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1. 发明授权

US08497490B2 Terahertz wave generation device and method for generating terahertz wave 失效
标题翻译：太赫兹波发生装置及其产生太赫兹波的方法
公开(公告)号：US08497490B2
公开(公告)日：2013-07-30
申请号：US13060945
申请日：2009-08-24
申请人： Hideyuki Ohtake , Yuzuru Uehara , Koichiro Tanaka , Masaya Nagai
发明人： Hideyuki Ohtake , Yuzuru Uehara , Koichiro Tanaka , Masaya Nagai
IPC分类号： G21K5/00
CPC分类号： G02F1/39 , G02F2203/13
摘要： A terahertz wave generation device is provided with an ultra-short pulse laser light source (3) for generating ultra-short pulse laser light at a single repeating frequency and optical fibers (F1 to F5) for respective transmitting and projecting of the ultra-short pulse laser light to an LN crystal (15). Projection units (13) of the optical fibers (F1 to F5) are made parallel to irradiate the ultra-short pulse laser light (L) projected from the projection units (13), respectively, on terahertz transmission line (A) in the LN crystal (15) with sequential delays. The optical lengths of the transmission paths of the optical fibers (F1 to F5) are set longer as the transmission paths go closer to one side of the parallel direction of the projection units (13).
摘要翻译：太赫兹波发生装置设置有用于以单个重复频率产生超短脉冲激光的超短脉冲激光光源（3）和用于分别传输和投射超短波的光纤（F1至F5）脉冲激光到LN晶体（15）。使光纤（F1〜F5）的投影单元（13）平行地照射在投影单元（13）上投射的超短脉冲激光（L）在LN的太赫兹传输线（A）上晶体（15）具有连续延迟。随着传输路径更靠近投影单元（13）的平行方向的一侧，光纤（F1至F5）的传输路径的光学长度被设定得更长。

2. 发明申请

US20110147621A1 TERAHERTZ WAVE GENERATION DEVICE AND METHOD FOR GENERATING TERAHERTZ WAVE 失效
标题翻译： TERAHERTZ波形发生装置和用于产生TERAHERTZ波的方法
公开(公告)号：US20110147621A1
公开(公告)日：2011-06-23
申请号：US13060945
申请日：2009-08-24
申请人： Hideyuki Ohtake , Yuzuru Uehara , Koichiro Tanaka , Masaya Nagai
发明人： Hideyuki Ohtake , Yuzuru Uehara , Koichiro Tanaka , Masaya Nagai
IPC分类号： G01J3/10
CPC分类号： G02F1/39 , G02F2203/13
摘要： A terahertz wave generation device is provided with an ultra-short pulse laser light source (3) for generating ultra-short pulse laser light at a single repeating frequency and optical fibers (F1 to F5) for respective transmitting and projecting of the ultra-short pulse laser light to an LN crystal (15). Projection units (13) of the optical fibers (F1 to F5) are made parallel to irradiate the ultra-short pulse laser light (L) projected from the projection units (13), respectively, on terahertz transmission line (A) in the LN crystal (15) with sequential delays. The optical lengths of the transmission paths of the optical fibers (F1 to F5) are set longer as the transmission paths go closer to one side of the parallel direction of the projection units (13).
摘要翻译：太赫兹波发生装置设置有用于以单个重复频率产生超短脉冲激光的超短脉冲激光光源（3）和用于分别传输和投射超短波的光纤（F1至F5）脉冲激光到LN晶体（15）。使光纤（F1〜F5）的投影单元（13）平行地照射在投影单元（13）上投射的超短脉冲激光（L）在LN的太赫兹传输线（A）上晶体（15）具有连续延迟。随着传输路径更靠近投影单元（13）的平行方向的一侧，光纤（F1至F5）的传输路径的光学长度被设定得更长。

