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    • 6. 发明授权
    • Nonvolatile semiconductor device
    • 非易失性半导体器件
    • US06649969B2
    • 2003-11-18
    • US09908895
    • 2001-07-20
    • Naoki TsujiAkinobu TeramotoKazutoshi Wakao
    • Naoki TsujiAkinobu TeramotoKazutoshi Wakao
    • H01L29788
    • H01L27/11521H01L27/115
    • The invention provides a nonvolatile semiconductor device, or the like. According to the fabrication process of the present invention, silica glass containing boron or phosphorous is used as a material of high absorbency, which is treated in the vapor phase HF atmosphere and, therefore, selective etching of silica glass, only, of high absorbency becomes possible so that a void area can be formed beneath the fin of the floating gate. Accordingly, the absolute value of the parasitic capacitance between the floating gate and the substrate is decreased. In addition, the degree of the fluctuation of the parasitic capacitance due to the manufacturing process can be restricted to a low level. Accordingly, a nonvolatile semiconductor device of high performance can be gained without lowering the yield.
    • 本发明提供一种非易失性半导体器件等。 根据本发明的制造方法,使用含有硼或磷的二氧化硅玻璃作为吸收性高的材料,其在气相HF气氛中进行处理,因此,只有具有高吸收性的石英玻璃的选择性蚀刻成为 可能使浮动栅极的鳍下方形成空隙区域。 因此,浮置栅极和衬底之间的寄生电容的绝对值减小。 此外,由于制造过程而引起的寄生电容的波动程度可以被限制在低的水平。 因此,可以获得高性能的非易失性半导体器件而不降低产量。
    • 8. 发明授权
    • Magnetron
    • 磁控管
    • US06985042B2
    • 2006-01-10
    • US10658411
    • 2003-09-10
    • Hideyuki ObataNaoki Tsuji
    • Hideyuki ObataNaoki Tsuji
    • H03B9/10
    • H03B9/10H01J23/10H01J25/587
    • The object to the present invention is to provide a magnetron which can reduce spurious oscillation such as the π−1 mode which presents a problem particularly in magnetrons and can reduce spurious radiations without placing filters. The magnetron of the present invention includes an anode 1 formed by plural vanes 12 in such a manner that inner ends 12 are radially extended toward the center of the anode shell 11 from the inner wall of a cylindrical anode shell, and a cathode 2 provided at the center of the anode 1. The magnetron of the present invention further includes a pair of pole pieces 4 provided in such a manner that a magnetic field can be applied on the interaction space 2 where the inner ends 12a of the vanes 12 and the cathode 2 face with each other. At least one of the pair of pole pieces is provided in such a manner that in a range A at least ⅓ of the vane length L from the inner end 12a of the vane, the distance B between the side surfaces 12b of the vanes and the surface 4b adjacent the inner end 4a of the pole pieces 4 is within 0.015 λ wherein λ is the oscillation wavelength of the magnetron, and said vane length is a distance from said one end to said inner end.
    • 本发明的目的是提供一种可以减少诸如pi-1模式的寄生振荡的磁控管,其特别是在磁控管中存在问题,并且可以在不放置过滤器的情况下减少杂散辐射。 本发明的磁控管包括由多个叶片12形成的阳极1,内部端部12从圆柱形阳极壳体的内壁向阳极壳体11的中心径向延伸,阴极2设置在 阳极的中心1。 本发明的磁控管还包括一对磁极片4,其以这样一种方式设置,使得可以将磁场施加在相互作用空间2上,其中叶片12和阴极2的内端部12a相互面对。 一对极片中的至少一个以这样的方式设置,使得在从叶片的内端12a的叶片长度L的至少1/3的范围A中,侧面12b之间的距离B 叶片和邻近极片4的内端4a的表面4b在0.015λ之内,其中λ是磁控管的振荡波长,并且所述叶片长度是从所述一端到所述内端的距离。