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    • 6. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US07683402B2
    • 2010-03-23
    • US11858173
    • 2007-09-20
    • Shinji FujiiKouichirou InoueNaoto HiguchiTaisei Suzuki
    • Shinji FujiiKouichirou InoueNaoto HiguchiTaisei Suzuki
    • H01L29/41H01L29/423
    • H01L27/088H01L27/0207H01L27/0705
    • Semiconductor devices whose current characteristics can be prevented from varying even if a phase shift mask is used for patterning gate electrodes of MISFETs, and a manufacturing method thereof are disclosed. According to one aspect of the present invention, there is provided a semiconductor device comprising a first transistor including a first gate electrode provided above a semiconductor substrate, and a first source and a first drain provided in the semiconductor substrate, a second transistor arranged to be adjacent to the first transistor, and including a second gate electrode provided above the semiconductor substrate in parallel with the first gate electrode, and a second source and a second drain provided in the semiconductor substrate, and a third gate electrode provided between the first transistor and the second transistor and in parallel with the first and second gate electrodes.
    • 公开了即使使用相移掩模来构图MISFET的栅电极的电流特性也能够防止其变化的半导体器件及其制造方法。 根据本发明的一个方面,提供了一种半导体器件,包括:第一晶体管,包括设置在半导体衬底上的第一栅电极,以及设置在半导体衬底中的第一源极和第一漏极;第二晶体管,被布置为 并且包括设置在所述半导体衬底上的与所述第一栅电极并联的第二栅电极,以及设置在所述半导体衬底中的第二源极和第二漏极,以及设置在所述第一晶体管和所述第一晶体管之间的第三栅电极, 第二晶体管并且与第一和第二栅电极并联。
    • 10. 发明申请
    • SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体器件及其制造方法
    • US20080073728A1
    • 2008-03-27
    • US11858173
    • 2007-09-20
    • Shinji FujiiKouichirou InoueNaoto HiguchiTaisei Suzuki
    • Shinji FujiiKouichirou InoueNaoto HiguchiTaisei Suzuki
    • H01L27/088H01L21/8234
    • H01L27/088H01L27/0207H01L27/0705
    • Semiconductor devices whose current characteristics can be prevented from varying even if a phase shift mask is used for patterning gate electrodes of MISFETs, and a manufacturing method thereof are disclosed. According to one aspect of the present invention, there is provided a semiconductor device comprising a first transistor including a first gate electrode provided above a semiconductor substrate, and a first source and a first drain provided in the semiconductor substrate, a second transistor arranged to be adjacent to the first transistor, and including a second gate electrode provided above the semiconductor substrate in parallel with the first gate electrode, and a second source and a second drain provided in the semiconductor substrate, and a third gate electrode provided between the first transistor and the second transistor and in parallel with the first and second gate electrodes.
    • 公开了即使使用相移掩模来构图MISFET的栅电极的电流特性也能够防止其变化的半导体器件及其制造方法。 根据本发明的一个方面,提供了一种半导体器件,包括:第一晶体管,包括设置在半导体衬底上的第一栅电极,以及设置在半导体衬底中的第一源极和第一漏极;第二晶体管,被布置为 并且包括设置在所述半导体衬底上的与所述第一栅电极并联的第二栅电极,以及设置在所述半导体衬底中的第二源极和第二漏极,以及设置在所述第一晶体管和所述第一晶体管之间的第三栅电极, 第二晶体管并且与第一和第二栅电极并联。