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    • 2. 发明授权
    • Position detecting system
    • 位置检测系统
    • US5455679A
    • 1995-10-03
    • US384221
    • 1995-02-06
    • Sakae HouryuKenji Saitoh
    • Sakae HouryuKenji Saitoh
    • G03F9/00G01B11/27G01N21/86
    • G03F9/70
    • A position detecting system includes a light source for producing a light beam for irradiating a reference mark formed on an object which is relatively displaceable relative to the light beam, a detector for detecting a light quantity distribution of the light from the reference mark, and a circuit for comparing a first light quantity distribution at a first position with a second light quantity distribution at a second position spaced from the first position by a predetermined distance, and for determining a reference position of the object on the basis of the comparison.
    • 位置检测系统包括:光源,用于产生用于照射形成在物体上的参考标记的光束,所述参考标记相对于所述光束相对移位;检测器,用于检测来自所述参考标记的光的光量分布;以及 电路,用于将第一位置处的第一光量分布与在与第一位置隔开预定距离的第二位置处的第二光量分布进行比较,并且用于基于比较来确定对象的参考位置。
    • 3. 发明授权
    • Positional deviation detecting method
    • 位置偏差检测方法
    • US5481363A
    • 1996-01-02
    • US242066
    • 1994-05-13
    • Masakazu MatsuguKenji SaitohJun HattoriSakae Houryu
    • Masakazu MatsuguKenji SaitohJun HattoriSakae Houryu
    • G03F9/00G01B11/00
    • G03F9/7076
    • A method of detecting a relative positional deviation of a first object having a first grating mark with an optical power and a second object having a second grating mark with an optical power, is disclosed, wherein a projected radiation beam is diffracted by the first and second grating marks in sequence and, on the basis of a position of convergence on a light receiving surface of plural diffraction beams produced by the diffraction through the first and second grating marks and including a signal beam having been diffracted at a predetermined order by each of the first and second grating marks, the relative positional deviation is determined, a detection zone is defined on the light receiving surface, the signal beam is converged upon the detection zone, and a predetermined diffraction beam of the plural diffraction beams which, for a relative positional deviation of the first and second objects, shows displacement different from that of the signal beam is substantially prevented from being converged upon the detection zone.
    • 公开了一种检测具有光功率的第一光栅标记的第一物体和具有光功率的第二光栅标记的第二物体的相对位置偏差的方法,其中投射的辐射束被第一和第二衍射 基于通过第一和第二光栅标记的衍射产生的多个衍射光束的光接收表面上的会聚位置,并且包括以预定顺序衍射的信号光束 第一和第二光栅标记,确定相对位置偏差,在光接收表面上限定检测区域,信号光束会聚在检测区域上,并且将多个衍射光束的预定衍射光束相对于相对位置 显示第一和第二物体的偏差显示出与信号光束不同的位移 om会聚在检测区域。
    • 4. 发明授权
    • Position detection method
    • 位置检测方法
    • US5557411A
    • 1996-09-17
    • US577704
    • 1995-12-22
    • Sakae HouryuNoriyuki Nose
    • Sakae HouryuNoriyuki Nose
    • G03F7/20G03F9/00H01L21/027G01B11/00
    • G03F9/70
    • An interval detection method for detecting the interval between two marks provided on the surface of a wafer with high accuracy using other two marks provided on the wafer, and a method for detecting the relative positions of a wafer and a mask with high accuracy are provided. The method for detecting the interval includes the steps of projecting a first light beam passing through a first mark on the mask and a fifth mark on the wafer onto a predetermined detection surface, projecting a second light beam passing through a second mark on the mask and a sixth mark on the wafer onto the predetermined detection surface, projecting a third light beam passing through a third mark on the mask and the fifth mark onto the predetermined detection surface, projecting a fourth light beam passing through a fourth mark on the mask and the sixth mark onto the predetermined detection surface, and determining the interval between the first mark and the second mark based on information relating to the incident positions of the first, second, third and fourth light beams on the predetermined detection surface, and the interval between the third mark and the fourth mark.
