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1. 发明申请

US20080260938A1 Film Formation Apparatus, Film Formation Method, Manufacturing Apparatus, and Method for Manufacturing Light-Emitting Device 有权
标题翻译：成膜装置，成膜方法，制造装置以及制造发光装置的方法
公开(公告)号：US20080260938A1
公开(公告)日：2008-10-23
申请号：US11949217
申请日：2007-12-03
申请人： Hisao Ikeda , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata , Shunpei Yamazaki
发明人： Hisao Ikeda , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata , Shunpei Yamazaki
IPC分类号： B05D5/06 , B05C11/00 , B05C13/02
CPC分类号： B05C11/00 , C23C14/042 , C23C14/12 , C23C14/26 , C23C14/28 , C23C14/568 , H01L51/0081 , H01L51/56
摘要： An object is to improve use efficiency of an evaporation material, to reduce manufacturing cost of a light-emitting device, and to reduce manufacturing time needed for a light-emitting device including a layer containing an organic compound. The pressure of a film formation chamber is reduced, a plate is rapidly heated by heat conduction or heat radiation by using a heat source, a material layer on a plate is vaporized in a short time to be evaporated to a substrate on which the material layer is to be formed (formation substrate), and then the material layer is formed on the formation substrate. The area of the plate that is heated rapidly is set to have the same size as the formation substrate and film formation on the formation substrate is completed by one application of heat.
摘要翻译：本发明的目的在于提高蒸发材料的使用效率，降低发光元件的制造成本，减少含有有机化合物的层的发光元件所需的制造时间。成膜室的压力减小，通过使用热源的热传导或热辐射快速加热板，在短时间内蒸发板上的材料层以蒸发到其上的材料层（形成衬底），然后在形成衬底上形成材料层。将快速加热的板的面积设定为与形成基板相同的尺寸，并且通过一次加热完成在形成基板上的成膜。

2. 发明授权

US08313603B2 Film formation apparatus, film formation method, manufacturing apparatus, and method for manufacturing light-emitting device 有权
标题翻译：成膜装置，成膜方法，制造装置以及发光装置的制造方法
公开(公告)号：US08313603B2
公开(公告)日：2012-11-20
申请号：US11949217
申请日：2007-12-03
申请人： Hisao Ikeda , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata , Shunpei Yamazaki
发明人： Hisao Ikeda , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata , Shunpei Yamazaki
IPC分类号： C23C14/04 , C23C14/08
CPC分类号： B05C11/00 , C23C14/042 , C23C14/12 , C23C14/26 , C23C14/28 , C23C14/568 , H01L51/0081 , H01L51/56
摘要： An object is to improve use efficiency of an evaporation material, to reduce manufacturing cost of a light-emitting device, and to reduce manufacturing time needed for a light-emitting device including a layer containing an organic compound. The pressure of a film formation chamber is reduced, a plate is rapidly heated by heat conduction or heat radiation by using a heat source, a material layer on a plate is vaporized in a short time to be evaporated to a substrate on which the material layer is to be formed (formation substrate), and then the material layer is formed on the formation substrate. The area of the plate that is heated rapidly is set to have the same size as the formation substrate and film formation on the formation substrate is completed by one application of heat.
摘要翻译：本发明的目的在于提高蒸发材料的使用效率，降低发光元件的制造成本，减少含有有机化合物的层的发光元件所需的制造时间。成膜室的压力减小，通过使用热源的热传导或热辐射快速加热板，在短时间内蒸发板上的材料层以蒸发到其上的材料层（形成衬底），然后在形成衬底上形成材料层。将快速加热的板的面积设定为与形成基板相同的尺寸，并且通过一次加热完成在形成基板上的成膜。

