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    • 3. 发明授权
    • Semiconductor memory device and manufacturing method thereof
    • 半导体存储器件及其制造方法
    • US06900513B2
    • 2005-05-31
    • US10046792
    • 2002-01-15
    • Hidetaka Natsume
    • Hidetaka Natsume
    • H01L21/8244H01L27/11H01L31/062H01L27/108H01L29/74
    • H01L27/11H01L27/1104
    • The present invention relates to a semiconductor memory device having a SRAM in which a memory cell comprises a pair of transmission transistors and a flip-flop circuit containing a pair of driver transistors and a pair of load transistors, wherein: a first conductive film interconnection formed from a first conductive film which is set on a semiconductor substrate, constitutes respective gate electrodes of said driver transistors, load transistors and transmission transistors; an inlaid interconnection set in a first insulating film lying on said semiconductor substrate, constitutes one of a pair of local interconnections cross-coupling a pair of input/output terminals in said flip-flop circuit; and a second conductive film interconnection formed from a second conductive film which is set on a second insulating film lying on said first insulating film, constitutes the other one of said pair of local interconnections.
    • 本发明涉及一种具有SRAM的半导体存储器件,其中存储器单元包括一对传输晶体管和包含一对驱动晶体管和一对负载晶体管的触发电路,其中:形成第一导电膜互连 从设置在半导体衬底上的第一导电膜构成所述驱动晶体管,负载晶体管和透射晶体管的各个栅电极; 位于所述半导体衬底上的第一绝缘膜中的嵌入式互连构成在所述触发器电路中交叉耦合一对输入/输出端的一对局部互连之一; 并且由设置在位于所述第一绝缘膜上的第二绝缘膜上的第二导电膜形成的第二导电膜互连构成所述一对局部互连中的另一个。
    • 4. 发明授权
    • Semiconductor static memory device having a TFT load
    • 具有TFT负载的半导体静态存储器件
    • US5757031A
    • 1998-05-26
    • US755777
    • 1996-11-22
    • Hidetaka Natsume
    • Hidetaka Natsume
    • H01L27/11H01L21/8244H01L27/10
    • H01L27/11H01L27/1108Y10S257/903
    • Each memory cell of an SRAM has a structure in which a gate electrode of a drive MOSFET is formed by a first conductive film, a gate electrode of a load TFT is formed by a third conducive layer and a second conductive film does not exist in an area where two gate electrodes overlap with each other. After the second conductive film is subjected to patterning, a first interlayer insulating film is successively removed with the same photolithographic mask. Since the parasitic capacitance at a memory node of the memory cell is increased by thinning the insulating film between the two gate electrodes, the SRAM has an excellent resistance to soft errors.
    • SRAM的每个存储单元具有其中驱动MOSFET的栅电极由第一导电膜形成的结构,负载TFT的栅电极由第三导电层形成,第二导电膜不存在于第 两个栅电极彼此重叠的区域。 在对第二导电膜进行图案化之后,用相同的光刻掩模连续地去除第一层间绝缘膜。 由于通过使两个栅电极之间的绝缘膜变薄来增加存储单元的存储器节点处的寄生电容,所以SRAM具有优异的软错误抵抗性。
    • 5. 发明申请
    • Method for manufacturing semiconductor device and semiconductor device
    • 半导体器件和半导体器件的制造方法
    • US20090273089A1
    • 2009-11-05
    • US12458198
    • 2009-07-02
    • Hiroyuki HoshizakiHidetaka Natsume
    • Hiroyuki HoshizakiHidetaka Natsume
    • H01L23/522H01L21/768
    • H01L27/10885H01L27/10888H01L2924/0002H01L2924/00
    • A semiconductor device in which a conductor of a bit line may be made as large in thickness as possible to reduce resistance of the bit line and to reduce capacitance across the neighboring bit lines. The device includes a first interlayer film having a first contact metal part accommodated in it, and a second interlayer film. The second interlayer film includes a trench, and is deposited on the first interlayer film. The semiconductor device also includes a metal conductor filled in and protruding above the trench, and a hard mask film deposited on the metal conductor. The semiconductor device also includes sidewalls formed on lateral surfaces of the hard mask film and the metal conductor for overlying the second interlayer film, and a third interlayer film formed above the second interlayer film inclusive of the hard mask film and the sidewalls. The device also includes a contact hole opened through the third interlayer film and the second interlayer film and in the first interlayer film to expose the first contact metal part between the sidewalls. The device further includes a second contact metal part 1 in the contact hole.
