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1. 发明授权

US09810734B2 Compound sensor including a plurality of detection elements and a plurality of fault detection circuits 有权
公开(公告)号：US09810734B2
公开(公告)日：2017-11-07
申请号：US14764067
申请日：2013-11-19
申请人： Hitachi Automotive Systems, Ltd.
发明人： Daisuke Maeda , Ichiroh Ohsaka , Masahide Hayashi
IPC分类号： G01R31/28 , G01C19/5726 , G01P15/125 , G01P15/18 , G01C19/5776 , G01P21/00 , G01R31/02 , G01P15/08
CPC分类号： G01R31/2829 , G01C19/5726 , G01C19/5776 , G01P15/125 , G01P15/18 , G01P21/00 , G01P2015/0814 , G01R31/025
摘要： A compound sensor capable of suppressing a fault which has occurred in a detection element from affecting other detection units in which no fault has occurred is provided. The compound sensor includes: a plurality of detection units including C/V conversion circuits 321a and 321b, amplifier circuits 322a and 322b, ADCs 323a and 323b, diagnosis voltage outputting DACs 327a and 327b, carrier signal generating DACs 328a and 328b and substrate voltage generating DACs 329a and 329b which are signal detection circuits provided for each of a plurality of detection elements; a power source voltage input unit 331 and a GND voltage input unit 332 shared among each of the plurality of detection units; and overcurrent switch circuits 101a and 101b which are fault detection circuits for detecting a fault of each detection element and stopping power supply to the detection unit in which the fault has occurred.

2. 发明授权

US09678101B2 Physical quantity detection apparatus 有权
公开(公告)号：US09678101B2
公开(公告)日：2017-06-13
申请号：US14356769
申请日：2012-12-03
申请人： Hitachi Automotive Systems, Ltd.
发明人： Toshiaki Nakamura , Masahide Hayashi , Masaru Yamashita
IPC分类号： G01P15/00 , G01P21/00 , G01C19/5776 , G01P15/125 , G01P3/00 , G01P15/097 , G01P15/18
CPC分类号： G01P21/00 , G01C19/5776 , G01P3/00 , G01P15/00 , G01P15/097 , G01P15/125 , G01P15/18
摘要： Provided is a sensor signal output apparatus that outputs a sensor signal at times of the sensor being in steady operation and outputs the operational status of the sensor instead of the sensor signal when the sensor is at fault or in non-steady operation in order to thereby to have a receiver machine obtain a correct sensor signal. The sensor signal output apparatus includes a sensor detecting a physical quantity, a diagnosis part diagnosing the operating state of the sensor, and a communication part transmitting the result of detection by the sensor and the result of diagnosis by the diagnosis part. When the sensor is determined to be normally operating, the communication part selectively outputs the result of detection by the sensor. When the sensor is not determined to be normally operating, the communication part selectively outputs a signal indicative of the operating state of the sensor.

