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1. 发明授权

US06353201B1 Discharge electrode, RF plasma generation apparatus using the same, and power supply method 有权
标题翻译：放电电极，使用其的RF等离子体发生装置以及供电方法
公开(公告)号：US06353201B1
公开(公告)日：2002-03-05
申请号：US09614134
申请日：2000-07-11
申请人： Hideo Yamakoshi , Kengou Yamaguchi , Masayoshi Murata , Yoshiaki Takeuchi , Yoshikazu Nawata , Koji Satake , Satoshi Kokaji , Shoji Morita , Masatoshi Hisatome , Tatsuji Horioka , Hiroshi Mashima
发明人： Hideo Yamakoshi , Kengou Yamaguchi , Masayoshi Murata , Yoshiaki Takeuchi , Yoshikazu Nawata , Koji Satake , Satoshi Kokaji , Shoji Morita , Masatoshi Hisatome , Tatsuji Horioka , Hiroshi Mashima
IPC分类号： B23K1000
CPC分类号： H01J37/32082 , H01J37/32532 , H05H1/46
摘要： A plurality of electrode bars are arranged in parallel with each other, and side electrode bars are connected to the corresponding opposite ends of the electrode bars, thereby forming a ladder-like RF discharge electrode. Power supply points are arranged axisymmetrically with respect to a reference line, which is a bisector which bisects one side of the RF discharge electrode, while being spaced a predetermined distance from the reference line, thereby suppressing voltage distribution on the ladder electrode, which has an effect on uniformity of discharge distribution, to a sufficiently low level of nonuniformity. Thus, uniform distribution of film deposition rate can be obtained, thereby enabling uniform deposition even in large-area applications.
摘要翻译：多个电极棒彼此平行地布置，并且侧电极棒连接到电极棒的相应的相对端，从而形成梯状RF放电电极。电源点相对于参考线轴对称地布置，该参考线是将RF放电电极的一侧平分的等分线，同时与基准线隔开预定距离，由此抑制梯形电极上的电压分布，其具有对均匀性的影响，达到足够低的不均匀度。因此，可以获得膜沉积速率的均匀分布，从而即使在大面积应用中也能均匀沉积。

2. 发明授权

US09013170B2 Lightning current detection sensor 有权
标题翻译：闪电电流检测传感器
公开(公告)号：US09013170B2
公开(公告)日：2015-04-21
申请号：US13358209
申请日：2012-01-25
申请人： Kengou Yamaguchi , Tatsufumi Aoi , Takashi Okai
发明人： Kengou Yamaguchi , Tatsufumi Aoi , Takashi Okai
IPC分类号： G01R31/02 , G01R29/08 , B64D45/02
CPC分类号： G01R29/0842 , B64D45/02
摘要： The present invention has an object to provide a lightning current detection sensor that has a configuration resistant to high voltage and high current in a lightning strike and has high sensitivity and high resolution. In a lightning current detection sensor 10, an insulation-coated wire 22 wound in multiple turns is collectively covered with a base tape 21 and a cover tape 23. Thus, even when the insulation-coated wire 22 is wound in multiple turns to increase sensitivity, a minute area can be detected to increase resolution. Also, with the base tape 21 and the cover tape 23 covering the insulation-coated wire 22 and also a shield portion 12 made of an insulating material and a gap 40 formed between the shield portion 12 and the coil portion 20, a sufficient shielding property is ensured and detection with high accuracy can be performed against high current and high voltage without capacitative coupling.
摘要翻译：本发明的目的是提供一种雷电流检测传感器，其具有在雷击中耐高压和高电流的结构，并且具有高灵敏度和高分辨率。在雷电流检测传感器10中，以多匝卷绕的绝缘被覆线22共同地被基带21和盖带23覆盖。因此，即使绝缘覆盖线22以多匝缠绕以增加灵敏度，可以检测到一个微小的区域来提高分辨率。此外，由于基带21和覆盖绝缘被覆线22的覆盖带23以及由绝缘材料制成的屏蔽部12和形成在屏蔽部12和线圈部20之间的间隙40，所以具有足够的屏蔽性并且可以在没有电容耦合的情况下对高电流和高电压进行高精度的检测。

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