    • 可以将位线的导体制成尽可能大的厚度以降低位线的电阻并减小相邻位线之间的电容的半导体器件。 该装置包括具有容纳在其中的第一接触金属部分的第一中间膜和第二中间膜。 第二层间膜包括沟槽,并且沉积在第一层间膜上。 半导体器件还包括填充并突出在沟槽上方的金属导体和沉积在金属导体上的硬掩模膜。 半导体器件还包括形成在硬掩模膜和用于覆盖第二层间膜的金属导体的侧表面上的侧壁,以及形成在包括硬掩模膜和侧壁的第二层间膜之上的第三层间膜。 该装置还包括通过第三层间膜和第二层间膜开口的接触孔,以及在第一层间膜中暴露出侧壁之间的第一接触金属部分的接触孔。 该装置还包括接触孔中的第二接触金属部分1。
    • 6. 发明授权
    • Semiconductor memory device with plural source/drain regions
    • 具有多个源极/漏极区域的半导体存储器件
    • US07250661B2
    • 2007-07-31
    • US10996456
    • 2004-11-26
    • Toshifumi TakahashiHidetaka Natsume
    • Toshifumi TakahashiHidetaka Natsume
    • H01L29/76H01L29/94
    • H01L27/1104H01L21/84Y10S257/903
    • A semiconductor memory device includes first and second source/drain regions, and first and second semiconductor regions. The first source/drain region of a first conductive type is formed in a first well region of a second conductive type for a pair of first MIS-type transistors of the first conductive type. The second source/drain region of the second conductive type is formed in a second well region of the first conductive type for a pair of second MIS-type transistors of the second conductive type. The first semiconductor region of the second conductive type is formed in the first source/drain region. The second semiconductor region of the first conductive type is formed in the second source/drain region.
    • 半导体存储器件包括第一和第二源/漏区以及第一和第二半导体区。 第一导电类型的第一源极/漏极区域形成在第一导电类型的一对第一MIS型晶体管的第二导电类型的第一阱区域中。 第二导电类型的第二源极/漏极区域形成在第二导电类型的一对第二MIS型晶体管的第一导电类型的第二阱区域中。 第二导电类型的第一半导体区域形成在第一源极/漏极区域中。 第一导电类型的第二半导体区域形成在第二源极/漏极区域中。
    • 7. 发明申请
    • Semiconductor memory device
    • 半导体存储器件
    • US20050116303A1
    • 2005-06-02
    • US10996456
    • 2004-11-26
    • Toshifumi TakahashiHidetaka Natsume
    • Toshifumi TakahashiHidetaka Natsume
    • H01L21/8244H01L21/84H01L27/11H01L29/76
    • H01L27/1104H01L21/84Y10S257/903
    • A semiconductor memory device includes first and second source/drain regions, and first and second semiconductor regions. The first source/drain region of a first conductive type is formed in a first well region of a second conductive type for a pair of first MIS-type transistors of the first conductive type. The second source/drain region of the second conductive type is formed in a second well region of the first conductive type for a pair of second MIS-type transistors of the second conductive type. The first semiconductor region of the second conductive type is formed in the first source/drain region. The second semiconductor region of the first conductive type is formed in the second source/drain region.
