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1. 发明申请

US20130062307A1 METHOD OF MAKING A MASK, METHOD OF PATTERNING BY USING THIS MASK AND METHOD OF MANUFACTURING A MICRO-DEVICE 有权
标题翻译：制造掩模的方法，使用该掩模的图案的方法和制造微型器件的方法
公开(公告)号：US20130062307A1
公开(公告)日：2013-03-14
申请号：US13230261
申请日：2011-09-12
申请人： Hisayoshi WATANABE , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
发明人： Hisayoshi WATANABE , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
IPC分类号： C23F1/04 , G11B5/31 , G03F7/20
CPC分类号： G11B5/3163
摘要： The present invention relates to a method of making a mask for patterning a thin film The method includes a step of forming an inorganic material, which is resolvable into alkali solution, on a substrate; a step of forming the inorganic material in a predetermined pattern; and a step of narrowing the inorganic material with the alkali solution to form the mask.
摘要翻译：本发明涉及一种制备用于图案化薄膜的掩模的方法。该方法包括在基板上形成可分解成碱溶液的无机材料的步骤; 以预定图案形成无机材料的步骤; 以及用碱溶液使无机材料变窄以形成掩模的步骤。

2. 发明授权

US08529777B2 Method of making a mask, method of patterning by using this mask and method of manufacturing a micro-device 有权
标题翻译：制造掩模的方法，使用该掩模的图案化方法和制造微型器件的方法
公开(公告)号：US08529777B2
公开(公告)日：2013-09-10
申请号：US13230261
申请日：2011-09-12
申请人： Hisayoshi Watanabe , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
发明人： Hisayoshi Watanabe , Hideyuki Yatsu , Takayuki Nishizawa , Masashi Sano , Hiromichi Umehara , Takayasu Kanaya , Tetsuji Hori
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00
CPC分类号： G11B5/3163
摘要： The present invention relates to a method of making a mask for patterning a thin film. The method includes a step of forming an inorganic material, which is resolvable into alkali solution, on a substrate; a step of forming the inorganic material in a predetermined pattern; and a step of narrowing the inorganic material with the alkali solution to form the mask.
摘要翻译：本发明涉及一种制造用于图案化薄膜的掩模的方法。该方法包括在基板上形成可分解成碱溶液的无机材料的步骤; 以预定图案形成无机材料的步骤; 以及用碱溶液使无机材料变窄以形成掩模的步骤。

3. 发明授权

US08072706B2 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：US08072706B2
公开(公告)日：2011-12-06
申请号：US12588440
申请日：2009-10-15
申请人： Kei Hirata , Hideyuki Ukita , Shin Narushima , Isamu Toba , Hiromichi Umehara , Hisayoshi Watanabe , Hideyuki Yatsu
发明人： Kei Hirata , Hideyuki Ukita , Shin Narushima , Isamu Toba , Hiromichi Umehara , Hisayoshi Watanabe , Hideyuki Yatsu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A main magnetic pole includes a first part extending from a medium facing surface to a point at a predetermined distance from the medium facing surface, and a second part other than the first part. An accommodation part for accommodating the main magnetic pole includes: a first layer having a groove; a second layer lying between the first layer and the main magnetic pole in the first layer's groove; and a third layer interposed in part between the second layer and the main magnetic pole in the first layer's groove. The second layer is formed of a metal material different from a material used to form the first layer. The third layer is formed of an inorganic insulating material. The second and third layers lie between the first layer and the first part. The second layer lies between the bottom of the first layer's groove and the second part, but the third layer does not. The distance between the bottom of the first layer's groove and the second part is smaller than that between the bottom and the first part.
摘要翻译：主磁极包括从面向介质的表面延伸到与介质相对表面预定距离的点的第一部分和除第一部分之外的第二部分。用于容纳主磁极的容纳部分包括：具有凹槽的第一层; 位于第一层槽中的第一层和主磁极之间的第二层; 以及在第一层槽中的部分地介于第二层和主磁极之间的第三层。第二层由与用于形成第一层的材料不同的金属材料形成。第三层由无机绝缘材料形成。第二层和第三层位于第一层和第一层之间。第二层位于第一层凹槽的底部和第二部分之间，但第三层不存在。第一层槽的底部和第二部分之间的距离小于底部和第一部分之间的距离。

