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    • 3. 发明授权
    • Photosensitive insulating resin composition, cured product thereof and electronic component comprising the same
    • 感光性绝缘树脂组合物及其固化物和包含该组合物的电子部件
    • US07714033B2
    • 2010-05-11
    • US11831258
    • 2007-07-31
    • Atsushi ItoHirofumi GotoHirofumi SasakiRyuichi Okuda
    • Atsushi ItoHirofumi GotoHirofumi SasakiRyuichi Okuda
    • G03F7/004C08G59/68C08G65/10
    • G03F7/0382G03F7/0045
    • The objective of the present invention is to provide a photosensitive insulating resin composition which is highly sensitive to g-line and h-line and enables to form a surface-protecting film, an interlayer insulation film and a planarized film that are excellent in various properties including resolution, electrical insulation property and thermal shock resistance, a cured product and an electronic component having the cured product. The present photosensitive insulating resin composition comprises an alkali-soluble resin having a phenolic hydroxyl group, a radiation sensitive acid generator comprising an s-triazine derivative represented by the following general formula (1), and a crosslinking agent. [In the formula (1), R is hydrogen atom, an alkyl group having 1 to 4 carbon atoms or an alkoxyl group having 1 to 4 carbon atoms, X is a halogen atom and Y is oxygen atom or sulfur atom.]
    • 本发明的目的是提供对g线和h线高度敏感的感光性绝缘树脂组合物,能够形成各种性能优异的表面保护膜,层间绝缘膜和平坦化膜 包括分辨率,电绝缘性和耐热冲击性,固化产物和具有固化产物的电子部件。 本发明的感光性绝缘性树脂组合物含有具有酚性羟基的碱溶性树脂,含有下述通式(1)表示的s-三嗪衍生物的辐射敏感性酸发生剂和交联剂。 [式(1)中,R为氢原子,碳原子数1〜4的烷基或碳原子数1〜4的烷氧基,X为卤素原子,Y为氧原子或硫原子。
    • 4. 发明申请
    • PHOTOSENSITIVE INSULATING RESIN COMPOSITION, CURED PRODUCT THEREOF AND ELECTRONIC COMPONENT COMPRISING THE SAME
    • 光敏绝缘树脂组合物,其固化产物和包含其的电子组分
    • US20080045621A1
    • 2008-02-21
    • US11831258
    • 2007-07-31
    • Atsushi ItoHirofumi GotoHirofumi SasakiRyuichi Okuda
    • Atsushi ItoHirofumi GotoHirofumi SasakiRyuichi Okuda
    • G03C1/73
    • G03F7/0382G03F7/0045
    • The objective of the present invention is to provide a photosensitive insulating resin composition which is highly sensitive to g-line and h-line and enables to form a surface-protecting film, an interlayer insulation film and a planarized film that are excellent in various properties including resolution, electrical insulation property and thermal shock resistance, a cured product and an electronic component having the cured product. The present photosensitive insulating resin composition comprises an alkali-soluble resin having a phenolic hydroxyl group, a radiation sensitive acid generator comprising an s-triazine derivative represented by the following general formula (1), and a crosslinking agent. [In the formula (1), R is hydrogen atom, an alkyl group having 1 to 4 carbon atoms or an alkoxyl group having 1 to 4 carbon atoms, X is a halogen atom and Y is oxygen atom or sulfur atom.]
    • 本发明的目的是提供对g线和h线高度敏感的感光性绝缘树脂组合物,能够形成各种性能优异的表面保护膜,层间绝缘膜和平坦化膜 包括分辨率,电绝缘性和耐热冲击性,固化产物和具有固化产物的电子部件。 本发明的感光性绝缘性树脂组合物含有具有酚性羟基的碱溶性树脂,含有下述通式(1)表示的s-三嗪衍生物的辐射敏感性酸发生剂和交联剂。 [式(1)中,R为氢原子,碳原子数1〜4的烷基或碳原子数1〜4的烷氧基,X为卤素原子,Y为氧原子或硫原子。
    • 7. 发明申请
    • PHOTOSENSITIVE INSULATION RESIN COMPOSITION AND CURED PRODUCT THEREOF
    • 光敏绝缘树脂组合物及其固化产品
    • US20090239080A1
    • 2009-09-24
    • US12439006
    • 2007-07-23
    • Atsushi ItoHirofumi GotoHirofumi Sasaki
    • Atsushi ItoHirofumi GotoHirofumi Sasaki
    • G03F7/004B32B27/06
    • G03F7/0385C08F212/08C08F212/14Y10T428/31504C08F220/10
    • An object of the present invention is to provide a cured product which is excellent in characteristics such as an electric insulation property, a heat impact resistance, an adhesive property and the like and to provide a photosensitive insulation resin composition from which the above cured product can be obtained and which is suited to uses such as an interlayer insulation film, a surface protecting layer and the like in semiconductor elements. The photosensitive insulation resin composition according to the present invention is characterized by comprising (A) a copolymer comprising 10 to 99 mole % of a constitutional unit (A1) represented by the following Formula (1) and 90 to 1 mole % of a constitutional unit (A2) represented by the following Formula (2) (provided that the total of all constitutional units constituting the above copolymer (A) is 100 mole %): (wherein R1 represents an alkyl group having 1 to 4 carbon atoms, an alkoxy group or an aryl group; R2 represents a hydrogen atom or methyl; m is an integer of 1 to 3, and n is an integer of 0 to 3; and m+n≦5; R3 represents an alkyl group having 1 to 4 carbon atoms, an alkoxy group or an aryl group; R4 represents a hydrogen atom or methyl; and k is an integer of 0 to 3), (B) a compound (B1) having an oxetanyl group, (C) a photosensitive acid generator, (D) a solvent and (F) cross-linked fine particles.
    • 本发明的目的是提供一种电绝缘性,耐热冲击性,粘合性等特性优异的固化物,并提供一种感光绝缘树脂组合物,其中上述固化产物可由 可以得到并适用于半导体元件中的层间绝缘膜,表面保护层等的用途。 本发明的感光性绝缘性树脂组合物的特征在于,包含(A)由下述通式(1)表示的结构单元(A1)和10〜99摩尔%的由下式(1)表示的结构单元(A1)和90〜1摩尔% (A2)(条件是构成上述共聚物(A)的全部构成单元的总量为100摩尔%):(其中,R1表示碳原子数1〜4的烷基,烷氧基 或芳基; R 2表示氢原子或甲基; m表示1〜3的整数,n表示0〜3的整数,m + n <= 5,R 3表示碳原子数1〜4的烷基 原子,烷氧基或芳基; R4表示氢原子或甲基; k表示0〜3的整数),(B)具有氧杂环丁烷基的化合物(B1),(C)感光性酸发生剂, (D)溶剂和(F)交联的细颗粒。