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    • 2. 发明授权
    • Vibration-type angular-velocity sensor
    • 振动型角速度传感器
    • US5578754A
    • 1996-11-26
    • US358077
    • 1994-12-15
    • Kenzi KatoTomoyuki Kanda
    • Kenzi KatoTomoyuki Kanda
    • G01C19/56G01C19/5607G01C19/5642G01P15/00G01P15/10G01P9/04
    • G01C19/56
    • A vibration-type angular-velocity sensor which can be reduced in size in the direction of the axis of the angular-velocity to be measured. A vibration body 11 comprises a pair of parallel driving plates 121 and 122 bent into a U-shape and extending in a Y direction, and a pair of detection plates 151 and 152 are so formed as to extend in mutually opposite directions in an X-axis direction by bending outwards the distal ends of the driving plates 121 and 122, respectively. The driving plates 121 and 122 are supported at a connecting plate 13 portion by a support member 14 in such a manner as to be capable of vibration. Piezoelectric devices 161 and 162 are bonded to the surfaces of the driving plates 121 and 122, respectively. When an A.C. voltage is applied, the driving plates are vibrated in mutually opposite directions. When a rotary angular-velocity, around the Z-axis of the sensor, generates a force in a Y-axis direction, due to the Coriolis effect, on the detection plates 151, 152, the Coriolis force is detected by piezoelectric devices 171 and 172. Accordingly, detection signals proportional to the angular-velocity are outputted from the detection piezoelectric devices 171 and 172.
    • 将需要测定的振动型角速度传感器,其可以在尺寸在角速度的轴线的方向上被减小。 振动体11包括一对平行的驱动板121和122弯曲成U形,并在Y方向延伸,并且一对检测板151和152被形成为相互相反的方向延伸到在在X-的 分别向外弯曲驱动板121和122的远端。 驱动板121和122通过支撑构件14以能够振动的方式支撑在连接板13部分处。 压电器件161和162分别结合到驱动板121和122的表面。 当施加交流电压时,驱动板在相反的方向振动。 当传感器的Z轴周围的旋转角速度由于科里奥利效应而在Y轴方向上产生在检测板151,152上的力时,科氏力由压电装置171和 因此,从检测压电装置171和172输出与角速度成比例的检测信号。
    • 3. 发明授权
    • Vibration-type angular velocity detector having sensorless temperature
compensation
    • 具有无传感器温度补偿的振动型角速度检测器
    • US5806364A
    • 1998-09-15
    • US769396
    • 1996-12-19
    • Kenzi KatoJunichi Sato
    • Kenzi KatoJunichi Sato
    • G01C19/56G01C19/5614G01D3/036G01P9/00
    • G01C19/5614G01D3/0365
    • A vibration-type angular velocity detector is for accurately correcting temperature-induced variations of an angular velocity signal without using a temperature sensor. A driving piezoelectric element, a detecting piezoelectric element and reference piezoelectric element are disposed on a vibration element. Using an output signal of the reference piezoelectric signal, a feedback control loop for applying driving voltage to the driving piezoelectric element is provided using an amplifier, a phase-shifting circuit, a rectifier, a reference voltage generator, a differential amplifier and a multiplier so as to vibrate the vibration element at a fixed amplitude. In addition, using an output signal of the detecting piezoelectric element at the time of vibrating the vibration element, an angular velocity signal is output. Here, the output voltage of the differential amplifier is a signal corresponding to the temperature of the vibration element. A correction signal is prepared by a correction signal preparing circuit using the differential amplifier output signal added to the angular velocity signal by a summer so that the temperature correction of the angular velocity signal is performed.
    • 振动型角速度检测器用于在不使用温度传感器的情况下精确地校正角速度信号的温度变化。 驱动压电元件,检测压电元件和参考压电元件设置在振动元件上。 使用参考压电信号的输出信号,使用放大器,移相电路,整流器,参考电压发生器,差分放大器和乘法器来提供用于向驱动压电元件施加驱动电压的反馈控制回路 以振动元件以固定的振幅振动。 此外,使用振动振动元件时检测压电元件的输出信号,输出角速度信号。 这里,差分放大器的输出电压是与振动元件的温度对应的信号。 通过使用加法到加速度角速度信号的差分放大器输出信号的校正信号制作电路来准备校正信号,从而进行角速度信号的温度校正。
    • 5. 发明授权
    • Angular velocity sensor apparatus
    • 角速度传感器装置
    • US5747691A
    • 1998-05-05
    • US612394
    • 1996-03-07
    • Yoshimi YoshinoKenzi Kato
    • Yoshimi YoshinoKenzi Kato
    • G01P9/04B81B3/00G01C19/56G01P3/44
    • G01C19/5628G01C19/5621
    • A frame body and a tuning fork-shaped vibratory element are made of a single crystalline silicon substrate. The vibratory element has arms extending parallel to each other. The respective sides of the frame body are located face to face with a predetermined distance from the arms. Thin portions are formed between thick portions located partially on the arms of the vibratory element. Piezo-resistant elements for detecting angular velocity are disposed on the thin portions. When electrostatic force is imposed between the sides of the frame body and the arms, the arms are excited to vibrate. At this time, when angular velocity is imposed, the arms vibrate in the direction crossing at right angles with the excited direction. The piezo-resistant elements detect vibration of the arms caused by the angular velocity with stabilized characteristics and higher sensitivity.
    • 框架体和音叉形振动元件由单晶硅衬底制成。 振动元件具有彼此平行延伸的臂。 框架体的各个侧面与臂相距预定距离地面对面地设置。 薄壁部分形成在部分位于振动元件的臂上的厚部分之间。 用于检测角速度的压电元件设置在薄部分上。 当在框体和臂的侧面之间施加静电力时,臂被激发以振动。 此时,当施加角速度时,臂沿与激励方向成直角交叉的方向振动。 压电元件检测由具有稳定特性和更高灵敏度的角速度引起的臂的振动。