专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US06638403B1 Plasma processing apparatus with real-time particle filter 有权
标题翻译：具有实时粒子滤波器的等离子体处理装置
公开(公告)号：US06638403B1
公开(公告)日：2003-10-28
申请号：US09644072
申请日：2000-08-23
申请人： Hiroshi Inaba , Shinji Sasaki , Shinya Hirano , Kenji Furusawa , Minoru Yamasaka , Atsushi Amatatsu , Shi Xu
发明人： Hiroshi Inaba , Shinji Sasaki , Shinya Hirano , Kenji Furusawa , Minoru Yamasaka , Atsushi Amatatsu , Shi Xu
IPC分类号： C23C1400
CPC分类号： H01J37/32055 , C23C14/325 , H01J37/3266
摘要： In the plasma processing device which utilizes a low pressure arc discharge, a method for efficiently capturing and removing electrically charged particles and neutral particles having no charge which are at most 5 &mgr;m in particle diameter is demanded. The electrically charged particles can be captured efficiently by installing an electric field filter in a transportation course of plasma. The electric field filter has a cylindrical structure which is uneven in inner wall shape. A voltage in the range of 10 to 90 V is applied to the electric field filter. The neutral filters can be captured efficiently by installing a neutral filter having an opening sectional area which is at most 40% of a sectional area of the transportation course.
摘要翻译：在使用低压电弧放电的等离子体处理装置中，要求有效地捕获和去除带电粒子的方法和粒径不超过5μm的无电荷的中性粒子。通过在等离子体的输送过程中安装电场滤波器可以有效地捕获带电粒子。电场滤波器具有内壁形状不均匀的圆筒状结构。对电场滤波器施加10〜90V范围的电压。可以通过安装具有开口截面积至多为运输路线横截面面积的40％的中性过滤器来有效地捕获中性过滤器。

2. 发明授权

US06875326B2 Plasma processing apparatus with real-time particle filter 失效
标题翻译：具有实时粒子滤波器的等离子体处理装置
公开(公告)号：US06875326B2
公开(公告)日：2005-04-05
申请号：US10319695
申请日：2002-12-16
申请人： Hiroshi Inaba , Shinji Sasaki , Shinya Hirano , Kenji Furusawa , Minoru Yamasaka , Atsushi Amatatsu , Shi Xu
发明人： Hiroshi Inaba , Shinji Sasaki , Shinya Hirano , Kenji Furusawa , Minoru Yamasaka , Atsushi Amatatsu , Shi Xu
IPC分类号： H05H1/24 , B01J19/08 , C23C14/32 , C23F4/00 , H01J37/32 , H01L21/203 , H01L21/302 , C23C14/00 , C23C16/00
CPC分类号： H01J37/32055 , C23C14/325 , H01J37/3266
摘要： A plasma processing device include a plasma generation unit for generating plasma by using a cathodic arc discharge, first and second magnetic field ducts arranged in a row for transporting the plasma with one end of the row being connected to the plasma generation unit and a processing chamber connected to the other end of the row unit and having a stage for holding a substrate to be processed. A shutter is provided for covering the plasma during a period of a predetermined time after start of arc discharge or during a period of predetermined time before end of arc discharge. The shutter is disposed between the first magnetic field duct and the substrate to be processed, and is movable. The shutter is capable of being supplied with a voltage, and is kept in a state so as to be electrically insulated from the processing chamber.
摘要翻译：等离子体处理装置包括：通过使用阴极电弧放电来产生等离子体的等离子体生成单元，排列成一行的第一和第二磁场导管，用于输送等离子体，该等离子体的一端与等离子体产生单元连接;处理室连接到行单元的另一端并且具有用于保持要处理的基板的台。在电弧放电开始之后的预定时间期间或在电弧放电结束之前的预定时间段期间，提供用于覆盖等离子体的快门。快门设置在第一磁场通道和待处理基板之间，并且是可移动的。快门能够被提供电压，并且保持在与处理室电绝缘的状态。

