专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2010102693A Substrate processing apparatus 有权
标题翻译：基板加工设备
公开(公告)号：JP2010102693A
公开(公告)日：2010-05-06
申请号：JP2009197151
申请日：2009-08-27
申请人： Hitachi Kokusai Electric Inc , 株式会社日立国際電気
发明人： YAMADA TOMOYUKI , OISHI MAMORU , KITAYAMA KANAKO
IPC分类号： G05B23/02 , C23C14/52 , C23C16/44 , C23C16/455 , G01F1/00 , H01L21/22 , H01L21/31 , H01L21/324
CPC分类号： C23C16/455 , C23C16/45561 , Y10T137/218 , Y10T137/2202 , Y10T137/2213 , Y10T137/2218 , Y10T137/8593 , Y10T137/87917
摘要： PROBLEM TO BE SOLVED: To prevent opening/closing of an electromagnetic valve by a wrong manipulation from being forgotten or hazards caused by incorrect mixing of gases and to improve safety by indicating a gas flow in a gas pipe before the electromagnetic valve is actually opened/closed. SOLUTION: The substrate processing apparatus includes a state detection unit 44 for detecting an opening/closing request state and an opening/closing state of valves 2, 3, 36, and 38 installed at a gas pipeline 1; and an indication unit 44 for indicating a predicted state of gas flowing in the gas pipeline predicted according to the opening/closing request state of the valve and a state of gas flow flowing in the gas pipeline when the valve is opened, in a way that each state is distinguished. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了防止电磁阀由于错误的操作而被忘记或由于气体的不正确混合而引起的危险而防止电磁阀的打开/关闭，并且通过在电磁阀为电磁阀之前指示气体管道中的气体流动来提高安全性实际打开/关闭。基板处理装置包括用于检测安装在气体管线1上的阀2,3,36,38的打开/关闭请求状态和打开/关闭状态的状态检测单元44; 以及指示单元44，用于指示根据阀的打开/关闭请求状态预测的在气体管道中流动的气体的预测状态，以及当阀打开时在气体管道中流动的气流的状态，每个国家的区别。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2005142244A Substrate processor 审中-公开
标题翻译：基板处理器
公开(公告)号：JP2005142244A
公开(公告)日：2005-06-02
申请号：JP2003375134
申请日：2003-11-05
申请人： Hitachi Kokusai Electric Inc , 株式会社日立国際電気
发明人： OISHI MAMORU , MIMURA YOICHI
IPC分类号： H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a substrate processor provided with a transfer machine having a function for detecting installation deviation which occurs due to a variation of a mechanical size and the deformation of a wafer by repetitive use of a boat. SOLUTION: In the substrate processor, the wafer transfer machine 112 holds the wafer 200 in the boat 217, the boat 217 is introduced into a processing chamber, and the wafer 200 is processed. The processor comprises at least one wafer detection sensor 125 that is arranged in the wafer transfer machine 112, and detects presence or absence of the wafer 200 without contact; and a controller (conveyance control means 124) for comparing a result which the wafer detection sensor 125 detects with a result when installation deviation of the previously held substrate does not exist, and judging presence or absence of installation deviation of the wafer 200. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种具有转印机的基板处理器，该转印机具有检测由于重复使用船的机械尺寸和晶片变形引起的安装偏差的功能。解决方案：在基板处理器中，晶片转移机112将晶片200保持在船217中，将船217引入处理室，并且处理晶片200。处理器包括布置在晶片传送机112中的至少一个晶片检测传感器125，并且不接触地检测晶片200的存在或不存在; 以及用于比较晶片检测传感器125检测到的结果与不存在先前保持的基板的安装偏差的结果并判断晶片200的安装偏差的有无的控制器（输送控制装置124）。
版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2013197472A Substrate processing device and substrate lift mechanism 审中-公开
标题翻译：基板处理装置和基板提升机构
公开(公告)号：JP2013197472A
公开(公告)日：2013-09-30
申请号：JP2012065411
申请日：2012-03-22
申请人： Hitachi Kokusai Electric Inc , 株式会社日立国際電気
发明人： OISHI MAMORU , KAGAYA TORU , SHIMADA HIROTETSU
IPC分类号： H01L21/68 , C23C16/44 , H01L21/02 , H01L21/22
摘要： PROBLEM TO BE SOLVED: To enable, when a substrate is disposed on a boat and loaded and unloaded on a substrate processing room, determination on whether the boat is in the substrate processing room or not, from a position of a seal cap equipped with the boat.SOLUTION: The substrate processing device comprises: a transmission-type optical fiber sensor unit 302; a signal converter/amplifier for converting light signals of a light fiber sensor to electrical signals; and a blocking mechanism 300 arranged between a light-projection optical fiber sensor and a light-reception optical fiber sensor, which block light when the light is projected from the light-projection optical fiber sensor to the light-reception optical fiber sensor. The blocking mechanism, composed of a discoid-shaped rotating body, comprises: a light-transmissive slit section; a flag section contacting with a sensed object to be sensed for position; and a control section for determining that the rotating body is rotated by movement of the sensed object to contact with the flag, and when the light-reception fiber sensor receives light through a slit, the sensed object lies in a desirable position.
摘要翻译：要解决的问题：为了在将基板设置在船上并将其装载和卸载到基板处理室上时，能够确定船是否在基板处理室中，从装备有基板处理装置包括：透射型光纤传感器单元302; 用于将光纤传感器的光信号转换为电信号的信号转换器/放大器; 以及布置在光投射光纤传感器和光接收光纤传感器之间的阻挡机构300，其在光从光投射光纤传感器投射到受光光纤传感器时阻挡光。由盘形旋转体构成的阻挡机构包括：透光狭缝部; 与被检测物体接触的标志部分，用于位置; 以及控制部分，用于通过检测到的物体的移动来确定旋转体是否与标志接触，并且当光接收光纤传感器通过狭缝接收光时，感测对象位于期望的位置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式