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    • 6. 发明授权
    • Composition for film formation, method of film formation, and insulating film
    • 用于成膜的成分,成膜方法和绝缘膜
    • US06410151B1
    • 2002-06-25
    • US09670547
    • 2000-09-27
    • Takahiko KurosawaEiji HayashiSeo YoungsoonAtsushi ShiotaKinji Yamada
    • Takahiko KurosawaEiji HayashiSeo YoungsoonAtsushi ShiotaKinji Yamada
    • B32B904
    • H01L21/3122C09D183/04C09D183/14H01L21/02126H01L21/02216H01L21/02282Y10T428/31663C08L83/00
    • A polyorganosiloxane-based composition for film formation which gives a film having low dielectric constant and high modulus of elasticity and useful as an interlayer insulating film in semiconductor devices and the like. The composition for film formation comprises: (A) a product of hydrolysis and condensation obtained by hydrolyzing and condensing, in the presence of an alkali catalyst, at least one member selected from the group consisting of compounds (1) represented by RaSi (OR1)4−a (wherein R represents hydrogen, fluorine, or a monovalent organic group; R1 represents a monovalent organic group; and a Is an integer of 1 or 2), compounds (2) represented by Si(OR2)4 (wherein R2 represents a monovalent organic group), and compounds (3) represented by R3b(R4O)3−bSi—(R7)d—Si(OR5)3−cR6c [wherein R3 to R6 may be the same or different and each represent a monovalent organic group; b and c may be the same or different and each are an integer of 0 to 2; R7 represents oxygen, phenylene, or a group represented by —(CH2)n—, wherein n is an integer of 1 to 6; and d is 0 or 1]; and (B) a product of hydrolysis and condensation obtained by hydrolyzing and condensing, in the presence of a metal chelate compound catalyst, at least one member selected from the group consisting of the compounds (1), (2), and (3).
    • 一种用于成膜的聚有机硅氧烷基组合物,其具有低介电常数和高弹性模量的膜,并且可用作半导体器件等中的层间绝缘膜。用于成膜的组合物包括:(A)水解和 在碱催化剂存在下,通过水解和缩合得到的缩合物,所述缩合物选自由RaSi(OR 1)4-a(其中R表示氢,氟或一价有机物)表示的化合物(1)中的至少一种 基团; R1表示一价有机基团,Is表示1或2的整数),由Si(OR 2)4表示的化合物(2)(其中,R2表示一价有机基团),R3b( R4O)3-bSi-(R7)d-Si(OR5)3-cR6c [其中R3至R6可以相同或不同,各自表示一价有机基团; b和c可以相同或不同,各自为0〜2的整数; R7表示氧,亚苯基或由 - (CH2)n-表示的基团,其中n为1至6的整数; 和d为0或1]; 和(B)在金属螯合化合物催化剂存在下,通过水解和缩合得到的水解和缩合产物,选自化合物(1),(2)和(3)中的至少一种, 。