3. 发明授权

US07488940B2 Reflection type terahertz spectrometer and spectrometric method 有权
标题翻译：反射型太赫兹光谱仪和光谱法
公开(公告)号：US07488940B2
公开(公告)日：2009-02-10
申请号：US10558300
申请日：2004-05-24
申请人： Hideyuki Ohtake , Makoto Yoshida , Koichiro Tanaka , Masaya Nagai
发明人： Hideyuki Ohtake , Makoto Yoshida , Koichiro Tanaka , Masaya Nagai
IPC分类号： G01N21/31
CPC分类号： G01N21/3581 , G01N21/552
摘要： A reflection-type terahertz spectrometer includes an input optical path through which terahertz waves are propagated, an irradiating mechanism that irradiates a sample with terahertz waves propagated through the input optical path, an output optical path through which terahertz waves exiting from the irradiating mechanism are propagated, and a detector that receives and detects the terahertz waves propagated through the output optical path. The irradiating mechanism has at least one planar interface and a refractive index greater than that of a peripheral region contacting the planar interface and is disposed between the input optical path and the output optical path such that the terahertz waves propagated through the input optical path to be incident on the planar interface undergo total internal reflection at the planar interface, and the sample is disposed in the peripheral region contacting the planar interface of the irradiating mechanism. When the terahertz waves undergo the total internal reflection at the planar interface, the sample is irradiated with evanescent waves scattering from the planar interface to the peripheral region contacting the planar interface, so as to measure a spectrum.
摘要翻译：反射型太赫兹光谱仪包括传播太赫兹波的输入光路，照射通过输入光路传播的太赫兹波的样本的照射机构，从照射机构射出的太赫兹波被传播的输出光路以及接收并检测通过输出光路传播的太赫兹波的检测器。照射机构具有至少一个平面界面，并且折射率大于与平面界面接触的周边区域的折射率，并且设置在输入光路和输出光路之间，使得通过输入光路传播的太赫兹波为平面界面上的入射在平面界面处经历全内反射，并且样品设置在与照射机构的平面界面接触的周边区域中。当太赫兹波在平面界面处经历全内反射时，将样品从平面界面散射到与平面界面接触的外围区域的ev逝波照射，以便测量光谱。

4. 发明申请

US20050179905A1 Multi-channeled measuring method and apparatus for measuring spectrum of terahertz pulse 有权
标题翻译：用于测量太赫兹脉冲频谱的多通道测量方法和装置
公开(公告)号：US20050179905A1
公开(公告)日：2005-08-18
申请号：US10926351
申请日：2004-08-26
申请人： Hideyuki Ohtake , Koichiro Tanaka , Masaya Nagai , Junpei Yamashita , Kumiko Yamashita
发明人： Hideyuki Ohtake , Koichiro Tanaka , Masaya Nagai , Junpei Yamashita , Kumiko Yamashita
IPC分类号： G01J3/28 , G01J3/12 , G01J3/433 , G01J11/00 , G01N21/35 , G01N21/3586 , G01B9/02
CPC分类号： G01J3/12 , G01J3/4338 , G01J11/00 , G01N21/3581 , G01N21/3586
摘要： A multi-channeled measuring method for measuring a spectrum of a terahertz pulse includes the steps of a terahertz pulse generating step for generating a terahertz pulse by using an ultrashort pulsed pumping light, a white light generating step for generating a white light pulse by using an ultrashort pulsed probe light, a stretching step for stretching and chirping the white light pulse generated at the white light pulse generating step, an electro-optic modulating step for modulating the chirped white light pulse stretched and chirped at the stretching step in such a manner that the terahertz pulse and the chirped white light pulse irradiate into an electro-optic crystal synchronously, so that the chirped white light pulse is modulated by an electric field signal induced at the electro-optic crystal irradiated by the terahertz pulse, a multi-channeled spectral detecting step for detecting a spectrum of chirped white light pulse modulated at the electro-optic modulating step by a multi-channeled detector, an electric field signal analyzing step for analyzing an electric field of the terahertz pulse irradiated to the electro-optic crystal from the spectrum of the chirped white light pulse detected by the multi-channeled spectrum detecting step, and a Fourier transforming step for transforming the electric field signal analyzed by the electric field signal analyzing step into a frequency spectrum of the terahertz pulse.
摘要翻译：用于测量太赫兹脉冲的频谱的多通道测量方法包括用于通过使用超短脉冲泵浦光产生太赫兹脉冲的太赫兹脉冲产生步骤的步骤，用于通过使用超短脉冲泵浦光产生白光脉冲的白光产生步骤超短脉冲探测光，用于拉伸和啁啾在白光脉冲产生步骤产生的白光脉冲的拉伸步骤;电光调制步骤，用于调制在拉伸步骤中拉伸和啁啾的啁啾的白光脉冲，太赫脉冲和啁啾的白光脉冲同步地照射到电光晶体中，使得啁啾的白光脉冲被在由太赫兹脉冲照射的电光晶体处感应的电场信号调制，多通道光谱检测步骤，用于检测在电光调制步骤调制的啁啾白光脉冲的频谱 i通道检测器，用于从由多通道频谱检测步骤检测的啁啾的白光脉冲的频谱分析照射到电光晶体的太赫兹脉冲的电场的电场信号分析步骤，以及傅立叶变换用于将由电场信号分析步骤分析的电场信号变换为太赫兹脉冲的频谱的步骤。

