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    • 4. 发明授权
    • Particle attachment preventing method and substrate processing apparatus
    • 粒子附着防止方法和基板处理装置
    • US08134134B2
    • 2012-03-13
    • US12612990
    • 2009-11-05
    • Takahiro Murakami
    • Takahiro Murakami
    • G21G5/00
    • H01J37/32871H01J37/32091H01J37/32165H01J37/32477
    • In a particle attachment preventing method in a substrate processing apparatus, an electron density control power supplied from the second power supply is adjusted such that an electron density above the substrate gets lower than during a plasma processing, for a preset short period of time after the plasma processing is ended, and a bias power supplied from the first power is maintained for the preset short period of time. The second power supply is a high frequency power supply for supplying a high frequency power having a frequency that is higher than that of the bias power, and in said adjusting of the electron density control power, the high frequency power supplied from the second power supply is lowered as compared with that during the plasma processing.
    • 在基板处理装置中的粒子附着防止方法中,调整从第二电源供给的电子密度控制电力,使得基板上方的电子密度低于等离子体处理期间的电子密度,在预定的短时间段之后 等离子体处理结束,并且从预设的短时间段维持从第一功率提供的偏置功率。 第二电源是用于提供具有高于偏置功率的频率的高频功率的高频电源,并且在所述电子密度控制功率的调整中,从第二电源提供的高频功率 与等离子体处理期间相比降低。
    • 7. 发明申请
    • Envelope for a flat panel display and flat panel display employing the envelope
    • 用于平板显示器的信封和采用信封的平板显示器
    • US20050184637A1
    • 2005-08-25
    • US11044455
    • 2005-01-28
    • Tsunehiko SugawaraTakahiro Murakami
    • Tsunehiko SugawaraTakahiro Murakami
    • H01J1/30H01J11/02H01J29/02H01J29/86H01J31/12H01J23/12
    • H01J31/123H01J29/862H01J2329/861H01J2329/862
    • An envelope for e.g. FED has spacerless structure while increase of the mass due to increase of the thickness of glass is suppressed. Further, the handling of conductors connected to emitters can be easy. An envelope for a flat panel display comprising a glass envelope and a support member for preventing deformation, wherein the glass envelope comprises a front glass and a rear glass, and the support member comprises a rim, bridges and a rear plate. The front glass comprises a face portion for displaying an image and a skirt portion is extended to the rear glass so that a hermetical seal is kept by the contact of a seal edge portion at the end of the skirt portion to the rear glass, the rim supports outer peripheries of outer surfaces of the skirt portion and the face portion, the rear plate is fixed to the rear glass to support the rear glass, and the rim and the rear plate are connected via a plurality of bridges.
    • 一个信封。 FED具有无间隙结构,同时由于玻璃的厚度增加而增加了质量。 此外,连接到发射器的导体的处理可以容易。 一种用于平板显示器的信封,包括玻璃外壳和用于防止变形的支撑构件,其中玻璃外壳包括前玻璃和后玻璃,并且支撑构件包括边缘,桥和后板。 前玻璃包括用于显示图像的面部分,并且裙部延伸到后玻璃,使得通过裙部的端部处的密封边缘部分与后玻璃的接触来保持气密密封,边缘 支撑裙部外表面的外周和面部,后板固定在后玻璃上以支撑后玻璃,并且边缘和后板通过多个桥连接。
    • 8. 发明授权
    • Packed battery examining apparatus
    • 封装电池检查装置
    • US06229281B1
    • 2001-05-08
    • US09446127
    • 2000-04-07
    • Hiroyuki TatsumiToshiaki OkumaTatsuya FuchizakiTakahiro Murakami
    • Hiroyuki TatsumiToshiaki OkumaTatsuya FuchizakiTakahiro Murakami
    • H01M1046
    • H01M10/4257G01R31/3004H01M2/1022H01M10/4285H01M10/48
    • A controller comprises means for transmitting to an interface device, when predetermined data for examination must be acquired from a communication and charge or discharge controller in a packed battery which is an examination object in the step of performing examination processing, a communication command for acquiring the data for examination, the interface device comprises means for converting, when it receives the communication command from the controller, the received communication command into protocol data corresponding to a communication protocol used for communication with the packed battery which is an examination object, means for transmitting the obtained protocol data to the communication and charge or discharge controller in the packed battery which is an examination object, and means for receiving the data for examination which has been fed from the communication and the charge or discharge controller in the packed battery and transmitting the data for examination to the controller.
    • 控制器包括用于发送到接口设备的装置,当在执行检查处理的步骤中作为检查对象的打包电池中的通信和充电或放电控制器必须获取用于检查的预定数据时, 用于检查的数据,接口装置包括用于当接收到来自控制器的通信命令时将接收到的通信命令转换为与用作与检查对象的打包电池进行通信的通信协议相对应的协议数据的装置,用于发送 获取的作为检查对象的包装电池中的通信和充电或放电控制器的协议数据,以及用于接收从通信中馈送的检查数据和包装电池中的充电或放电控制器的装置, 数据进行检查 控制器。