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1. 发明申请

US20050275696A1 Piezoelectric element, piezoelectric actuator, piezoelectric pump, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 审中-公开
标题翻译：压电元件，压电致动器，压电泵，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
公开(公告)号：US20050275696A1
公开(公告)日：2005-12-15
申请号：US11136311
申请日：2005-05-24
申请人： Hiromu Miyazawa , Motohisa Noguchi , Eiju Hirai , Takeshi Kijima
发明人： Hiromu Miyazawa , Motohisa Noguchi , Eiju Hirai , Takeshi Kijima
IPC分类号： B41J2/16 , B41J2/04 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , C04B35/46 , C04B35/472 , C04B35/49 , C04B35/493 , F04B9/00 , F04B43/04 , F04B53/00 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/311 , H01L41/319 , H01L41/39 , H03B5/30 , H03H9/17 , H03H9/25
CPC分类号： H01L41/0815 , B41J2/14233 , B41J2002/14258 , F04B43/046 , H01L41/1875 , H01L41/318 , H01L41/319
摘要： A piezoelectric element in accordance with the present invention includes a base substrate, and a piezoelectric film formed above the base substrate, wherein the piezoelectric film is composed of a plurality of layers, at least two layers among the plurality of layers are composed of different relaxor materials, and the relaxor materials have a perovskite structure.
摘要翻译：根据本发明的压电元件包括基底基板和形成在基底基板上的压电膜，其中压电膜由多个层组成，多个层中的至少两个层由不同的弛豫元件组成材料，弛豫材料具有钙钛矿结构。

2. 发明申请

US20080157629A1 Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效
标题翻译：压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
公开(公告)号：US20080157629A1
公开(公告)日：2008-07-03
申请号：US12070737
申请日：2008-02-21
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： H01L41/187 , H01L41/08
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译：提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。

3. 发明授权

US07766464B2 Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效
标题翻译：压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
公开(公告)号：US07766464B2
公开(公告)日：2010-08-03
申请号：US12070737
申请日：2008-02-21
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： B41J2/45 , H01L41/00
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译：提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。

4. 发明授权

US07350904B2 Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效
标题翻译：压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
公开(公告)号：US07350904B2
公开(公告)日：2008-04-01
申请号：US11043029
申请日：2005-01-25
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： B41J2/45
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译：提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。

5. 发明申请

US20050185026A1 Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus 失效
标题翻译：压电元件，压电致动器，喷墨记录头，喷墨打印机，表面声波元件，频率滤波器，振荡器，电子电路，薄膜压电谐振器和电子设备
公开(公告)号：US20050185026A1
公开(公告)日：2005-08-25
申请号：US11043029
申请日：2005-01-25
申请人： Motohisa Noguchi , Eiju Hirai
发明人： Motohisa Noguchi , Eiju Hirai
IPC分类号： B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , B41J2/16 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/311 , H01L41/319 , H01L41/39 , H02N2/00 , H03B5/30 , H03H3/02 , H03H3/08 , H03H9/02 , H03H9/05 , H03H9/17 , H03H9/25 , H03H9/64 , B41J29/38
CPC分类号： B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2202/03 , C04B35/499 , C04B2235/3206 , C04B2235/3224 , C04B2235/3251 , C04B2235/3258 , C04B2235/3272 , C04B2235/3275 , C04B2235/3279 , C04B2235/3284 , C04B2235/3286 , C04B2235/768 , H01L41/1875 , H01L41/317 , H03H3/02 , H03H3/08 , H03H9/02015 , H03H9/02031 , H03H9/02574 , H03H9/0542 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric element is provided that is equipped with a seed layer formed on a base substrate and a piezoelectric film formed on the seed layer. The seed layer is formed of a perovskite type piezoelectric material preferentially oriented to pseudo cubic (100). The piezoelectric film is formed of a relaxor material that has a perovskite type rhombohedral structure, and is preferentially oriented to pseudo cubic (100).
摘要翻译：提供一种压电元件，其配备有形成在基底基板上的种子层和形成在种子层上的压电膜。种子层由优先取向为假立方（100）的钙钛矿型压电材料形成。压电膜由具有钙钛矿型菱方晶结构的弛豫材料形成，并优先取向为假立方（100）。