3. 发明授权

US08367152B2 Manufacturing method of light-emitting device 有权
标题翻译：发光装置的制造方法
公开(公告)号：US08367152B2
公开(公告)日：2013-02-05
申请号：US12054954
申请日：2008-03-25
申请人： Kohei Yokoyama , Hisao Ikeda , Yosuke Sato , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata
发明人： Kohei Yokoyama , Hisao Ikeda , Yosuke Sato , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata
IPC分类号： B05D5/12
CPC分类号： H01L51/0011 , H01L51/0003 , H01L51/0013 , H01L51/56
摘要： For a full-color flat panel display, demands for high definition, high aperture ratio and high reliability have been increasing. Therefore, increasing in the number of pixels and narrowing a pixel pitch have been major issues. According to the present invention, a layer including an organic compound is selectively formed with a light-exposure apparatus used in a photolithography technique without a resist mask. A material layer including a photopolymerization initiator, a material polymerized with the photopolymerization initiator, and an organic compound are formed on a plate, and then are exposed to light and selectively cured. A film-formation substrate is disposed so as to face the plate. The film-formation substrate or the material layer is heated so that the organic compound included in a region exposed to light or a region not exposed to light is evaporated to be selectively deposited on the surface of the film-formation substrate.
摘要翻译：对于全彩平板显示器，高清晰度，高开口率和高可靠性的要求越来越高。因此，增加像素数量和缩小像素间距是主要问题。根据本发明，使用不具有抗蚀剂掩模的光刻技术中使用的曝光装置选择性地形成包含有机化合物的层。在板上形成包含光聚合引发剂，与光聚合引发剂聚合的材料和有机化合物的材料层，然后曝光并选择性固化。成膜基板被设置成面对板。加热成膜基板或材料层，使得暴露于光的区域中包含的有机化合物或不暴露于光的区域被蒸发以选择性地沉积在成膜基板的表面上。

4. 发明申请

US20080268135A1 MANUFACTURING METHOD OF LIGHT-EMITTING DEVICE 有权
标题翻译：发光装置的制造方法
公开(公告)号：US20080268135A1
公开(公告)日：2008-10-30
申请号：US12054954
申请日：2008-03-25
申请人： Kohei Yokoyama , Hisao Ikeda , Yosuke Sato , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata
发明人： Kohei Yokoyama , Hisao Ikeda , Yosuke Sato , Tomoya Aoyama , Takahiro Ibe , Yoshiharu Hirakata
IPC分类号： B05D5/12
CPC分类号： H01L51/0011 , H01L51/0003 , H01L51/0013 , H01L51/56
摘要： For a full-color flat panel display, demands for high definition, high aperture ratio and high reliability have been increasing. Therefore, increasing in the number of pixels and narrowing a pixel pitch have been major issues. According to the present invention, a layer including an organic compound is selectively formed with a light-exposure apparatus used in a photolithography technique without a resist mask. A material layer including a photopolymerization initiator, a material polymerized with the photopolymerization initiator, and an organic compound are formed on a plate, and then are exposed to light and selectively cured. A film-formation substrate is disposed so as to face the plate. The film-formation substrate or the material layer is heated so that the organic compound included in a region exposed to light or a region not exposed to light is evaporated to be selectively deposited on the surface of the film-formation substrate.
摘要翻译：对于全彩平板显示器，高清晰度，高开口率和高可靠性的要求越来越高。因此，增加像素数量和缩小像素间距是主要问题。根据本发明，使用不具有抗蚀剂掩模的光刻技术中使用的曝光装置选择性地形成包含有机化合物的层。在板上形成包含光聚合引发剂，与光聚合引发剂聚合的材料和有机化合物的材料层，然后曝光并选择性固化。成膜基板被设置成面对板。加热成膜基板或材料层，使得暴露于光的区域中包含的有机化合物或不暴露于光的区域被蒸发以选择性地沉积在成膜基板的表面上。

5. 发明申请

US20080299496A1 Manufacturing Apparatus and Manufacturing Method of Light-Emitting Device 有权
标题翻译：发光装置的制造装置及制造方法
公开(公告)号：US20080299496A1
公开(公告)日：2008-12-04
申请号：US12123902
申请日：2008-05-20
申请人： Yoshiharu Hirakata , Hisao Ikeda , Takahiro Ibe , Shunpei Yamazaki
发明人： Yoshiharu Hirakata , Hisao Ikeda , Takahiro Ibe , Shunpei Yamazaki
IPC分类号： G03F7/00 , G03B27/54
CPC分类号： H01L51/0013 , B23K26/042 , B23K26/0661 , B23K26/0732 , C23C14/048 , H01L27/3218 , H01L51/56
摘要： Demands such as higher definition, higher opening aperture, and higher reliability on a full-color flat panel display have been increased. Such demands are big objects in advancing higher definition (increase in the number of pixels) of a light-emitting device and miniaturization of each display pixel pitch with reduction in size of the light-emitting device. An organic compound-containing layer is selectively deposited using a laser beam which passes through openings of a mask. An irradiated substrate provided with a light absorption layer and a material layer containing an organic compound and a deposition substrate provided with first electrodes are placed so as to face each other. The light absorption layer is heated by a laser beam which has passed through the openings of the mask, and the organic compound at a position overlapping with the heated region is vaporized, and accordingly the organic compound is selectively deposited over the deposition substrate.
摘要翻译：已经提高了在全色平板显示器上的诸如更高清晰度，更高开口孔径和更高可靠性的要求。这种要求是通过减少发光装置的尺寸来提高发光装置的高清晰度（增加像素数）和每个显示像素间距的小型化的大目标。使用穿过掩模的开口的激光束选择性地沉积含有机化合物的层。设置有光吸收层的照射基板和含有有机化合物的材料层和设置有第一电极的沉积基板被放置成彼此面对。光吸收层被通过掩模开口的激光束加热，与加热区域重叠的位置上的有机化合物被蒸发，因此有机化合物选择性地沉积在沉积基板上。

