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    • 1. 发明授权
    • Apparatus and method for inspecting pattern
    • 用于检查图案的装置和方法
    • US07689029B2
    • 2010-03-30
    • US11235288
    • 2005-09-27
    • Hiroyuki OnishiHiroshi AsaiHiroshi Ogi
    • Hiroyuki OnishiHiroshi AsaiHiroshi Ogi
    • G06K9/00
    • G06T7/001G06T2207/30148
    • An operation part in a pattern inspection apparatus includes a defect candidate image generator for generating a binary defect candidate image representing a defect candidate area in an inspection image by comparing the inspection image with a reference image, in an inspection image masking part the inspection image is masked with the defect candidate image to obtain a masked inspection image. In a feature value calculation part, an autocorrelation feature value is obtained from the masked inspection image, and outputted to a classifying part. The classifying part comprises a classifier outputting a classification result on the basis of the autocorrelation feature value and a classifier construction part for constructing the classifier by learning. It is thereby possible to easily perform the high accurate classification of defect candidate using the autocorrelation feature value which is hard to characterize as compared with geometric feature value or feature value representing density.
    • 图案检查装置中的操作部分包括缺陷候选图像生成器,用于通过将检查图像与参考图像进行比较来生成表示检查图像中的缺陷候选区域的二值缺陷候选图像,在检查图像掩蔽部中,检查图像 用缺陷候选图像掩蔽以获得掩蔽的检查图像。 在特征值计算部中,从掩蔽检查图像获得自相关特征值,并输出到分类部。 分类部分包括基于自相关特征值输出分类结果的分类器和通过学习构建分类器的分类器构造部分。 与几何特征值或表示密度的特征值相比,可以容易地使用难以表征的自相关特征值来执行缺陷候选的高精度分类。
    • 2. 发明申请
    • Apparatus and method for inspecting pattern
    • 用于检查图案的装置和方法
    • US20060067570A1
    • 2006-03-30
    • US11235288
    • 2005-09-27
    • Hiroyuki OnishiHiroshi AsaiHiroshi Ogi
    • Hiroyuki OnishiHiroshi AsaiHiroshi Ogi
    • G06K9/00
    • G06T7/001G06T2207/30148
    • An operation part (50) in a pattern inspection apparatus (1) comprises a defect candidate image generator (511) for generating a binary defect candidate image representing a defect candidate area in an inspection image by comparing the inspection image with a reference image, in an inspection image masking part (521) the inspection image is masked with the defect candidate image to obtain a masked inspection image. In a feature value calculation part (531), an autocorrelation feature value is obtained from the masked inspection image, and outputted to a classifying part (54). The classifying part (54) comprises a classifier (541) outputting a classification result on the basis of the autocorrelation feature value and a classifier construction part (542) for constructing the classifier (541) by learning. It is thereby possible to easily perform the high accurate classification of defect candidate using the autocorrelation feature value which is hard to characterize as compared with geometric feature value or feature value representing density.
    • 图案检查装置(1)中的操作部(50)包括缺陷候补图像生成部(511),用于通过将检查图像与参照图像进行比较来生成表示检查图像中的缺陷候补区域的二值缺陷候补图像, 检查图像掩蔽部分(521),用缺陷候选图像掩蔽检查图像,以获得掩蔽的检查图像。 在特征值计算部(531)中,从掩蔽检查图像获得自相关特征值,并输出到分类部(54)。 分类部分(54)包括基于自相关特征值输出分类结果的分类器(541)和用于通过学习构建分类器(541)的分类器构造部分(542)。 与几何特征值或表示密度的特征值相比,可以容易地使用难以表征的自相关特征值来执行缺陷候选的高精度分类。
    • 3. 发明申请
    • Apparatus and method for detecting defect existing in pattern on object
    • 用于检测物体上图案中存在的缺陷的装置和方法
    • US20060133660A1
    • 2006-06-22
    • US11289708
    • 2005-11-30
    • Hiroshi OgiHiroyuki OnishiYasushi SasaYuichiro Hikida
    • Hiroshi OgiHiroyuki OnishiYasushi SasaYuichiro Hikida
    • G06K9/00
    • G06T7/001G06T2207/30148
    • In a defect detection apparatus 1, in a reference image inspection circuit 42 compared are a reference image representing a pattern in a die which is determined as a reference on a substrate 9 and a plurality of supervisory images which represent patterns in selected block areas, respectively, to detect defects included in the reference image. Subsequently, in the target image inspection circuit 44, a target image representing a pattern in another die and the reference image are compared to detect a plurality of defect candidates included in the target image. Then, a defect detector 45 excludes defect candidates overlapping with the defects included in the reference image from the plurality of defect candidates on the basis of at least positional information of the defects included in the reference image. This makes it possible to detect defects existing in the pattern in another die accurately while eliminating effects of the defects existing in the pattern in the die which is determined as the reference.