6. 发明授权

US08752938B2 Liquid ejecting head and liquid ejecting apparatus 有权
标题翻译：液体喷头和液体喷射装置
公开(公告)号：US08752938B2
公开(公告)日：2014-06-17
申请号：US12974800
申请日：2010-12-21
申请人： Hiromu Miyazawa , Hiroshi Ito , Jiro Kato , Eiju Hirai , Toshihiro Shimizu
发明人： Hiromu Miyazawa , Hiroshi Ito , Jiro Kato , Eiju Hirai , Toshihiro Shimizu
IPC分类号： B41J2/045
CPC分类号： B41J2/045 , B41J2/055 , B41J2/14233 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： A liquid ejecting head includes a flow channel forming substrate having pressure generation chambers communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chambers, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer, the first electrode includes a taper section of which a width is gradually decreased toward the boundary from the active section side.
摘要翻译：液体喷射头包括具有压力产生室的流路形成基板，该压力产生室与喷嘴开口连通并且沿着横向方向平行布置。压电元件设置在对应于压力产生室的流道形成基板的一个表面上，并且具有第一电极，设置在第一电极上的压电层和设置在压电层上的第二电极。在与压力产生室的排列方向相交的方向上，在作为实质的驱动部分的有效部分和不是压电层的实质驱动部分的非活动部分之间的边界中，第一电极包括锥形部分宽度从有效部分侧朝向边界逐渐减小。

7. 发明授权

US08632168B2 Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and methods for the manufacture thereof 有权
标题翻译：压电元件，液体喷射头，液体喷射装置及其制造方法
公开(公告)号：US08632168B2
公开(公告)日：2014-01-21
申请号：US13225301
申请日：2011-09-02
申请人： Chikara Kojima , Eiju Hirai
发明人： Chikara Kojima , Eiju Hirai
IPC分类号： H01L41/00 , H02N2/00 , B41J2/045
CPC分类号： H01L41/0973 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , H01L41/047 , H01L41/29
摘要： A piezoelectric element, a liquid ejecting head and a liquid ejecting apparatus that have improved reliability are provided. Methods for the manufacture thereof are also provided. A piezoelectric element includes a vibration plate having a recess in a first surface, a first electrode formed in the recess, a piezoelectric layer formed on the vibration plate and the first electrode, and a second electrode formed on the piezoelectric layer, wherein an upper surface of the first electrode forms a continuous flat surface together with the first surface.
摘要翻译：提供了具有改进的可靠性的压电元件，液体喷射头和液体喷射装置。还提供了制造方法。压电元件包括在第一表面具有凹陷的振动板，形成在凹部中的第一电极，形成在振动板上的压电层和第一电极，以及形成在压电层上的第二电极，的第一电极与第一表面一起形成连续的平坦表面。

8. 发明申请

US20120007929A1 LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS 有权
标题翻译：液体喷射和液体喷射装置
公开(公告)号：US20120007929A1
公开(公告)日：2012-01-12
申请号：US13178378
申请日：2011-07-07
申请人： Eiju Hirai , Hiroshi Ito , Toshihiro Shimizu , Jiro Kato
发明人： Eiju Hirai , Hiroshi Ito , Toshihiro Shimizu , Jiro Kato
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1626 , B41J2/1631 , B41J2/1646 , B41J2002/14241 , B41J2202/18
摘要： A liquid ejecting head comprising: a pressure chamber substrate where pressure chambers that communicates with nozzle holes are provided, and a piezoelectric element including a first conductive layer, a piezoelectric material layer, and a second conductive layer, wherein the piezoelectric element has an overlap area that overlaps the pressure chamber, the first conductive layer, the piezoelectric material layer, and the second conductive layer, wherein the second conductive layers overlap a plurality of the pressure chambers continuously, wherein, the first conductive layer is provided in each of the overlap areas and has an end portion area at one end side of the overlap area in the longitudinal direction, and wherein a width of the end portion area gets narrow in the lateral direction as the end portion area directs to the end of the longitudinal direction.
摘要翻译：一种液体喷射头，包括：压力室基板，其中设置有与喷嘴孔连通的压力室;以及压电元件，包括第一导电层，压电材料层和第二导电层，其中压电元件具有重叠区域其与所述压力室，所述第一导电层，所述压电材料层和所述第二导电层重叠，其中所述第二导电层连续地与多个所述压力室重叠，其中，所述第一导电层设置在每个所述重叠区域并且在纵向方向上的重叠区域的一端侧具有端部区域，并且其中当端部区域指向纵向方向的末端时，端部区域的宽度在横向方向上变窄。

