专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US5350920A Ion beam analyzing apparatus 失效
标题翻译：离子束分析仪
公开(公告)号：US5350920A
公开(公告)日：1994-09-27
申请号：US994953
申请日：1992-12-22
申请人： Hirofumi Fukuyama , Tatuya Noguchi , Kenichi Inoue , Kiyotaka Ishibashi , Shigeto Adachi
发明人： Hirofumi Fukuyama , Tatuya Noguchi , Kenichi Inoue , Kiyotaka Ishibashi , Shigeto Adachi
IPC分类号： G01N23/225 , G01Q90/00 , H01J37/04 , H01J37/09 , H01J37/22 , H01J37/252 , H01J37/256 , H01J37/28
CPC分类号： H01J37/263 , H01J37/22 , H01J37/256
摘要： An ion beam analyzing apparatus wherein a scan image displayed on display means and the profile of an ion beam can be made coincide with each other readily to assure a high operability. Slit members for X and Y directions of an objector collimator are provided for movement to vary the dimensions of slits defined thereby, and dimensions A and B of the slits in the X and Y directions are detected. Dimensions X' and Y' of a spot of an ion beam irradiated upon a specimen on a target are calculated by multiplying the dimensions A and B by reduction ratios fx and fy of quadruple pole magnetic lenses, respectively, and then the dimensions X' and Y' are multiplied by values obtained by division of conditions Cx and Cy of an image apparatus by current scanning widths Sx and Sy of deflecting electrodes to calculate enlarged beam spot diameters X" and Y" respectively. An image having the diameters X" and Y" is displayed on a cathode ray tube so that an operator can visually grasp it. Consequently, a scan image of the specimen and the profile of the ion beam can be made coincide readily with each other by manual operation of a manually operable mechanism of a beam position setter.
摘要翻译：一种离子束分析装置，其中可以使显示装置上显示的扫描图像和离子束的轮廓彼此一致，以确保高可操作性。提供了用于移动以使由此限定的狭缝的尺寸变化的反射器准直器的X和Y方向的狭缝构件，并且检测X和Y方向上狭缝的尺寸A和B. 通过将尺寸A和B分别乘以四极磁性透镜的减速比fx和fy分别计算照射到目标上的样本上的离子束点的尺寸X'和Y'，然后将尺寸X'和 Y'乘以通过用偏转电极的当前扫描宽度Sx和Sy分割图像装置的条件Cx和Cy分割获得的值，以分别计算扩大的光点直径X“和Y”。具有直径X“和Y”的图像显示在阴极射线管上，使得操作者可以在视觉上掌握它。因此，可以通过手动操作光束位置设定器的手动操作的机构，使样本的扫描图像和离子束的轮廓容易地彼此一致。

IPRDB

热门服务

关于我们

友情链接

联系方式