    • 半导体存储器件包括第一和第二源/漏区以及第一和第二半导体区。 第一导电类型的第一源极/漏极区域形成在第一导电类型的一对第一MIS型晶体管的第二导电类型的第一阱区域中。 第二导电类型的第二源极/漏极区域形成在第二导电类型的一对第二MIS型晶体管的第一导电类型的第二阱区域中。 第二导电类型的第一半导体区域形成在第一源极/漏极区域中。 第一导电类型的第二半导体区域形成在第二源极/漏极区域中。
    • 8. 发明授权
    • Semiconductor device
    • 半导体器件
    • US06765272B2
    • 2004-07-20
    • US10131206
    • 2002-04-25
    • Hidetaka Natsume
    • Hidetaka Natsume
    • H01L2976
    • H01L21/823814H01L27/092Y10S257/903Y10S257/904
    • A semiconductor device has a gate electrode which is formed on a first conductive-type well set in semiconductor substrate, with a gate insulating film lying therebetween; a LDD structure in which, on either side of said gate electrode, there are formed a LDD region and a source/drain region; an interlayer insulating film to cover said gate electrode as well as said LDD regions; and contact sections. A contact section connecting to one side of the source/drain regions having a potential equal to a potential of said first conductive-type well is disposed so as to come into contact with the LDD region lying thereunder; and a contact section connecting to the other side of the source/drain region having a potential different from the potential of said first conductive-type well is disposed so as not to come into contact with the LDD region lying thereunder. The present invention can develop technology capable to reduce the memory cell area while suppressing the generation of the leakage, and provide a semiconductor memory device of high integration with excellent element characteristics having a low standby current.
    • 半导体器件具有形成在半导体衬底中的第一导电类型阱的栅电极,栅极绝缘膜位于其间; LDD结构,其中在所述栅电极的任一侧上形成LDD区和源极/漏极区; 覆盖所述栅极电极以及所述LDD区域的层间绝缘膜; 和联系部分。 连接到具有等于所述第一导电型阱的电位的电位的源/漏区的一侧的接触部分设置成与其下方的LDD区域接触; 并且连接到具有与所述第一导电型阱的电位不同的电位的源极/漏极区域的另一侧的接触部分设置成不与其下面的LDD区域接触。 本发明可以开发能够在抑制泄漏的产生的同时减小存储单元面积的技术,并且提供具有低待机电流的优异元件特性的高集成度的半导体存储器件。
    • 10. 发明授权
    • Semiconductor integrated circuit having DRAM word line drivers
    • 具有DRAM字线驱动器的半导体集成电路
    • US08036048B2
    • 2011-10-11
    • US12256653
    • 2008-10-23
    • Hiroyuki TakahashiHidetaka Natsume
    • Hiroyuki TakahashiHidetaka Natsume
    • G11C7/00
    • G11C11/4085G11C5/14G11C8/08G11C11/409G11C11/4091
    • A semiconductor integrated circuit according to one aspect of the present invention may includes a plurality of driving circuits to drive a respective plurality of word lines with either a first voltage supplied from a first power supply or a second voltage supplied from a second power supply in accordance with a control signal, and a plurality of gate transistors in each of which a gate is connected to one of the plurality of word lines, and a connection state between a storage node and a bit line is changed based on the voltage provided to the word line connected to the gate. In the semiconductor integrated circuit, a gate oxide film of each of the plurality of gate transistors is thinner than a gate oxide film of each of transistors constituting the plurality of driving circuits.
    • 根据本发明的一个方面的半导体集成电路可以包括多个驱动电路,用于根据第一电源提供的第一电压或从第二电源提供的第二电压驱动相应的多个字线 具有控制信号,以及多个栅极晶体管,其中每个栅极连接到多条字线中的一条字线,并且存储节点和位线之间的连接状态基于提供给字的电压而改变 线连接到门。 在半导体集成电路中,多个栅极晶体管的栅极氧化膜比构成多个驱动电路的晶体管的栅极氧化膜薄。