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1. 发明授权

US4938928A Gas sensor 失效
标题翻译：气体传感器
公开(公告)号：US4938928A
公开(公告)日：1990-07-03
申请号：US303067
申请日：1989-01-30
申请人： Hiroshi Koda , Muneharu Shimabukuro , Kiyonori Ono
发明人： Hiroshi Koda , Muneharu Shimabukuro , Kiyonori Ono
IPC分类号： G01N27/12
CPC分类号： G01N27/12
摘要： A sensor comprising a metal heat generating member formed with a heat-resistant insulating coating of Al.sub.2 O.sub.3 or the like over its surface, and an atmosphere-sensitive layer of SnO.sub.2 or the like supported on the coating. The insulating coating is formed, for example, by alumina sol coating and thermal decomposition, or plasma CVD of an aluminum compound. The sensitive layer is formed, for example, by the thermal decomposition of an organic compound of tin, vacuum evaporation or sputtering of tin, or printing of SnO.sub.2 on the heat generating member when the member is in the form of a flat plate. At least one electrode is connected to the sensitive layer for deriving an output from the layer in response to a combustible gas, humidity or the like.
摘要翻译：一种传感器，包括在其表面上形成有Al 2 O 3等的耐热绝缘涂层的金属发热部件和负载在涂层上的SnO 2等的气氛敏感层。绝缘涂层例如通过氧化铝溶胶涂层和热分解或铝化合物的等离子体CVD形成。敏感层例如通过锡的有机化合物的热分解，锡的真空蒸发或溅射形成，或者当构件为平板形式时，在发热构件上印刷SnO 2。至少一个电极连接到敏感层，以响应于可燃气体，湿度等导出来自层的输出。

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