4. 发明申请

US20110090595A1 Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
公开(公告)号：US20110090595A1
公开(公告)日：2011-04-21
申请号：US12588440
申请日：2009-10-15
申请人： Kei Hirata , Hideyuki Ukita , Shin Narushima , Isamu Toba , Hiromichi Umehara , Hisayoshi Watanabe , Hideyuki Yatsu
发明人： Kei Hirata , Hideyuki Ukita , Shin Narushima , Isamu Toba , Hiromichi Umehara , Hisayoshi Watanabe , Hideyuki Yatsu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A main magnetic pole includes a first part extending from a medium facing surface to a point at a predetermined distance from the medium facing surface, and a second part other than the first part. An accommodation part for accommodating the main magnetic pole includes: a first layer having a groove; a second layer lying between the first layer and the main magnetic pole in the first layer's groove; and a third layer interposed in part between the second layer and the main magnetic pole in the first layer's groove. The second layer is formed of a metal material different from a material used to form the first layer. The third layer is formed of an inorganic insulating material. The second and third layers lie between the first layer and the first part. The second layer lies between the bottom of the first layer's groove and the second part, but the third layer does not. The distance between the bottom of the first layer's groove and the second part is smaller than that between the bottom and the first part.

5. 发明申请

US20140002921A1 THIN-FILM MAGNETIC RECORDING HEAD WITH THIN FILM WHICH CONSTRUCTS SENSOR OR HEATER BENEATH MAIN MAGNETIC POLE 有权
标题翻译：薄膜电磁记录头，薄膜薄膜，构成传感器或加热器主体磁极
公开(公告)号：US20140002921A1
公开(公告)日：2014-01-02
申请号：US13535858
申请日：2012-06-28
申请人： Masashi SANO , Hiromichi Umehara , Mutsumi Fujita , Isamu Toba , Tatsuhiro Nojima , Hitoshi Hatate , Hisayoshi Watanabe
发明人： Masashi SANO , Hiromichi Umehara , Mutsumi Fujita , Isamu Toba , Tatsuhiro Nojima , Hitoshi Hatate , Hisayoshi Watanabe
IPC分类号： G11B5/31
CPC分类号： G11B5/607
摘要： A thin film magnetic recording head having a multilayer structure in which plural thin films are laminated and being a perpendicular recording type that applies a magnetic field perpendicularly to a magnetic recording medium and performs recording, includes a main magnetic pole exposed on an air bearing surface facing the magnetic recording medium and guiding a magnetic flux toward the magnetic recording medium, a thin film positioned beneath the main magnetic pole from a perspective of a lamination direction and configuring a sensor or a heater configured to determine a distance from the magnetic recording medium of the thin film magnetic recording head, and a light-absorbing portion positioned between the main magnetic pole and the thin film.
摘要翻译：一种薄膜磁记录头，其具有层叠多个薄膜的多层结构，并且是垂直记录方式，其垂直于磁记录介质施加磁场并进行记录，该磁记录头包括暴露在空气轴承表面磁记录介质，并向磁记录介质引导磁通量，从层叠方向的角度定位在主磁极下方的薄膜，以及配置传感器或加热器，该传感器或加热器被配置为确定与磁记录介质的距离薄膜磁记录头和位于主磁极和薄膜之间的光吸收部分。

6. 发明授权

US08654479B2 Thin-film magnetic recording head with thin film which constructs sensor or heater beneath main magnetic pole 有权
标题翻译：具有薄膜的薄膜磁记录头，其在主磁极下构造传感器或加热器
公开(公告)号：US08654479B2
公开(公告)日：2014-02-18
申请号：US13535858
申请日：2012-06-28
申请人： Masashi Sano , Hiromichi Umehara , Mutsumi Fujita , Isamu Toba , Tatsuhiro Nojima , Hitoshi Hatate , Hisayoshi Watanabe
发明人： Masashi Sano , Hiromichi Umehara , Mutsumi Fujita , Isamu Toba , Tatsuhiro Nojima , Hitoshi Hatate , Hisayoshi Watanabe
IPC分类号： G11B5/127
CPC分类号： G11B5/607
摘要： A thin film magnetic recording head having a multilayer structure in which plural thin films are laminated and being a perpendicular recording type that applies a magnetic field perpendicularly to a magnetic recording medium and performs recording, includes a main magnetic pole exposed on an air bearing surface facing the magnetic recording medium and guiding a magnetic flux toward the magnetic recording medium, a thin film positioned beneath the main magnetic pole from a perspective of a lamination direction and configuring a sensor or a heater configured to determine a distance from the magnetic recording medium of the thin film magnetic recording head, and a light-absorbing portion positioned between the main magnetic pole and the thin film.
摘要翻译：一种薄膜磁记录头，其具有层叠多个薄膜的多层结构，并且是垂直记录方式，其垂直于磁记录介质施加磁场并进行记录，该磁记录头包括暴露在空气轴承表面磁记录介质，并向磁记录介质引导磁通量，从层叠方向的角度定位在主磁极下方的薄膜，以及配置传感器或加热器，该传感器或加热器被配置为确定与磁记录介质的距离薄膜磁记录头和位于主磁极和薄膜之间的光吸收部分。

