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    • 6. 发明授权
    • Electron beam device
    • 电子束装置
    • US6037589A
    • 2000-03-14
    • US8161
    • 1998-01-16
    • Akira YonezawaMitsuyoshi SatoOsamu Takaoka
    • Akira YonezawaMitsuyoshi SatoOsamu Takaoka
    • H01J37/145H01J37/244
    • H01J37/145H01J2237/0475H01J2237/1035H01J2237/1534H01J2237/28
    • An high resolution electron beam observation instrument has an electron beam source, an electron beam optical system for converging the electron beam and scanning the electron beam across the surface of a sample, and a compound magnetic and electrostatic objective lens comprising a single pole magnetic lens having a single magnetic pole portion disposed between the electron beam source and the sample and an electrostatic immersion lens, the electrostatic immersion lens comprising an upper electrode and a lower electrode, one end of the upper electrode extending between the single magnetic pole portion and the sample, and the lower electrode being disposed between the upper electrode and the sample; wherein a deceleration electric field is generated between the upper electrode and the lower electrode to allow high resolution observation of the sample. The upper electrode may comprise the single magnetic pole portion of the single pole magnetic lens, or one or more seperate electrodes. The single pole magnetic lens has a conical shaped portion extending between the single magnetic pole portion and the electron beam source. A potential applied to the sample differs from a potential applied to the lower electrode when the sample is not inclined and a difference between the potentials of the sample and the lower electrode is reduced, or the potentials are made equal to each other when the sample is inclined by the sample inclining means.
    • 高分辨率电子束观察仪器具有电子束源,用于会聚电子束并扫描电子束穿过样品表面的电子束光学系统,以及包括单极磁性透镜的复合磁静电物镜,其具有 设置在电子束源和样品之间的单个磁极部分和静电浸没透镜,静电浸没透镜包括上电极和下电极,上电极的一端在单磁极部分和样品之间延伸, 并且所述下电极设置在所述上​​电极和所述样品之间; 其中在上电极和下电极之间产生减速电场,以允许样品的高分辨率观察。 上电极可以包括单极磁性透镜的单个磁极部分或一个或多个单独的电极。 单极磁性透镜具有在单个磁极部分和电子束源之间延伸的锥形部分。 当样品不倾斜并且样品和下电极的电位之间的差减小时,施加到样品的电位与施加到下电极的电位不同,或者当样品是相同时,电位彼此相等 由样品倾斜装置倾斜。
    • 7. 发明授权
    • Method of correcting a pattern film
    • 校正图案胶片的方法
    • US4902530A
    • 1990-02-20
    • US157922
    • 1988-02-19
    • Anto YasakaYoshitomo NakagawaMitsuyoshi Sato
    • Anto YasakaYoshitomo NakagawaMitsuyoshi Sato
    • G03F1/00G03F1/74
    • G03F1/74
    • According to the present invention, an apparatus for correcting a pattern film wherein an organic compound vapor is directed to a defect in a mask or IC while an ion beam is irradiated and scanned for depositing film on the white defect is furnished with a circuit for calculating film deposition area based on the reproduced image of a mask pattern, whereby elongating the total scanning time by inserting blank time in the scanning time, during which the ion beam is not irradiated (this operation is hereinafter referred to as blanking), when the ratio of the film deposition area to the ion beam current for an organic compound directed by a gas gun is lower than a predetermined level. Because of this operation, the molecule of the organic compound vapor is sufficiently deposited on the mask of IC surface, and therefore, a film having good light shielding or good conductance can be deposited with strong bonding.
    • 根据本发明,一种用于校正图案膜的装置,其中有机化合物蒸气被引导到掩模或IC中的缺陷,同时照射和扫描离子束以在白色缺陷上沉积膜,其具有计算电路 基于掩模图案的再现图像的膜沉积区域,通过在扫描时间内插入空白时间(在此以下称为消隐),延长总扫描时间) 由用于由气枪引导的有机化合物的离子束电流低于预定水平。 由于这种操作,有机化合物蒸气的分子充分地沉积在IC表面的掩模上,因此可以以很强的粘合沉积具有良好遮光性或良好电导率的膜。
    • 8. 发明申请
    • METHOD OF MEASUREMENT OF NUMBER OF NONMETALLIC INCLUSIONS AND CASTING MOLD FOR OBTAINING CAST SAMPLE USED FOR SAME
    • 测量非金属包裹数量和铸造模具的方法用于获得用于其的铸件样品
    • US20100119145A1
    • 2010-05-13
    • US12444724
    • 2008-03-07
    • Mitsuyoshi SatoHiroshi KawaiYukio KuramasuRyouji Abe
    • Mitsuyoshi SatoHiroshi KawaiYukio KuramasuRyouji Abe
    • G06K9/00B22C9/08
    • B22D46/00B22C9/22B22D2/00G01N21/8851G01N21/94G01N33/20
    • A method of automatically counting a number of inclusions by eliminating the effects of shrinkage cavities in the conventional method and securing a high correlation with a value measured by a skilled worker and a casting mold for obtaining a cast sample used for the same are provided. A method of measurement of a number of nonmetallic inclusions comprising capturing an image of a rectangular fracture surface of a cast sample consisting of an aluminum alloy by a CCD camera or other image capturing means, processing the image captured by the image capturing means for color density, digitalizing the processed image by a predetermined threshold value, and counting the number of pixel clusters of a predetermined size or more, the method characterized by detecting the end edges of the short sides of the rectangular fracture surface before the capturing of its image and automatically setting measurement regions of an area of ¼ to ⅔ of the area of the fracture surface at the two ends of the fracture surface. A casting mold for obtaining a cast sample comprised of a top mold having a recess and a bottom mold having a sprue, having a substantially rectangular parallelepiped cavity extending in the melt flow direction in the state where the top mold and the bottom mold are assembled, and provided, at equal intervals at the bottom of the recess of the top mold with a handle, with inverted V-shaped projections extending in a direction vertical to the melt flow direction.
    • 提供了一种通过消除常规方法中的收缩腔的影响来自动计数多个夹杂物的方法,并且确保与本领域技术人员和铸模测量的值的高相关性,以获得用于其的铸造样品。 一种测量多个非金属夹杂物的方法,包括通过CCD照相机或其它图像捕获装置捕获由铝合金构成的铸造样品的矩形断面的图像,处理由图像捕获装置拍摄的图像的色密度 将经处理的图像数字化预定的阈值,并且计算预定尺寸或更大的像素簇的数量,该方法的特征在于在捕获其图像之前检测矩形断面的短边的端边缘并且自动地 将断裂面两端的断面面积的¼〜的测量区域设定为。 一种用于获得铸造样品的铸模,其由具有凹部的顶模和具有浇口的底模构成,所述浇口具有在组装顶模和底模的状态下在熔体流动方向上延伸的基本上长方体的空腔, 并且在具有手柄的上模具的凹部的底部处于相等的间隔处设置有在垂直于熔体流动方向的方向上延伸的倒V形突起。