    • 提供了一种使用设置在晶片上的其他两个标记来高精度地检测设置在晶片表面上的两个标记之间的间隔的间隔检测方法,以及用于高精度地检测晶片和掩模的相对位置的方法。 用于检测间隔的方法包括以下步骤:将通过掩模上的第一标记的第一光束和晶片上的第五标记投影到预定检测表面上,将通过第二标记的第二光束投射到掩模上; 在晶片上的第六标记到预定检测表面上,将通过掩模上的第三标记的第三光束和第五标记投影到预定检测表面上,将通过第四标记的第四光束投射在掩模上, 第六标记到预定检测表面上,以及基于与预定检测表面上的第一,第二,第三和第四光束的入射位置相关的信息,确定第一标记和第二标记之间的间隔, 第三标记和第四标记。
    • 5. 发明授权
    • Position detecting method and apparatus
    • 位置检测方法和装置
    • US5148037A
    • 1992-09-15
    • US675059
    • 1991-03-26
    • Shigeyuki SudaSakae HouryuNoriyuki Nose
    • Shigeyuki SudaSakae HouryuNoriyuki Nose
    • G01B11/00G01B11/14G03F9/00H01L21/027H01L21/30
    • G03F9/7049
    • A method and apparatus for detecting a positional relationship between first and second objects is disclosed, which includes a light source for projecting light to the first and second objects, a photodetecting system for detecting light from one of the first and second objects irradiated with the light from the light source, the detecting system being operable to detect first light whose position of incidence upon a predetermined plane is dependent upon the positional relationship of the first and second objects in a direction along the interval therebetween and in a direction perpendicular to the interval, second light whose position of incidence upon the predetermined plane is dependent upon the positional relationship of the first and second objects in the direction of the interval therebetween, and third light whose position of incidence upon the predetermined plane is independent of the positional relationship of the first and second objects in both the direction of the interval and the direction perpendicular to the interval, and a positional relationship detecting system for detecting the positional relationship of the first and second objects in the direction of the interval and the direction perpendicular to the interval, on the basis of the detection by the photodetecting system.
    • 6. 发明授权
    • Numeral display device
    • 数字显示装置
    • US4206459A
    • 1980-06-03
    • US830339
    • 1977-09-02
    • Sakae HouryuMitsuaki Seki
    • Sakae HouryuMitsuaki Seki
    • G06F15/02G06F3/147G09F9/30G09G3/04G09G3/18G09F9/32
    • G09G3/18
    • A numeral display device has a first board member provided with a first group of pattern electrodes arranged to define a plurality of digits, each forming a figure eight pattern, the digits being arranged in an upper row and a lower row wherein for each digit the segment for the decimal point is electrically connected with at least a segment in the figure eight pattern while the other segments in said figure eight pattern are connected to display particular information, a second board member placed in facing relationship with said first board member and provided with a second group of pattern electrodes arranged to define a plurality of digits each forming a figure eight shaped pattern, the digits being arranged in an upper row and a lower row wherein for each digit the segment for decimal point is connected with at least a segment in the figure eight pattern other than those corresponding to the segments connected with the decimal point segment in said first board member while the other numerical segments are connected to display particular information, a displaying material provided between said first and second board members, and a circuit for providing the electrode groups in said first and second board members with respective drive signals thereby enabling display of different numerals in said upper and lower rows.
    • 数字显示装置具有第一板构件,第一板构件设置有第一组图案电极,其布置成限定多个数字,每个形成图形八个图案,数字被布置在上排和下排中,其中对于每个数字,段 因为小数点与图8中的至少一个段电连接,而所述图形八模式中的其他段被连接以显示特定信息,第二板构件与所述第一板构件面对关系并且设置有 第二组图案电极,其布置成限定多个数字,每个数字形成图形八个形状的图案,数字被布置在上行和下行中,其中对于每个数字,小数点的段与至少一个段相连 除了对应于与所述第一板构件中的小数点段连接的段的那些之外的图8模式,而第二模式 连接数字段以显示特定信息,设置在所述第一和第二板构件之间的显示材料以及用于在所述第一和第二板构件中提供相应驱动信号的电极组的电路,从而能够在所述上部 和下行。
    • 7. 发明授权
    • Liquid crystal display device
    • 液晶显示装置
    • US4065764A
    • 1977-12-27
    • US637027
    • 1975-12-02
    • Sakae Houryu
    • Sakae Houryu
    • G09G3/36G02F1/133G09G3/04G09G3/18G09G3/20G09F9/32
    • G02F1/133G09G3/18
    • A liquid crystal display device is disclosed which comprises a plurality of groups of segment electrodes formed on a first plate for energization to define digits each having a seven bar format, and a plurality of groups of digit electrode elements opposed to respective groups of the segment electrodes being formed on a second plate opposed to the first plate. The digit electrode elements are driven by respective driving elements which are in turn selected by a digit pulse generator. There are provided means for altering the polarity of the driving voltage generated from the output of the driving elements.
    • 公开了一种液晶显示装置,其包括形成在第一板上的多组段电极,用于通电以定义每个具有七巴格式的数字;以及多组数字电极元件,与各组段电极相对 形成在与第一板相对的第二板上。 数字电极元件由相应的驱动元件驱动,驱动元件又由数字脉冲发生器选择。 提供了用于改变从驱动元件的输出产生的驱动电压的极性的装置。