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    • 3. 发明授权
    • Method of forming deposited film and method of forming photovoltaic element
    • 形成沉积膜的方法和形成光伏元件的方法
    • US07700165B2
    • 2010-04-20
    • US11627066
    • 2007-01-25
    • Yasuyoshi TakaiMasafumi SanoKeishi Saito
    • Yasuyoshi TakaiMasafumi SanoKeishi Saito
    • H05H1/24
    • C23C16/24C23C16/45523C23C16/545Y02E10/545Y02E10/548
    • Provided is a deposited film containing microcrystalline silicon by plasma CVD, which includes changing at least one of conditions selected from a high frequency power density, a bias voltage with respect to an interelectrode distance, a bias current with respect to an electrode area, a high frequency power with respect to a source gas flow rate, a ratio of a diluting gas flow rate to a source gas flow rate, a substrate temperature, a pressure, and an interelectrode distance, between conditions for forming a deposited film of a microcrystalline region and conditions for forming a deposited film of an amorphous region; and forming a deposited film under conditions within a predetermined range in the vicinity of boundary conditions under which the crystal system of the deposited film substantially changes between a amorphous state and a microcrystalline state.
    • 提供了通过等离子体CVD包含微晶硅的沉积膜,其包括改变选自高频功率密度,相对于电极间距离的偏置电压,相对于电极面积的偏置电流,高电平 用于形成微晶区域的沉积膜的条件和相对于源气体流量的稀释气体流量的比率,稀释气体流量与源气体流量的比率,基板温度,压力和电极间距离 形成非晶区沉积膜的条件; 以及在沉积膜的晶体系统在非晶态和微晶态之间基本上变化的边界条件附近的预定范围内的条件下形成沉积膜。
    • 6. 发明授权
    • Stacked photovoltaic element
    • 堆叠光电元件
    • US06483021B2
    • 2002-11-19
    • US09257259
    • 1999-02-25
    • Keishi Saito
    • Keishi Saito
    • H01L3100
    • H01L31/03685H01L31/03687H01L31/076H01L31/206Y02E10/545Y02E10/548Y02P70/521
    • The present invention provides a stacked photovoltaic element formed by stacking, on a substrate, at least a pin junction constituent element having a microcrystalline semiconductor in an i-type semiconductor layer and a pin junction constituent element having an amorphous semiconductor in an i-type semiconductor layer, wherein a current is controlled by the pin junction constituent element having the microcrystalline semiconductor in the i-type semiconductor layer, thereby obtaining a stacked photovoltaic element with a high photoelectric conversion efficiency and a reduced variation in the photoelectric conversion efficiency for a long light irradiation time.
    • 本发明提供一种层叠的光电元件,其通过在i型半导体中在至少具有微晶半导体的i型半导体层中的至少一个pin结构成元件和具有非晶半导体的pin结构成元件 层,其中电流由在i型半导体层中具有微晶半导体的pin结构成元件控制,从而获得具有高光电转换效率的叠层光伏元件和对于长光的光电转换效率的变化减小 照射时间。