7. 发明申请

US20130286507A1 THIN-FILM MAGNETIC HEAD AND METHOD OF MAKING WHERE THE HEAD INCLUDES AN ANTIREFLECTION FILM COVERING A LEADING SHIELD 有权
标题翻译：薄膜磁头及其制造方法包括一个覆盖领先防护层的抗反射膜
公开(公告)号：US20130286507A1
公开(公告)日：2013-10-31
申请号：US13459472
申请日：2012-04-30
申请人： Hiromichi Umehara , Masashi Sano , Atsushi Yamaguchi
发明人： Hiromichi Umehara , Masashi Sano , Atsushi Yamaguchi
IPC分类号： G11B5/31 , G03F7/20
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3133
摘要： A thin-film magnetic head has a high write performance because its shape is smooth without roughness. The thin-film magnetic head includes a slider substrate, a write element and an antireflection film. The slider substrate has an air bearing surface at one side and supports a first support layer. The first support layer has a leading shield, and the leading shield has a low-level flat part, a slope part and a high-level flat part continuously arranged at one side in the recited order toward the air bearing surface. The antireflection film entirely covers the low-level flat part, the slope part and the high-level flat part of the leading shield. The write element has a recording magnetic pole film, and the recording magnetic pole film is formed above the antireflection film.
摘要翻译：薄膜磁头具有较高的写入性能，因为其形状平滑无粗糙。薄膜磁头包括滑块基板，写入元件和抗反射膜。滑块基板在一侧具有空气支承表面并且支撑第一支撑层。第一支撑层具有前导屏蔽，并且前导屏蔽具有朝向空气轴承表面按照所述顺序连续布置在其一侧的低级平坦部分，倾斜部分和高级平面部分。防反射膜完全覆盖了前盖的低平面部分，斜面部分和高级平面部分。写元件具有记录磁极膜，并且记录磁极膜形成在抗反射膜的上方。

8. 发明授权

US08564905B1 Thin-film magnetic head and method of making where the head includes an antireflection film covering a leading shield 有权
标题翻译：薄膜磁头和头部包括覆盖前导屏蔽的抗反射膜的方法
公开(公告)号：US08564905B1
公开(公告)日：2013-10-22
申请号：US13459472
申请日：2012-04-30
申请人： Hiromichi Umehara , Masashi Sano , Atsushi Yamaguchi
发明人： Hiromichi Umehara , Masashi Sano , Atsushi Yamaguchi
IPC分类号： G11B5/127 , G11B5/187
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3133
摘要： A thin-film magnetic head has a high write performance because its shape is smooth without roughness. The thin-film magnetic head includes a slider substrate, a write element and an antireflection film. The slider substrate has an air bearing surface at one side and supports a first support layer. The first support layer has a leading shield, and the leading shield has a low-level flat part, a slope part and a high-level flat part continuously arranged at one side in the recited order toward the air bearing surface. The antireflection film entirely covers the low-level flat part, the slope part and the high-level flat part of the leading shield. The write element has a recording magnetic pole film, and the recording magnetic pole film is formed above the antireflection film.
摘要翻译：薄膜磁头具有较高的写入性能，因为其形状平滑无粗糙。薄膜磁头包括滑块基板，写入元件和抗反射膜。滑块基板在一侧具有空气支承表面并且支撑第一支撑层。第一支撑层具有前导屏蔽，并且前导屏蔽具有朝向空气轴承表面按照所述顺序连续布置在其一侧的低级平坦部分，倾斜部分和高级平面部分。防反射膜完全覆盖了前盖的低平面部分，斜面部分和高级平面部分。写元件具有记录磁极膜，并且记录磁极膜形成在抗反射膜的上方。