3. 发明授权

US07405394B2 Gas cluster-ion irradiation apparatus 失效
标题翻译：气体簇离子照射装置
公开(公告)号：US07405394B2
公开(公告)日：2008-07-29
申请号：US11173023
申请日：2005-07-05
申请人： Shigeru Ono , Shinji Sasaki , Kenji Furusawa , Jiro Matsuo , Toshio Seki
发明人： Shigeru Ono , Shinji Sasaki , Kenji Furusawa , Jiro Matsuo , Toshio Seki
IPC分类号： B01D59/44
CPC分类号： H01J37/3053 , H01J2237/04756 , H01J2237/0812 , H01J2237/304
摘要： In a cluster ion beam irradiation apparatus including an apparatus for measuring size and energy distribution of gas cluster ions by using the time of flight (TOF) mass spectrometry, a unit for applying a retarding voltage is disposed in a stage preceding a TOF measuring instrument including a drift tube and a current measuring instrument. By measuring the size and energy distribution of the gas cluster ions and adjusting ionization conditions, cluster ions having predetermined energy and size are supplied to a work surface. In addition, a product of a pressure in an ion transportation device and an ion transportation length is controlled so as to satisfy the relation P×L≦30/N2/3/E1/2 Pa·m, where N is the size of gas cluster ions used for irradiation, and E is kinetic energy (eV) of the gas cluster ions.
摘要翻译：在包括用于通过使用飞行时间（TOF）质谱法测量气体簇离子的尺寸和能量分布的装置的集束离子束照射装置中，在TOF测量仪器之前的阶段中设置用于施加延迟电压的单元，包括漂移管和电流测量仪器。通过测量气体团簇离子的尺寸和能量分布并调节电离条件，将具有预定能量和尺寸的簇离子供应到工作表面。此外，控制离子输送装置中的压力和离子输送长度的乘积，以满足关系式PxL <= 30 / N 2/3 / E 1/2 Pa.m，其中N是用于照射的气体簇离子的大小，E是气体簇离子的动能（eV）。

4. 发明申请

US20110113620A1 Manufacturing Method of Magnetic Head Slider 审中-公开
标题翻译：磁头滑块的制造方法
公开(公告)号：US20110113620A1
公开(公告)日：2011-05-19
申请号：US12948348
申请日：2010-11-17
申请人： Shinji Sasaki , Hiroyuki Kojima , Nobuhiko Fukuoka , Kenji Furusawa
发明人： Shinji Sasaki , Hiroyuki Kojima , Nobuhiko Fukuoka , Kenji Furusawa
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/3169 , G11B5/6011 , Y10T29/49032
摘要： A conventional lapping process of executing element size control and surface roughness reduction at the same time is divided in the present invention into a lapping process for element size control and a lapping step for surface roughness reduction. In the lapping process for surface roughness reduction, a surface of a ceramic substrate portion is used as a stopper for limiting cut-in of abrasive grains to realize surface roughness reduction while maintaining productivity.
摘要翻译：在本发明中，将元件尺寸控制和表面粗糙度减少执行的常规研磨处理分为用于元件尺寸控制的研磨工艺和用于表面粗糙度降低的研磨步骤。在表面粗糙度降低的研磨工艺中，陶瓷基板部分的表面用作限制磨粒的切割以在保持生产率的同时实现表面粗糙度减小。

5. 发明申请

US20060043317A1 Cluster-ion beam irradiation apparatus and method for manufacturing magnetic head element using the same 失效
标题翻译：集束离子束照射装置及使用其的磁头元件的制造方法
公开(公告)号：US20060043317A1
公开(公告)日：2006-03-02
申请号：US11173023
申请日：2005-07-05
申请人： Shigeru Ono , Shinji Sasaki , Kenji Furusawa , Jiro Matsuo , Toshio Seki
发明人： Shigeru Ono , Shinji Sasaki , Kenji Furusawa , Jiro Matsuo , Toshio Seki
IPC分类号： H01J37/08
CPC分类号： H01J37/3053 , H01J2237/04756 , H01J2237/0812 , H01J2237/304
摘要： In a cluster ion beam irradiation apparatus including an apparatus for measuring size and energy distribution of gas cluster ions by using the time of flight (TOF) mass spectrometry, a unit for applying a retarding voltage is disposed in a stage preceding a TOF measuring instrument including a drift tube and a current measuring instrument. By measuring the size and energy distribution of the gas cluster ions and adjusting ionization conditions, cluster ions having predetermined energy and size are supplied to a work surface. In addition, a product of a pressure in an ion transportation device and an ion transportation length is controlled so as to satisfy the relation P×L≦30/N2/3/E1/2 Pa.m, where N is the size of gas cluster ions used for irradiation, and E is kinetic energy (eV) of the gas cluster ions.
摘要翻译：在包括用于通过使用飞行时间（TOF）质谱法测量气体簇离子的尺寸和能量分布的装置的集束离子束照射装置中，在TOF测量仪器之前的阶段中设置用于施加延迟电压的单元，包括漂移管和电流测量仪器。通过测量气体团簇离子的尺寸和能量分布并调节电离条件，将具有预定能量和尺寸的簇离子供应到工作表面。此外，控制离子输送装置中的压力和离子输送长度的乘积，以满足关系式PxL <= 30 / N 2/3 / E 1/2 Pa.m，其中N是用于照射的气体簇离子的大小，E是气体簇离子的动能（eV）。

