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    • 6. 发明授权
    • Microscale driving unit and recording disk drive
    • 微型驱动单元和记录磁盘驱动器
    • US07501740B2
    • 2009-03-10
    • US11033311
    • 2005-01-12
    • Masaharu HidaTsuyoshi MitaKazuaki Kurihara
    • Masaharu HidaTsuyoshi MitaKazuaki Kurihara
    • H01L41/08
    • G11B5/5552H01L41/083H01L41/0926H01L41/0986H01L41/273
    • A microscale driving unit includes first and second elongated piezoelectric actuators extending in antiparallel directions. The base ends of the actuators are fixed to a support member. The tip ends of the actuators are fixed to a driven member. First and second electrically conductive members connect the base end of the first or second elongated piezoelectric actuator to the tip end of the second or first elongated piezoelectric actuator. The microscale driving unit allows utilization of a common single wiring pattern connected to both the base end of the first elongated piezoelectric actuator and the tip end of the second elongated piezoelectric actuator when a driving current is supplied to the first and second elongated piezoelectric actuators. Only a smaller area should be required to locate the wiring pattern. A sufficient planar space can be obtained on the surface of the support member.
    • 微型驱动单元包括沿反平行方向延伸的第一和第二细长压电致动器。 致动器的基端固定到支撑构件。 致动器的末端固定到从动构件。 第一和第二导电构件将第一或第二细长压电致动器的基端连接到第二或第一细长压电致动器的末端。 当驱动电流被提供给第一和第二细长压电致动器时,微型驱动单元允许利用连接到第一细长压电致动器的基端和第二细长压电致动器的末端的公共单一布线图案。 需要更小的区域来定位布线图案。 可以在支撑构件的表面上获得足够的平面空间。
    • 7. 发明申请
    • Piezoelectric element and method for manufacturing the same
    • 压电元件及其制造方法
    • US20070120447A1
    • 2007-05-31
    • US11390673
    • 2006-03-28
    • Shigeyoshi UmemiyaMasaharu Hida
    • Shigeyoshi UmemiyaMasaharu Hida
    • H01L41/083
    • H01L41/0533H01L41/083H01L41/0833H01L41/23
    • A coating film is formed on the whole surface area of a body part. Formation of the coating film may be done by immersing the body part in a solution of parfluoropolyether. Then, the parfluoropolyether constituting the coating film is joined with the side surfaces of the body part by irradiating Xenon excimer laser in a nitrogen atmosphere onto the side faces of the body part, or to the surface exposing an electrode layer. As a result, the protective film is formed only on the side surfaces of the body part. Thus, the protective film is formed as a monomolecular film. Total body part is then cleaned by 2,3-dihydrodecafluoropentane to remove non-reacted coating film, thereby completing a multi-layer piezoelectric element.
    • 在身体部分的整个表面区域上形成涂膜。 涂膜的形成可以通过将身体部分浸入到双氟聚醚的溶液中来进行。 然后,通过在氮气气氛中照射氙准分子激光器到身体部分的侧面,或暴露于电极层的表面,将构成涂膜的全氟聚醚与身体部分的侧表面接合。 结果,保护膜仅形成在主体部分的侧表面上。 因此,保护​​膜形成为单分子膜。 然后将全身部分用2,3-二氢十氟戊烷清洗以除去未反应的涂膜,从而完成层叠型压电元件。