    • 在缺陷检测装置1中,在比较的参照图像检查电路42中,分别表示作为基板9的基准的芯片中的图案的参考图像和分别表示所选块区域中的图案的多个监视图像 以检测参考图像中包含的缺陷。 随后,在目标图像检查电路44中,比较表示另一管芯中的图案的目标图像和参考图像,以检测包括在目标图像中的多个缺陷候选。 然后,缺陷检测器45至少基于包含在参考图像中的缺陷的位置信息,排除与来自多个缺陷候补的参考图像中包含的缺陷重叠的缺陷候选。 这使得可以精确地检测存在于另一个模具中的图案中的缺陷,同时消除存在于作为基准的芯片中的图案中存在的缺陷的影响。
    • 4. 发明授权
    • Apparatus and method for inspecting pattern
    • 用于检查图案的装置和方法
    • US07266232B2
    • 2007-09-04
    • US10434105
    • 2003-05-09
    • Hiroshi AsaiYuichiro HikidaHiroyuki Onishi
    • Hiroshi AsaiYuichiro HikidaHiroyuki Onishi
    • G06K9/00
    • G06T7/001G06K9/4647G06T2207/30141G06T2207/30148
    • An inspection apparatus (1) has an image pickup part (2) for performing an image pickup of a substrate (9), an operation part (4) to which an image signal is inputted from said image pickup part (2) and a computer (5), and the operation part (4) specifies an inspection image and a reference image from an object image acquired by the image pickup part (2). In the operation part (4), a region class to which each pixel of the specified inspection image belongs is specified on the basis of a corresponding pixel value of the reference image. In a comparator circuit of the operation part (4), a differential absolute value between each pixel of the inspection image and a corresponding pixel of the reference image is calculated and the differential absolute value is compared with a defect check threshold value in accordance with the specified region class, to perform defect check. The inspection apparatus (1) can thereby appropriately detect a defect in accordance with the region class to which each pixel belongs.
    • 检查装置(1)具有用于进行基板(9)的图像拾取的图像拾取部分(2),从所述图像拾取部分(2)输入图像信号的操作部分(4)和计算机 (5),并且操作部分(4)从由图像拾取部分(2)获取的对象图像指定检查图像和参考图像。 在操作部分(4)中,基于参考图像的对应像素值来指定所指定的检查图像的每个像素所属的区域类别。 在操作部分(4)的比较器电路中,计算检查图像的每个像素与参考图像的相应像素之间的差分绝对值,并将差分绝对值与缺陷检查阈值进行比较 指定区域类,进行缺陷检查。 因此,检查装置(1)能够根据每个像素所属的区域类别适当地检测缺陷。
    • 5. 发明授权
    • Liquid ejecting apparatus
    • 液体喷射装置
    • US08814343B2
    • 2014-08-26
    • US12881758
    • 2010-09-14
    • Hiroyuki Onishi
    • Hiroyuki Onishi
    • B41J2/01B41J29/38B41J2/165B41J2/155B41J11/00
    • B41J11/002
    • A liquid ejecting apparatus includes the following elements. A carriage allows a head ejecting liquid which is curable by light irradiation to move in the moving direction intersecting the transporting direction in which a medium is transported. A precuring light source, provided for the carriage, radiates light for precuring to dots formed by applying the liquid ejected from the moving head onto the medium. A full curing light source is provided for the carriage so as to be located downstream of the precuring light source in the transporting direction. The full curing light source radiates light for full curing to the dots which have been irradiated with light for precuring.
    • 液体喷射装置包括以下元件。 滑架允许通过光照射固化的头喷射液体在与传送介质的传送方向相交的移动方向上移动。 提供用于托架的预固化光源辐射光以预先固化到通过将从移动头喷射的液体施加到介质上形成的点。 提供完整的固化光源用于滑架,以便沿着输送方向位于预固化光源的下游。 完全固化的光源将光完全照射到已经用光照射的点进行预固化。
    • 6. 发明授权
    • Printing device and printing method
    • 印刷装置和印刷方式
    • US08662654B2
    • 2014-03-04
    • US12882705
    • 2010-09-15
    • Hiroyuki Onishi
    • Hiroyuki Onishi
    • B41J2/01B41J29/38B41J2/16
    • B41J2/2114B41J11/002
    • A printing device includes a plurality of heads ejecting ink cured by irradiation of light and arranged in a transport direction of a medium, a plurality of temporary curing light sources provided respectively corresponding to the plurality of heads and respectively irradiating light for temporary curing to dots formed on the medium by the respective heads, and a main curing light source irradiating light for main curing to the dots to which the plurality of temporary curing light sources have irradiated the light, wherein the printing device has a first printing mode where a clear ink is ejected from a head placed at the upper stream in the transport direction when seen from heads ejecting color inks, and a second printing mode where the clear ink is ejected from a head placed at the lower stream in the transport direction when seen from the heads ejecting the color inks.
