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    • 1. 发明授权
    • Device for manufacturing panel with functional film
    • 用于制造具有功能膜的面板的装置
    • US06371186B1
    • 2002-04-16
    • US09319211
    • 1999-06-01
    • Hiroshi KoizumiHiroshi MiyamotoMizuki MurataHiroshi Okuda
    • Hiroshi KoizumiHiroshi MiyamotoMizuki MurataHiroshi Okuda
    • B29C6302
    • H01J9/24B29C63/0073B29C63/02H01J29/86H01J29/896H01J2209/015
    • A method and apparatus for affixing a functional film on a panel surface having a curvature in three dimensional directions with at least one pushing roller. A pressing roller which is elastic has a shaft inside the roller. The shaft has a varied diameter of concave curvature with the largest portions at the ends of the shaft. The inner portion of the elastic roller is separated from the shaft by a clearance which is greater in the middle of the shaft. When the roller is pressed upon a three dimensional panel, the elastic roller is deformed into the clearance area and against the shaft. This permits even pressure to be applied across the panel. In a second embodiment, a main pushing roller unit may travel along the direction while pushing the functional film against the panel surface, followed by the two follow-up displacement pushing roller units which are displayed in response to the travel of the main pushing roller unit while pushing the functional film against the panel surface.
    • 一种在至少一个推压辊上将功能膜固定在具有三维方向的曲率的面板表面上的方法和装置。 具有弹性的加压辊在辊内具有轴。 轴具有不同直径的凹曲率,轴的端部处具有最大部分。 弹性辊的内部与轴分离,该间隙在轴的中部较大。 当辊被压在三维面板上时,弹性辊变形成间隙区域并抵靠轴。 这允许在面板上施加均匀的压力。 在第二实施例中,主推辊单元可以沿着该方向移动,同时将功能膜推靠在面板表面上,随后是随着主推辊单元的行进而显示的两个跟随位移推动辊单元 同时将功能膜推向面板表面。
    • 4. 发明授权
    • Substrate replacing method and substrate processing apparatus
    • 基板更换方法和基板处理装置
    • US08663489B2
    • 2014-03-04
    • US12732451
    • 2010-03-26
    • Shigeru IshizawaHiroshi KoizumiTatsuya Ogi
    • Shigeru IshizawaHiroshi KoizumiTatsuya Ogi
    • B44C1/22
    • H01L21/67745H01L21/67748
    • A method for replacing plural substrates to be processed by a substrate processing apparatus which includes a substrate processing chamber, a load lock chamber, and a conveying apparatus including first and second conveying members for conveying the plural substrates into and out from the substrate processing chamber and the load lock chamber. The method includes the steps of a) conveying a first substrate out from the substrate processing chamber with the first conveying member, b) conveying a second substrate into the substrate processing chamber with the second conveying member, c) conveying the second substrate out from the load lock chamber with the second conveying member, and d) conveying the first substrate into the load lock chamber with the first conveying member. The steps c) and d) are performed between step a) and step b).
    • 一种用于替换多个基板的方法,所述基板处理装置包括基板处理室,负载锁定室和输送装置,所述基板处理装置包括用于将多个基板输入和移出基板处理室的第一和第二输送部件, 负载锁定室。 该方法包括以下步骤:a)用第一输送部件从基板处理室输出第一基板,b)用第二输送部件将第二基板输送到基板处理室中,c)将第二基板从 负载锁定室与第二输送构件,以及d)用第一输送构件将第一基板输送到装载锁定室。 在步骤a)和步骤b)之间执行步骤c)和d)。