3. 发明申请

US20150040670A1 Inertial Sensor Module 审中-公开
标题翻译：惯性传感器模块
公开(公告)号：US20150040670A1
公开(公告)日：2015-02-12
申请号：US14381827
申请日：2013-01-25
申请人： Hitachi Automotive Systems, Ltd.
发明人： Kiyoko Yamanaka , Heewon Jeong , Masahide Hayashi
IPC分类号： G01P15/08
CPC分类号： G01P15/0802 , B81B2201/0242 , B81B2207/01 , B81C1/00238 , B81C2203/0792 , G01C19/5783 , G01P1/02 , G01P15/125 , G01P15/18 , H01L24/06 , H01L24/48 , H01L24/49 , H01L2224/04042 , H01L2224/05554 , H01L2224/06155 , H01L2224/06164 , H01L2224/48145 , H01L2224/48227 , H01L2224/49171 , H01L2224/49177 , H01L2924/00014 , H01L2924/01322 , H01L2924/1461 , H01L2924/16195 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207 , H01L2924/00012
摘要： In a sensor module capable of changing a detection axis to detect a physical quantity, when a pad is provided at a location other than a corner point of an LSI-side, for the purpose of solving problems such as an increase in a chip surface area and an increase in development costs, caused by guide wiring for connecting the pad, the inertial sensor module is provided with: a first sensor element (100) having a first pad group (120), a second pad group (130) electrically connected to the first pad group and disposed at a location rotated 90 degrees with respect to the first pad group, and a detection axis; and an LSI (202) which controls the first sensor element. In the inertial sensor module, the first sensor element is disposed along a first side of the LSI, a plurality of third pad groups (203) is disposed along a second side intersecting the first side of the LSI, and the third pad group is electrically connected to either the first pad group or the second pad group.
摘要翻译：在能够改变检测轴以检测物理量的传感器模块中，当在LSI侧的角点以外的位置设置焊盘时，为了解决诸如芯片表面积的增加的问题并且由于用于连接焊盘的引导线引起的显影成本的增加，惯性传感器模块具有：第一传感器元件（100），具有第一焊盘组（120），第二焊盘组（130），电连接到所述第一焊盘组并且设置在相对于所述第一焊盘组旋转90度的位置和检测轴; 以及控制第一传感器元件的LSI（202）。在惯性传感器模块中，第一传感器元件沿着LSI的第一侧布置，沿着与LSI的第一侧相交的第二侧设置有多个第三焊盘组（203），并且第三焊盘组电连接到第一焊盘组或第二焊盘组。

4. 发明授权

US10551192B2 Inertial sensor 有权
公开(公告)号：US10551192B2
公开(公告)日：2020-02-04
申请号：US15313242
申请日：2015-04-08
申请人： HITACHI AUTOMOTIVE SYSTEMS, LTD.
发明人： Daisuke Maeda , Heewon Jeong , Masahide Hayashi
IPC分类号： G01C19/5726 , G01C19/5755 , G01P15/18 , G01C19/5769 , G01P15/097 , G01C19/5776 , G01P15/125
摘要： An inertial sensor having a simple configuration by vacuum sealing a resonator which detects acceleration and exploits a resonance vibration using a high Q value MEMS device. The sensor includes: a detecting proof mass and beam which detects acceleration; a driving electrode which excites the detecting proof mass and beam; a resonant frequency tuning electrode which changes the resonant frequency of the detecting proof mass and beam; and a detecting circuit which applies voltage to the resonant frequency tuning electrode for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam when the acceleration is applied to the detecting proof mass and beam during the vibration of the detecting proof mass and beam by the voltage applied to the detecting proof mass and beam, and outputs the acceleration based on a value of the voltage applied to resonant frequency tuning electrode.

5. 发明授权

US09970956B2 Inertial sensor 有权
公开(公告)号：US09970956B2
公开(公告)日：2018-05-15
申请号：US13930011
申请日：2013-06-28
申请人： Hitachi Automotive Systems, Ltd.
发明人： Yuhua Zhang , Heewon Jeong , Kiyoko Yamanaka , Masahide Hayashi
IPC分类号： G01P15/12 , G01P15/08 , G01P15/125
CPC分类号： G01P15/125 , G01P15/0802 , G01P2015/0831
摘要： A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different.

6. 发明授权

US09123188B2 Acceleration sensor fault detection apparatus 有权
标题翻译：加速度传感器故障检测装置
公开(公告)号：US09123188B2
公开(公告)日：2015-09-01
申请号：US13963235
申请日：2013-08-09
申请人： Hitachi Automotive Systems, Ltd.
发明人： Toshiaki Nakamura , Masahide Hayashi
IPC分类号： G07C5/08 , B60T8/88 , G05B23/02
CPC分类号： G07C5/08 , B60T8/885 , G05B23/0221 , G07C5/0808
摘要： Provided is an acceleration detection apparatus installed in a vehicle and including a plurality of acceleration sensors having different characteristics, a function to input diagnosis signals in order to diagnose the outputs of the acceleration sensors and diagnose the fault detection functions while the vehicle stops, and a function to compare the outputs of the sensors in order to detect a fault while the vehicle runs.
摘要翻译：提供一种安装在车辆中的加速度检测装置，其具有具有不同特性的多个加速度传感器，具有输入诊断信号的功能，以便诊断加速度传感器的输出并在车辆停止时诊断故障检测功能，用于比较传感器的输出，以便在车辆行驶时检测故障。