9. 发明授权

US09233538B2 Piezoelectric device, piezoelectric actuator, droplet ejecting head, and droplet ejecting apparatus 有权
标题翻译：压电器件，压电致动器，液滴喷射头和液滴喷射装置
公开(公告)号：US09233538B2
公开(公告)日：2016-01-12
申请号：US12968890
申请日：2010-12-15
申请人： Eiji Osawa , Koji Ohashi , Eiju Hirai
发明人： Eiji Osawa , Koji Ohashi , Eiju Hirai
IPC分类号： B41J2/045 , B41J2/14 , H01L41/047 , H01L41/09
CPC分类号： B41J2/14233 , B41J2/14201 , H01L41/047 , H01L41/0973
摘要： A piezoelectric device including: a first electrode layer provided so as to overlie a substrate; a second electrode layer disposed so as to face the first electrode layer; and a piezoelectric layer disposed between the first electrode layer and the second electrode layer. The first electrode layer has a conductive layer and a barrier layer. The barrier layer is provided between the conductive layer and the piezoelectric layer so as to prevent the conductive layer from contacting the piezoelectric layer.
摘要翻译：一种压电装置，包括：设置成覆盖基板的第一电极层; 设置成面对第一电极层的第二电极层; 以及设置在第一电极层和第二电极层之间的压电层。第一电极层具有导电层和阻挡层。阻挡层设置在导电层和压电层之间，以防止导电层与压电层接触。

10. 发明授权

US08819903B2 Manufacturing method of a piezoelectric element and a liquid ejecting head 有权
标题翻译：压电元件和液体喷射头的制造方法
公开(公告)号：US08819903B2
公开(公告)日：2014-09-02
申请号：US13197464
申请日：2011-08-03
申请人： Toshihiro Shimizu , Jiro Kato , Eiju Hirai , Hiroshi Ito
发明人： Toshihiro Shimizu , Jiro Kato , Eiju Hirai , Hiroshi Ito
IPC分类号： H04R17/00 , H01L41/29 , B41J2/16 , H01L41/314 , B41J2/14
CPC分类号： H01L41/29 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2002/14491 , H01L41/314 , Y10T29/42 , Y10T29/49002 , Y10T29/49401
摘要： A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second conductive layer upon the piezoelectric layer; forming a third conductive layer upon the second conductive layer; forming a first portion, a second portion, and an opening portion provided between the first portion and the second portion by patterning the third conductive layer; forming a resist layer that covers the opening portion and covers the edges of the first portion and the second portion that face the opening portion side; and forming a first conductive portion and a second conductive portion configured from the first portion and the second portion, and forming a third conductive portion configured from the second conductive layer, by dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask.
摘要翻译：压电元件的制造方法包括：在基板上形成第一导电层; 在所述第一导电层上形成压电层; 在所述压电层上形成第二导电层; 在所述第二导电层上形成第三导电层; 通过对第三导电层进行构图而形成第一部分，第二部分和设置在第一部分和第二部分之间的开口部分; 形成覆盖所述开口部并且覆盖所述第一部分和面向所述开口部侧的所述第二部分的边缘的抗蚀剂层; 以及形成由所述第一部分和所述第二部分构成的第一导电部分和第二导电部分，以及通过使用所述第一部分干蚀刻所述第二导电层，形成由所述第二导电层构成的第三导电部分，所述第二部分，抗蚀剂层作为掩模。

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