6. 发明授权

US06613428B2 Magnetic recording medium and magnetic recording and reproducing apparatus wherein the magnetic layer has a fluctuation of field; A or Hf of not less than 30 Oersteds 失效
标题翻译：磁记录介质和磁记录和再现装置，其中磁层具有磁场的波动; A或Hf不小于30奥斯特
公开(公告)号：US06613428B2
公开(公告)日：2003-09-02
申请号：US09849404
申请日：2001-05-07
申请人： Kazusuke Yamanaka , Tomoo Yamamoto , Yuzuru Hosoe , Nobuyuki Inaba , Yasutaro Uesaka , Masaaki Futamoto , Yoshibumi Matsuda , Kenji Furusawa , Shinji Narishige
发明人： Kazusuke Yamanaka , Tomoo Yamamoto , Yuzuru Hosoe , Nobuyuki Inaba , Yasutaro Uesaka , Masaaki Futamoto , Yoshibumi Matsuda , Kenji Furusawa , Shinji Narishige
IPC分类号： G11B564
CPC分类号： G11B5/64 , Y10T428/12465 , Y10T428/12986 , Y10T428/265 , Y10T428/31
摘要： A thin film magnetic recording medium including a magnetic layer having a fluctuation field defined as S/Xirr, where S is magnetic viscosity and Xirr is irreversible susceptibility Xirr. The fluctuation field of the magnetic layer is not less than 15 oersteds.
摘要翻译：一种薄膜磁记录介质，包括具有定义为S / Xirr的波动场的磁性层，其中S是磁粘度和Xirr是不可逆的磁化率Xirr。磁性层的波动场不小于15奥斯特。

7. 发明授权

US06310748B1 Magnetic thin film magnetic recording medium 失效
标题翻译：磁性薄膜磁记录介质
公开(公告)号：US06310748B1
公开(公告)日：2001-10-30
申请号：US08521363
申请日：1995-08-31
申请人： Kazusuke Yamanaka , Tomoo Yamamoto , Yuzuru Hosoe , Nobuyuki Inaba , Yasutaro Uesaka , Masaaki Futamoto , Yoshibumi Matsuda , Kenji Furusawa , Shinji Narishige
发明人： Kazusuke Yamanaka , Tomoo Yamamoto , Yuzuru Hosoe , Nobuyuki Inaba , Yasutaro Uesaka , Masaaki Futamoto , Yoshibumi Matsuda , Kenji Furusawa , Shinji Narishige
IPC分类号： G11B566
CPC分类号： G11B5/64 , Y10T428/12465 , Y10T428/12986 , Y10T428/265 , Y10T428/31
摘要： A ferromagnetic thin film is used to provide a magnetic recording medium whose noise is low and whose S/N is high. The ferromagnetic thin film as the magnetic film of the magnetic recording medium is such that the fluctuation field of magnetic viscosity at 25° C. at the field strength equal to remanence coercivity or coercivity is not less than 15 oersteds and the coercivity is not less than 2000 oersteds.
摘要翻译：铁磁薄膜用于提供噪声低且S / N高的磁记录介质。作为磁记录介质的磁性膜的铁磁性薄膜使得在等于剩磁矫顽力或矫顽力的场强下，25℃下磁力粘度的波动范围不小于15奥斯特，矫顽力不小于 2000奥斯特。

