafer
    • 用于抛光晶片的切口部分的装置
    • US5458529A
    • 1995-10-17
    • US249933
    • 1994-05-26
    • Fumihiko HasegawaTatsuo OhtaniKoichiro IchikawaYoshio Nakamura
    • Fumihiko HasegawaTatsuo OhtaniKoichiro IchikawaYoshio Nakamura
    • B24B29/00B24B9/00B24B9/06B24B29/02H01L21/304B24B7/00
    • B24B9/065
    • A polishing apparatus which can effectively polish a bottom wall of a wafer in the notch portion is disclosed. The polishing apparatus includes: a table for supporting the wafer thereon; a rotary buff having a thickness so that the periphery thereof can enter the notch portion of the wafer, and is rotated around an axis which is parallel with a plane of the surface of the wafer supported on the table; a first rotating member such as a motor for rotating the rotary buff; a movable linkage for supporting the rotary buff; an adjusting member such as a cylinder device for adjusting the pressure applied to the bottom wall of the wafer in the notch portion from the rotary buff; and a second rotating member such as a pulse motor for turning the rotary buff around a predetermined axis so that the applied pressure from the rotary buff acts on the bottom wall of the wafer in the notch portion in a direction approximately perpendicular to the surface of the bottom wall.
    • 公开了一种可以有效地抛光切口部分中的晶片底壁的抛光装置。 抛光装置包括:用于在其上支撑晶片的工作台; 旋转抛光器,其厚度使得其周边可以进入晶片的切口部分,并且围绕与支撑在工作台上的晶片的表面的平面平行的轴线旋转; 第一旋转构件,例如用于旋转旋转抛光器的马达; 用于支撑旋转抛光器的可移动连杆; 调节构件,例如用于调节从旋转抛光器施加到切口部分中的晶片的底壁的压力的气缸装置; 以及第二旋转构件,例如脉冲电机,用于围绕预定轴线旋转旋转抛光器,使得来自旋转抛光器的施加压力在大致垂直于切割部分的表面的方向上作用在切口部分中的晶片的底壁上 底壁。