    • 打印装置包括多个喷头,其通过照射光固化并沿介质传送方向布置的多个喷头,分别对应于多个喷头设置的多个临时固化光源,并分别将光照射临时固化形成点 在各介质上由各个头部和主固化光源将主要固化的光照射到多个临时固化光源照射光的点,其中打印装置具有第一打印模式,其中透明墨是 从喷射彩色墨水的头部观察时,从沿着输送方向放置在上游的头部喷射出的第二打印模式,以及从头部观察时,从输送方向上放置在下游的头部的清除墨水喷出的第二打印模式 彩色油墨。
    • 7. 发明申请
    • THREE-DIMENSIONAL POSITION/ATTITUDE RECOGNITION APPARATUS, THREE-DIMENSIONAL POSITION/ATTITUDE RECOGNITION METHOD, AND THREE-DIMENSIONAL POSITION/ATTITUDE RECOGNITION PROGRAM
    • 三维位置/姿态识别装置,三维位置/姿态识别方法和三维位置/姿态识别程序
    • US20130342659A1
    • 2013-12-26
    • US14004144
    • 2011-09-16
    • Hiroyuki Onishi
    • Hiroyuki Onishi
    • G06T7/00
    • G06T7/70G01B11/00G01B11/028G01B11/03G01B11/26
    • An objective of the present invention is to provide a three-dimensional position/attitude recognition apparatus, a three-dimensional position/attitude recognition method, and a three-dimensional position/attitude recognition program, that can perform three-dimensional position/attitude recognition on an object by analyzing an image of an edge portion with a simple configuration. A three-dimensional position/attitude recognition apparatus according to the present invention includes: a detection part for detecting an edge direction of an object by analyzing an image element of an object in at least one of first and second images that have been captured; a determination part for determining whether or not to change relative positions of the object and at least one of first and second image capturing parts based on a result of the detection; and a movement part for moving at least one of the first and second image capturing parts relative to the object.
    • 本发明的目的在于提供能够进行三维位置/姿态识别的立体姿态识别装置,立体姿态识别方法和立体姿势识别程序 通过以简单的配置分析边缘部分的图像在对象上。 根据本发明的三维位置/姿态识别装置包括:检测部件,用于通过分析被捕获的第一和第二图像中的至少一个中的对象的图像元素来检测对象的边缘方向; 确定部分,用于基于检测结果确定是否改变对象和第一和第二图像捕获部分中的至少一个的相对位置; 以及用于相对于物体移动第一和第二图像捕获部分中的至少一个的移动部件。
    • 10. 发明申请
    • PRINTING APPARATUS AND METHOD FOR PRINTING
    • 印刷装置和印刷方法
    • US20110128336A1
    • 2011-06-02
    • US12957951
    • 2010-12-01
    • Hiroyuki Onishi
    • Hiroyuki Onishi
    • B41J2/01
    • B41J11/0015B41J11/002
    • A printing apparatus includes a head which discharges coating ink which coats a medium and electromagnetic radiation-curable ink for image formation having a surface tension lower than the surface tension of the coating ink, a curing unit which irradiates the electromagnetic radiation-curable ink for image formation with electromagnetic waves to cure the electromagnetic radiation-curable ink for image formation, and a controller which makes the head execute a first discharge processing of discharging the coating ink to coat the medium and makes the head execute a second discharge processing of discharging the electromagnetic radiation-curable ink for image formation onto the medium coated by the coating ink to form an image in this order, and then, makes the curing unit execute a curing processing of irradiating the electromagnetic radiation-curable ink for image formation discharged onto the medium with the electromagnetic waves to cure the electromagnetic radiation-curable ink for image formation.
    • 打印装置包括:喷涂涂布介质的涂布油墨的喷头和具有比涂布油墨的表面张力低的表面张力的图像形成用电磁辐射固化油墨;照射电磁辐射固化油墨图像的固化单元 用电磁波形成固化用于图像形成的电磁辐射固化油墨;以及控制器,其使得头执行第一次排出处理以排出涂料油墨以涂覆介质,并使头执行第二次放电处理, 用于在由涂料油墨涂布的介质上进行图像形成的可辐射固化油墨,以依次形成图像,然后使固化单元执行照射用于图像形成的电磁辐射固化油墨放电到介质上的固化处理, 电磁波固化用于im的电磁辐射固化油墨 年龄形成。