8. 发明授权

US07147540B2 Magnetic head slider and method of manufacturing the same 失效
标题翻译：磁头滑块及其制造方法
公开(公告)号：US07147540B2
公开(公告)日：2006-12-12
申请号：US10384310
申请日：2003-03-06
申请人： Hideaki Tanaka , Kenji Furusawa , Takateru Seki , Akio Takakura , Yukihiro Isono
发明人： Hideaki Tanaka , Kenji Furusawa , Takateru Seki , Akio Takakura , Yukihiro Isono
IPC分类号： B24B49/10
CPC分类号： G11B5/6005 , Y10T29/49048
摘要： In order to realize a shape of an air bearing surface of a magnetic head slider which is capable of coping with a lowering of flying height and which has high reliability, at the time of polishing the air bearing surface of the magnetic head slider by bringing the air bearing surface and the surface of a polishing machine into contact with each other, machining is conducted in the condition where the stiffness acting between both the members is enhanced, and the standard deviation of the flatness of the air bearing surface machined and the standard deviation of the recess amount between the air bearing surface and a magnetic element are controlled. Thus, it is possible to efficiently manufacture a magnetic head slider which enables driving at a low flying height.
摘要翻译：为了实现能够应对飞行高度的降低并且具有高可靠性的磁头滑块的空气轴承表面的形状，在通过使磁头滑块的空气支承表面进行研磨时，空气轴承表面和抛光机的表面彼此接触，在两个构件之间作用的刚度增强的情况下进行机械加工，并且空气轴承表面的平面度的标准偏差和标准偏差控制空气轴承表面和磁性元件之间的凹陷量。因此，可以有效地制造能够以低飞行高度驾驶的磁头滑块。

9. 发明申请

US20050280941A9 Magnetic head slider and method of manufacturing the same 失效
标题翻译：磁头滑块及其制造方法
公开(公告)号：US20050280941A9
公开(公告)日：2005-12-22
申请号：US10384310
申请日：2003-03-06
申请人： Hideaki Tanaka , Kenji Furusawa , Takateru Seki , Akio Takakura , Yukihiro Isono
发明人： Hideaki Tanaka , Kenji Furusawa , Takateru Seki , Akio Takakura , Yukihiro Isono
IPC分类号： G11B5/60
CPC分类号： G11B5/6005 , Y10T29/49048
摘要： In order to realize a shape of an air bearing surface of a magnetic head slider which is capable of coping with a lowering of flying height and which has high reliability, at the time of polishing the air bearing surface of the magnetic head slider by bringing the air bearing surface and the surface of a polishing machine into contact with each other, machining is conducted in the condition where the stiffness acting between both the members is enhanced, and the standard deviation of the flatness of the air bearing surface machined and the standard deviation of the recess amount between the air bearing surface and a magnetic element are controlled. Thus, it is possible to efficiently manufacture a magnetic head slider which enables driving at a low flying height.
摘要翻译：为了实现能够应对飞行高度的降低并且具有高可靠性的磁头滑块的空气轴承表面的形状，在通过使磁头滑块的空气支承表面进行研磨时，空气轴承表面和抛光机的表面彼此接触，在两个构件之间作用的刚度增强的情况下进行机械加工，并且空气轴承表面的平面度的标准偏差和标准偏差控制空气轴承表面和磁性元件之间的凹陷量。因此，可以有效地制造能够以低飞行高度驾驶的磁头滑块。

10. 发明申请

US20050123806A1 Magnetic recording medium and magnetic recording and reproducing apparatus 有权
标题翻译：磁记录介质和磁记录和再现装置
公开(公告)号：US20050123806A1
公开(公告)日：2005-06-09
申请号：US11036064
申请日：2005-01-18
申请人： Kazusuke Yamanaka , Tomoo Yamamoto , Yuzuru Hosoe , Nobuyuki Inaba , Yasutaro Uesaka , Masaaki Futamoto , Yoshibumi Matsuda , Kenji Furusawa , Shinji Narishige
发明人： Kazusuke Yamanaka , Tomoo Yamamoto , Yuzuru Hosoe , Nobuyuki Inaba , Yasutaro Uesaka , Masaaki Futamoto , Yoshibumi Matsuda , Kenji Furusawa , Shinji Narishige
IPC分类号： G11B5/66 , G11B5/02 , G11B5/64 , G11B5/65 , G11B5/73
CPC分类号： G11B5/64 , Y10T428/12465 , Y10T428/12986 , Y10T428/265 , Y10T428/31
摘要： A magnetic recording medium having a substrate, an under-layer formed on the substrate, a magnetic layer formed on the substrate and a protective layer formed on the magnetic layer. The magnetic layer comprises Co, Cr and Pt with a thickness being from 10 nm to 22 nm. Further, a coercivity of the magnetic layer is not less than 2000 Oe, and a fluctuation field of magnetic viscosity at a field strength equal to remanence coercivity or coercivity is not less than 30 Oe.
摘要翻译：具有基板的磁记录介质，在基板上形成的下层，形成在基板上的磁性层和形成在磁性层上的保护层。磁性层包括厚度为10nm至22nm的Co，Cr和Pt。此外，磁性层的矫顽力不小于2000Oe，磁场强度等于剩磁矫顽力或矫顽磁力的磁场粘度的波动范围不小于30Oe。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式