6. 发明授权

US08232038B2 Manufacturing apparatus and manufacturing method of light-emitting device 有权
标题翻译：发光装置的制造装置及其制造方法
公开(公告)号：US08232038B2
公开(公告)日：2012-07-31
申请号：US12123902
申请日：2008-05-20
申请人： Yoshiharu Hirakata , Hisao Ikeda , Takahiro Ibe , Shunpei Yamazaki
发明人： Yoshiharu Hirakata , Hisao Ikeda , Takahiro Ibe , Shunpei Yamazaki
IPC分类号： H01L21/00
CPC分类号： H01L51/0013 , B23K26/042 , B23K26/0661 , B23K26/0732 , C23C14/048 , H01L27/3218 , H01L51/56
摘要： Demands such as higher definition, higher opening aperture, and higher reliability on a full-color flat panel display have been increased. Such demands are big objects in advancing higher definition (increase in the number of pixels) of a light-emitting device and miniaturization of each display pixel pitch with reduction in size of the light-emitting device. An organic compound-containing layer is selectively deposited using a laser beam which passes through openings of a mask. An irradiated substrate provided with a light absorption layer and a material layer containing an organic compound and a deposition substrate provided with first electrodes are placed so as to face each other. The light absorption layer is heated by a laser beam which has passed through the openings of the mask, and the organic compound at a position overlapping with the heated region is vaporized, and accordingly the organic compound is selectively deposited over the deposition substrate.
摘要翻译：已经提高了在全色平板显示器上的诸如更高清晰度，更高开口孔径和更高可靠性的要求。这种要求是通过减少发光装置的尺寸来提高发光装置的高清晰度（增加像素数）和每个显示像素间距的小型化的大目标。使用穿过掩模的开口的激光束选择性地沉积含有机化合物的层。设置有光吸收层的照射基板和含有有机化合物的材料层和设置有第一电极的沉积基板被放置成彼此面对。光吸收层被通过掩模开口的激光束加热，与加热区域重叠的位置上的有机化合物被蒸发，因此有机化合物选择性地沉积在沉积基板上。

7. 发明申请

US20120285379A1 Manufacturing Apparatus and Manufacturing Method of Light-Emitting Device 审中-公开
标题翻译：发光装置的制造装置及制造方法
公开(公告)号：US20120285379A1
公开(公告)日：2012-11-15
申请号：US13558809
申请日：2012-07-26
申请人： Yoshiharu Hirakata , Hisao Ikeda , Takahiro Ibe , Shunpei Yamazaki
发明人： Yoshiharu Hirakata , Hisao Ikeda , Takahiro Ibe , Shunpei Yamazaki
IPC分类号： B05C9/14
CPC分类号： H01L51/0013 , B23K26/042 , B23K26/0661 , B23K26/0732 , C23C14/048 , H01L27/3218 , H01L51/56
摘要： Demands such as higher definition, higher opening aperture, and higher reliability on a full-color flat panel display have been increased. Such demands are big objects in advancing higher definition (increase in the number of pixels) of a light-emitting device and miniaturization of each display pixel pitch with reduction in size of the light-emitting device. An organic compound-containing layer is selectively deposited using a laser beam which passes through openings of a mask. An irradiated substrate provided with a light absorption layer and a material layer containing an organic compound and a deposition substrate provided with first electrodes are placed so as to face each other. The light absorption layer is heated by a laser beam which has passed through the openings of the mask, and the organic compound at a position overlapping with the heated region is vaporized, and accordingly the organic compound is selectively deposited over the deposition substrate.
摘要翻译：已经提高了在全色平板显示器上的诸如更高清晰度，更高开口孔径和更高可靠性的要求。这种要求是通过减少发光装置的尺寸来提高发光装置的高清晰度（增加像素数）和每个显示像素间距的小型化的大目标。使用穿过掩模的开口的激光束选择性地沉积含有机化合物的层。设置有光吸收层的照射基板和含有有机化合物的材料层和设置有第一电极的沉积基板被放置成彼此面对。光吸收层被通过掩模开口的激光束加热，与加热区域重叠的位置上的有机化合物被蒸发，因此有机化合物选择性地沉积在沉积基板上。

