会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 1. 发明申请
    • VACUUM SYSTEM AND METHOD FOR OPERATING THE SAME
    • 真空系统及其操作方法
    • US20090112370A1
    • 2009-04-30
    • US11996326
    • 2006-07-14
    • Hiroyuki TanakaKiyoshi Ando
    • Hiroyuki TanakaKiyoshi Ando
    • G05D7/06
    • F04D19/046F04B37/14F04D27/00
    • The present invention provides a vacuum system including a vacuum pump capable of operating at a rotation rate controlled appropriately when a predetermined process is performed in a vacuum chamber, which contributes to energy conservation. The vacuum system serves as a semiconductor manufacturing system comprising a vacuum pump controller which has a gas flow mode and an auto-tuning mode for determining a rotation rate of a vacuum pump unit to set the rotation rate to a target value lower by a predetermined value than the full operation rate of gas flow rate control means under the condition that pressure within the process chamber is vacuum pressure necessary for the gas flow mode. The vacuum pump controller has means for reducing the rotation rate of the vacuum pump unit from a rated rotation rate in the auto-tuning mode under the condition that pressure within the process chamber is vacuum necessary for the gas flow mode, to determine whether or not the operation rate of an APC valve reaches a target value, and means for storing, as the rotation rate necessary for the gas flow mode, the rotation rate of the vacuum pump unit, which is obtained when it is determined that the operation rate of the APC valve reaches the target value.
    • 本发明提供了一种真空系统,其包括真空泵,该真空泵能够在真空室中进行预定的处理时适当地控制旋转速度,这有助于节能。 真空系统用作半导体制造系统,其包括具有气体流动模式和自动调谐模式的真空泵控制器,该自动调谐模式用于确定真空泵单元的转速以将转速设定为目标值低预定值 比在处理室内的压力为气体流动模式所需的真空压力的条件下的气体流量控制装置的全部操作速率。 真空泵控制器具有用于在自动调谐模式下在额定转速下降低真空泵单元的旋转速度的装置,在处理室内的压力为气体流动模式需要真空的条件下,确定是否 APC阀的运转速度达到目标值,以及存储作为气体流动模式所需的旋转速度的真空泵单元的旋转速度的装置,当确定真空泵单元的运转速度时, APC阀达到目标值。