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    • 1. 发明授权
    • Pattern extraction apparatus
    • 模式提取装置
    • US06195460B1
    • 2001-02-27
    • US09297537
    • 1999-04-30
    • Koji KobayashiHiroshi NakajimaTakafumi AokiMasayuki KawamataTatsuo Higuchi
    • Koji KobayashiHiroshi NakajimaTakafumi AokiMasayuki KawamataTatsuo Higuchi
    • G06K946
    • G06K9/522
    • Collation Fourier image data (FIG. 1D) FB generated by performing the two-dimensional discrete Fourier transform (DFT) for the image data (FIG. 1C) of a collation pattern is synthesized with registration Fourier image data (FIG. 1B) generated by performing the two-dimensional DFT for the image data of a registration pattern. After amplitude suppression processing is performed for the resultant data, two-dimensional DFT is performed. A correlation peak is extracted from a correlation component area which appears in the synthesized Fourier image data (FIG. 1E) for which the two-dimensional DFT has been performed. A predetermined area including this correlation peak is then masked (FIG. 1F). The two-dimensional DFT is performed for the masked synthesized Fourier image data, and amplitude restoration processing is performed for the data. The resultant data is re-synthesized with the registration Fourier image data FA, and the two-dimensional IDFT is performed for the synthesized data. With this processing, image data containing a difference pattern like the one shown in FIG. 1G or a moving pattern can be obtained.
    • 通过对核对图案的图像数据(图1C)执行二维离散付里叶变换(DFT)生成的核对付里叶图像数据(图1D),由登记付里叶图象数据(图1B)合成, 对注册图案的图像数据执行二维DFT。 在对所得数据进行幅度压缩处理之后,执行二维DFT。 从出现在执行了二维DFT的合成付里叶图像数据(图1E)中的相关分量区域提取相关峰值。 然后掩蔽包括该相关峰的预定区域(图1F)。 对被掩蔽的合成付里叶图像数据执行二维DFT,并且对数据执行幅度恢复处理。 所得到的数据与登记付里叶图象数据FA重新合成,并且对合成数据执行二维IDFT。 通过该处理,包含类似于图1所示的差异模式的图像数据。 可以获得1G或移动图案。
    • 2. 发明授权
    • Pattern collation apparatus based on spatial frequency characteristics
    • 基于空间频率特征的模式对照装置
    • US5915034A
    • 1999-06-22
    • US638430
    • 1996-04-26
    • Hiroshi NakajimaKoji KobayashiMasayuki KawamataTakafumi AokiTatsuo Higuchi
    • Hiroshi NakajimaKoji KobayashiMasayuki KawamataTakafumi AokiTatsuo Higuchi
    • G06K9/00G06K9/62G06K9/82
    • G06K9/001
    • In a pattern processing apparatus, a registration data preparation unit performs two-dimensional discrete Fourier transform of image data of a registration pattern to prepare registration Fourier image data. A collation data preparation unit performs two-dimensional discrete Fourier transform of image data of a collation pattern to prepare collation Fourier image data. A data synthesizing unit synthesizes the registration Fourier image data with the collation Fourier image data, both of which consist of phase and amplitude information, to output first synthesized Fourier image data. An image processing unit performs Fourier transform of the first synthesized Fourier image data to output second synthesized Fourier image data representing intensities of correlation components. A pattern collation unit collates the registration pattern with the collation pattern on the basis of the intensities of the correlation components of pixels in a correlation component area set in the second synthesized Fourier image data. An amplitude suppressing processing unit performs amplitude suppressing processing of one of the registration/collation Fourier image data and the first synthesized Fourier image data to extract only the phase information.
    • 在图案处理装置中,登记数据准备部对登记图案的图像数据进行二维离散付里叶变换,以准备登记付里叶图象数据。 核对数据准备单元对核对图案的图像数据进行二维离散付里叶变换,以制作核对付里叶图象数据。 数据合成单元将注册付里叶图像数据与由相位和幅度信息组成的核对付里叶图像数据合成,以输出第一合成付里叶图像数据。 图像处理单元执行第一合成付里叶图像数据的付里叶变换以输出表示相关分量的强度的第二合成付里叶图像数据。 基于第二合成付里叶图像数据中设定的相关分量区域中的像素的相关分量的强度,模式核对单元将注册模式与核对模式进行核对。 幅度抑制处理单元进行登记/核对付里叶图象数据和第一合成付里叶图象数据之一的幅度抑制处理,仅提取相位信息。