8. 发明授权

US08119204B2 Film formation method and method for manufacturing light-emitting device 有权
标题翻译：用于制造发光装置的成膜方法和方法
公开(公告)号：US08119204B2
公开(公告)日：2012-02-21
申请号：US12055970
申请日：2008-03-26
申请人： Hisao Ikeda , Takahiro Ibe , Tomoya Aoyama
发明人： Hisao Ikeda , Takahiro Ibe , Tomoya Aoyama
IPC分类号： B05D3/02
CPC分类号： C23C14/12 , B05D2401/30 , C23C14/00 , C23C14/042 , C23C14/24 , C23C14/26 , C23C16/4485 , H01L51/001 , H01L51/0038 , H01L51/0042 , H01L51/0059 , H01L51/006 , H05B33/10
摘要： A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.
摘要翻译：在蒸发源基板的主表面上形成包括蒸发材料的粘合剂材料层，其上形成有膜的基板以使粘合剂材料层及其主表面彼此面对，进行热处理在蒸发源基板的后表面上，使粘合剂材料层中的蒸发材料被加热以进行升华等，从而在其上形成有膜的基板上形成蒸镀材料层。当将低分子材料用于蒸发材料并且高分子材料用于粘合剂材料时，可以容易地调节粘度，因此成膜可能比常规成膜更高的生产量。

9. 发明授权

US08734914B2 Film formation method and method for manufacturing light-emitting device 有权
标题翻译：用于制造发光装置的成膜方法和方法
公开(公告)号：US08734914B2
公开(公告)日：2014-05-27
申请号：US13399122
申请日：2012-02-17
申请人： Hisao Ikeda , Takahiro Ibe , Tomoya Aoyama
发明人： Hisao Ikeda , Takahiro Ibe , Tomoya Aoyama
IPC分类号： C23C14/12 , C23C14/00 , C23C14/24 , C23C14/26 , C23C14/04 , C23C16/448
CPC分类号： C23C14/12 , B05D2401/30 , C23C14/00 , C23C14/042 , C23C14/24 , C23C14/26 , C23C16/4485 , H01L51/001 , H01L51/0038 , H01L51/0042 , H01L51/0059 , H01L51/006 , H05B33/10
摘要： A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.
摘要翻译：在蒸发源基板的主表面上形成包括蒸发材料的粘合剂材料层，其上形成有膜的基板以使粘合剂材料层及其主表面彼此面对，进行热处理在蒸发源基板的后表面上，使粘合剂材料层中的蒸发材料被加热以进行升华等，从而在其上形成有膜的基板上形成蒸镀材料层。当将低分子材料用于蒸发材料并且高分子材料用于粘合剂材料时，可以容易地调节粘度，因此成膜可能比常规成膜更高的生产量。

10. 发明申请

US20120148730A1 Film Formation Method and Method for Manufacturing Light-Emitting Device 有权
标题翻译：制造发光装置的成膜方法及方法
公开(公告)号：US20120148730A1
公开(公告)日：2012-06-14
申请号：US13399122
申请日：2012-02-17
申请人： Hisao Ikeda , Takahiro Ibe , Tomoya Aoyama
发明人： Hisao Ikeda , Takahiro Ibe , Tomoya Aoyama
IPC分类号： B05D5/12
CPC分类号： C23C14/12 , B05D2401/30 , C23C14/00 , C23C14/042 , C23C14/24 , C23C14/26 , C23C16/4485 , H01L51/001 , H01L51/0038 , H01L51/0042 , H01L51/0059 , H01L51/006 , H05B33/10
摘要： A binder material layer including an evaporation material is formed over a main surface of an evaporation source substrate, a substrate on which a film is formed is placed so that the binder material layer and a main surface thereof face each other, and heat treatment is performed on a rear surface of the evaporation source substrate so that the evaporation material in the binder material layer is heated to be subjected to sublimation or the like, whereby a layer of the evaporation material is formed on the substrate on which a film is formed. When a low molecular material is used for the evaporation material and a high molecular material is used for the binder material, the viscosity can be easily adjusted, and thus, film formation is possible with higher throughput than conventional film formation.
摘要翻译：在蒸发源基板的主表面上形成包括蒸发材料的粘合剂材料层，其上形成有膜的基板以使粘合剂材料层及其主表面彼此面对，进行热处理在蒸发源基板的后表面上，使粘合剂材料层中的蒸发材料被加热以进行升华等，从而在其上形成有膜的基板上形成蒸镀材料层。当将低分子材料用于蒸发材料并且高分子材料用于粘合剂材料时，可以容易地调节粘度，因此成膜可能比常规成膜更高的生产量。

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