7. 发明申请

US20140130596A1 ANGULAR VELOCITY DETECTION DEVICE 审中-公开
标题翻译：角速度检测装置
公开(公告)号：US20140130596A1
公开(公告)日：2014-05-15
申请号：US14129054
申请日：2012-06-20
申请人： Hitachi Automotive Systems, Ltd.
发明人： Toshiaki Nakamura , Masahiro Matsumoto , Hiroshi Iwasawa , Satoshi Asano , Masahide Hayashi
IPC分类号： G01P3/42
CPC分类号： G01P3/42 , G01C19/5726
摘要： The purpose of the present invention is to achieve accurate angular velocity detection even when an angular velocity detection sensor is set in an environment in which oscillation and electromagnetic noise have significant influence. Provided is an angular velocity detection device which has an oscillating body displaceable in first and second directions that are perpendicular to each other, and which detects, as an angular velocity, a displacement of the oscillating body in the second direction while the oscillating body is being oscillated in the first direction, wherein in accordance with a frequency change in a drive signal for oscillating the oscillating body in the first direction, the frequency of a servo signal for detecting the angular velocity from the quantity of displacement in the second direction is changed (see FIG. 1).
摘要翻译：本发明的目的在于即使将角速度检测传感器设置在振荡和电磁噪声具有显着影响的环境中，也能够实现精确的角速度检测。提供了一种角速度检测装置，其具有在第一和第二方向上彼此垂直的摆动体，并且在摆动体为第二方向时，以角速度检测振动体在第二方向上的位移在第一方向上振荡，其中根据用于在第一方向上振动振荡体的驱动信号的频率变化，改变用于从第二方向上的位移量检测角速度的伺服信号的频率（参见图1）。

8. 发明授权

US10989731B2 Physical quantity sensor 有权
公开(公告)号：US10989731B2
公开(公告)日：2021-04-27
申请号：US15763212
申请日：2016-08-03
申请人： Hitachi Automotive Systems, Ltd.
发明人： Masatoshi Kanamaru , Daisuke Maeda , Masahide Hayashi , Masashi Yura , Akihiro Okamoto
IPC分类号： G01P15/125 , B81B3/00 , G01P15/08 , H01L29/84 , B81B7/00
摘要： To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.

9. 发明授权

US09890037B2 Physical quantity sensor 有权
公开(公告)号：US09890037B2
公开(公告)日：2018-02-13
申请号：US15502554
申请日：2015-06-29
申请人： Hitachi Automotive Systems, Ltd.
发明人： Masatoshi Kanamaru , Masahide Hayashi , Masashi Yura , Heewon Jeong
IPC分类号： B81B7/00 , G01C19/574
CPC分类号： B81B7/0064 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2201/045 , B81B2203/0136 , B81C99/0045 , G01C19/574 , G01P15/08 , G01P15/125 , G01P21/00 , H01L29/84
摘要： For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.

10. 发明授权

US09651408B2 Structure of physical sensor 有权
公开(公告)号：US09651408B2
公开(公告)日：2017-05-16
申请号：US14773122
申请日：2013-12-20
申请人： Hitachi Automotive Systems, Ltd.
发明人： Masatoshi Kanamaru , Takanori Aono , Masahide Hayashi , Heewon Jeong
IPC分类号： B81B1/00 , G01D11/24 , G01C19/5783
CPC分类号： G01D11/245 , G01C19/5783 , G01P1/023
摘要： To suppress variations of a vacuum pressure atmosphere in a physical sensor, a physical sensor in which a sensing part that measures a physical quantity is provided in a vacuum space, includes a sensor part in which a plurality of substrates are stacked, and a cavity substrate 9 having a space and provided on an upper surface side or a lower surface side of the sensor part by bonding, wherein the sensing part communicates with a space of the cavity substrate via a ventilation passage 11a provided in the sensor part.

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