9. 发明授权

US08102622B2 Perpendicular magnetic write head, method of manufacturing the same and method of forming magnetic layer pattern 有权
标题翻译：垂直写磁头，制造方法及形成磁性层图案的方法
公开(公告)号：US08102622B2
公开(公告)日：2012-01-24
申请号：US12318645
申请日：2009-01-05
申请人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
发明人： Atsushi Yamaguchi , Michitaka Nishiyama , Shin Narushima , Hiromichi Umehara , Makoto Sato , Tatsuhiro Nojima
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： In a perpendicular magnetic write head manufacturing method a magnetic layer is formed on a substrate. On the magnetic layer, first and second nonmagnetic layers are formed with different materials. A mask pattern is formed on the second nonmagnetic layer, and the second nonmagnetic layer in a region not covered with the mask pattern is removed. Thereby, the patterned second nonmagnetic layer is formed while leaving the first nonmagnetic layer. The mask pattern is removed and a milling process is selectively performed on the first nonmagnetic layer and the magnetic layer with the patterned second nonmagnetic layer as a mask to remove all of the first nonmagnetic layer in an exposed region and to dig down the magnetic layer in the exposed region, thereby forming a main magnetic pole layer having an inclined part whose thickness decreases with distance from an edge position of the patterned second nonmagnetic layer.
摘要翻译：在垂直磁性写入头制造方法中，在衬底上形成磁性层。在磁性层上，第一和第二非磁性层由不同的材料形成。在第二非磁性层上形成掩模图案，并且去除未被掩模图案覆盖的区域中的第二非磁性层。由此，形成图案化的第二非磁性层，同时离开第一非磁性层。去除掩模图案，并且在第一非磁性层和具有图案化的第二非磁性层的磁性层上选择性地进行研磨工艺作为掩模，以去除暴露区域中的所有第一非磁性层，并将从而形成具有倾斜部分的主磁极层，该倾斜部分的厚度随着距图案化的第二非磁性层的边缘位置的距离而减小。

10. 发明申请

US20090273863A1 Thin-film magnetic head for perpendicular magnetic recording and method of making the same 有权
标题翻译：用于垂直磁记录的薄膜磁头及其制作方法
公开(公告)号：US20090273863A1
公开(公告)日：2009-11-05
申请号：US12000519
申请日：2007-12-13
申请人： Hidetaka Kawano , Hiromichi Umehara , Takamitsu Sakamoto , Koichi Otani , Noriaki Kasahara , Naoto Matono
发明人： Hidetaka Kawano , Hiromichi Umehara , Takamitsu Sakamoto , Koichi Otani , Noriaki Kasahara , Naoto Matono
IPC分类号： G11B5/33 , B32B37/02
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49032 , Y10T29/49055 , Y10T156/10
摘要： A perpendicular recording thin-film magnetic head comprises a main magnetic pole having a tip main magnetic pole part extending in a height direction from a medium-opposing surface and a base main magnetic pole part connected to the tip main magnetic pole part on a side opposite from the medium-opposing surface side and wider than the tip main magnetic pole part in a track width direction; a return yoke extending in the height direction from the medium-opposing surface and magnetically coupling with the base main magnetic pole part at a position distanced from the medium-opposing surface in the height direction, while opposing the tip main magnetic pole part through a write gap layer in a bit length direction in the medium-opposing surface; and a main magnetic pole adjacent magnetic shield layer extending along at least part of side faces of the main magnetic pole other than the medium-opposing surface as seen in a laminating direction, while holding a nonmagnetic layer between the main magnetic pole and the main magnetic pole adjacent magnetic shield layer.
摘要翻译：垂直记录薄膜磁头包括：主磁极，其具有从介质相对表面在高度方向上延伸的尖端主磁极部分和在相对侧的一侧连接到尖端主磁极部分的基极主磁极部分从所述中等相对面侧开始并且比所述尖端主磁极部在轨道宽度方向上宽; 回转轭，其从中间相对表面在高度方向上延伸，并且在距离介质相对表面在高度方向上远离的位置处与基部主磁极部分磁耦合，同时通过写入方式与尖端主磁极部分相对中间相对表面中的位长度方向上的间隙层; 以及与沿着层叠方向观察的中间相对面以外的主磁极的至少一部分的侧面相邻的磁屏蔽层的主磁极，同时在主磁极和主磁体之间保持非磁性层极相邻磁屏蔽层。

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