5. 发明授权

US07221451B2 Multi-channeled measuring method and apparatus for measuring spectrum of terahertz pulse 有权
标题翻译：用于测量太赫兹脉冲频谱的多通道测量方法和装置
公开(公告)号：US07221451B2
公开(公告)日：2007-05-22
申请号：US10926351
申请日：2004-08-26
申请人： Hideyuki Ohtake , Koichiro Tanaka , Masaya Nagai , Junpei Yamashita , Kumiko Yamashita
发明人： Hideyuki Ohtake , Koichiro Tanaka , Masaya Nagai , Junpei Yamashita , Kumiko Yamashita
IPC分类号： G01J3/28
CPC分类号： G01J3/12 , G01J3/4338 , G01J11/00 , G01N21/3581 , G01N21/3586
摘要： A method for measuring a spectrum of a terahertz pulse includes generating a terahertz pulse using an ultrashort pulsed pumping light, generating a white light pulse using an ultrashort pulsed probe light, stretching and chirping the white light pulse modulating the chirped white light pulse such that the terahertz pulse and the chirped white light pulse irradiate into an electro-optic crystal synchronously, so that the chirped white light pulse is modulated by an electric field signal induced at the electro-optic crystal irradiated by the terahertz pulse, detecting a spectrum of chirped white light pulse modulated at the electro-optic modulating step by a multi-channeled detector, analyzing an electric field of the teraherz pulse irradiated to the electro-optic crystal from the spectrum of the chirped white light pulse detected by the multi-channeled spectrum detecting step, and transforming the analyzed electric field signal into a frequency spectrum of the terahertz pulse.
摘要翻译：用于测量太赫兹脉冲的频谱的方法包括使用超短脉冲泵浦光产生太赫脉冲，使用超短脉冲探测光产生白光脉冲，拉伸和啁啾调制啁啾的白光脉冲的白光脉冲，使得啁啾脉冲和啁啾的白光脉冲同步地照射到电光晶体中，使得啁啾的白光脉冲被在由太赫兹脉冲辐射的电光晶体处感应的电场信号调制，检测啁啾的白色光谱通过多通道检测器在电光调制步骤中调制光脉冲，从由多通道频谱检测步骤检测的啁啾白光脉冲的频谱分析辐射到电光晶体的太赫兹脉冲的电场并将分析的电场信号变换为太赫兹脉冲的频谱。

6. 发明申请

US20060231762A1 Reflection type terahertz spectrometer and spectrometric method 有权
公开(公告)号：US20060231762A1
公开(公告)日：2006-10-19
申请号：US10558300
申请日：2004-05-24
申请人： Hideyuki Ohtake , Makoto Yoshida , Koichiro Tanaka , Masaya Nagai
发明人： Hideyuki Ohtake , Makoto Yoshida , Koichiro Tanaka , Masaya Nagai
IPC分类号： G01J5/02
CPC分类号： G01N21/3581 , G01N21/552
摘要： A reflection-type terahertz spectrometer includes an input optical path through which terahertz waves are propagated, an irradiating mechanism that irradiates a sample with terahertz waves propagated through the input optical path, an output optical path through which terahertz waves exiting from the irradiating mechanism are propagated, and a detector that receives and detects the terahertz waves propagated through the output optical path. The irradiating mechanism has at least one planar interface and a refractive index greater than that of a peripheral region contacting the planar interface and is disposed between the input optical path and the output optical path such that the terahertz waves propagated through the input optical path to be incident on the planar interface undergo total internal reflection at the planar interface, and the sample is disposed in the peripheral region contacting the planar interface of the irradiating mechanism. When the terahertz waves undergo the total internal reflection at the planar interface, the sample is irradiated with evanescent waves scattering from the planar interface to the peripheral region contacting the planar interface, so as to measure a spectrum.

7. 发明授权

US07177071B2 Semiconductor crystal for generating terahertz waves, terahertz wave-generator incorporating the crystal, semiconductor crystal for detecting terahertz waves, and terahertz waves detector incorporating the crystal 有权
标题翻译：用于产生太赫兹波的半导体晶体，结合晶体的太赫兹波发生器，用于检测太赫兹波的半导体晶体和结合晶体的太赫兹波检测器
公开(公告)号：US07177071B2
公开(公告)日：2007-02-13
申请号：US11132411
申请日：2005-05-19
申请人： Hideyuki Ohtake , Toshiharu Sugiura , Toshiaki Bessho , Koichiro Tanaka , Masaya Nagai , Yutaka Kadoya
发明人： Hideyuki Ohtake , Toshiharu Sugiura , Toshiaki Bessho , Koichiro Tanaka , Masaya Nagai , Yutaka Kadoya
IPC分类号： G02F1/355 , H01S5/323
CPC分类号： G02F1/353 , B82Y20/00 , G02F1/3556 , G02F2001/3548 , G02F2203/13
摘要： A terahertz wave-generating semiconductor crystal includes a zincblende-type III-V compound semiconductor crystal that generates terahertz wave pulses upon application of an ultrashort light pulse in the optical communication band serving as a pump beam.
摘要翻译：太赫兹波生成半导体晶体包括在作为泵浦光束的光通信带中施加超短光脉冲时产生太赫兹波脉冲的闪锌e III型化合物半导体晶体。

8. 发明申请

US20050258368A1 Semiconductor crystal for generating terahertz waves, terahertz wave-generator incorporating the crystal, semiconductor crystal for detecting terahertz waves, and terahertz waves detector incorporating the crystal 有权
标题翻译：用于产生太赫兹波的半导体晶体，结合晶体的太赫兹波发生器，用于检测太赫兹波的半导体晶体和结合晶体的太赫兹波检测器
公开(公告)号：US20050258368A1
公开(公告)日：2005-11-24
申请号：US11132411
申请日：2005-05-19
申请人： Hideyuki Ohtake , Toshiharu Sugiura , Toshiaki Bessho , Koichiro Tanaka , Masaya Nagai , Yutaka Kadoya
发明人： Hideyuki Ohtake , Toshiharu Sugiura , Toshiaki Bessho , Koichiro Tanaka , Masaya Nagai , Yutaka Kadoya
IPC分类号： H01S3/00 , G01J5/10 , G02F1/35 , G02F1/355 , H01L31/0304 , H01S1/02 , G01J5/00
CPC分类号： G02F1/353 , B82Y20/00 , G02F1/3556 , G02F2001/3548 , G02F2203/13
摘要： A terahertz wave-generating semiconductor crystal includes a zincblende-type III-V compound semiconductor crystal that generates terahertz wave pulses upon application of an ultrashort light pulse in the optical communication band serving as a pump beam.
摘要翻译：太赫兹波生成半导体晶体包括在作为泵浦光束的光通信带中施加超短光脉冲时产生太赫兹波脉冲的闪锌e III型化合物半导体晶体。

9. 发明授权

US08513608B2 Coating film inspection apparatus and inspection method 有权
标题翻译：涂膜检验仪器及检验方法
公开(公告)号：US08513608B2
公开(公告)日：2013-08-20
申请号：US13581123
申请日：2011-02-21
申请人： Hideyuki Ohtake , Yuzuru Uehara , Jun Takayanagi
发明人： Hideyuki Ohtake , Yuzuru Uehara , Jun Takayanagi
IPC分类号： G01J5/02
CPC分类号： G01B11/0633 , G01N21/3581 , G01N21/8422 , G01N2021/8427
摘要： The coating film inspection apparatus according to one embodiment of the present invention comprises a terahertz-wave generator that generates a terahertz-wave; an irradiation optical system that irradiates, with the terahertz-wave, a sample with a film formed thereon; a terahertz-wave detector that detects a terahertz-wave reflected at the sample; and a control unit that shows an electric field intensity of the detected terahertz-wave in wave form data on a time axis to detect a plurality of peaks from the wave form data, and also calculates film thickness on the basis of time difference between peaks.
摘要翻译：根据本发明的一个实施例的涂膜检查装置包括产生太赫兹波的太赫兹波发生器; 照射光学系统，其与太赫兹波一起照射具有在其上形成的膜的样品; 检测在样品反射的太赫兹波的太赫波检测器; 以及控制单元，其显示在时间轴上的波形数据中检测到的太赫兹波的电场强度，以从波形数据中检测多个峰值，并且还基于峰值之间的时间差计算膜厚度。

10. 发明申请

US20120326037A1 COATING FILM INSPECTION APPARATUS AND INSPECTION METHOD 有权
标题翻译：涂膜检查装置和检查方法
公开(公告)号：US20120326037A1
公开(公告)日：2012-12-27
申请号：US13581123
申请日：2011-02-21
申请人： Hideyuki Ohtake , Yuzuru Uehara , Jun Takayanagi
发明人： Hideyuki Ohtake , Yuzuru Uehara , Jun Takayanagi
IPC分类号： G01B11/06
CPC分类号： G01B11/0633 , G01N21/3581 , G01N21/8422 , G01N2021/8427
摘要： The coating film inspection apparatus according to one embodiment of the present invention comprises a terahertz-wave generator that generates a terahertz-wave; an irradiation optical system that irradiates, with the terahertz-wave, a sample with a film formed thereon; a terahertz-wave detector that detects a terahertz-wave reflected at the sample; and a control unit that shows an electric field intensity of the detected terahertz-wave in wave form data on a time axis to detect a plurality of peaks from the wave form data, and also calculates film thickness on the basis of time difference between peaks.
摘要翻译：根据本发明的一个实施例的涂膜检查装置包括产生太赫兹波的太赫兹波发生器; 照射光学系统，其与太赫兹波一起照射具有在其上形成的膜的样品; 检测在样品反射的太赫兹波的太赫波检测器; 以及控制单元，其显示在时间轴上的波形数据中检测到的太赫兹波的电场强度，以从波形数据中检测多个峰值，并且还基于峰值之间的时间差计算膜厚度。

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