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    • 6. 发明授权
    • Multichip press-contact type semiconductor device
    • 多芯片压接式半导体器件
    • US5866944A
    • 1999-02-02
    • US665980
    • 1996-06-19
    • Michiaki HiyoshiTakashi FujiwaraHideo Matsuda
    • Michiaki HiyoshiTakashi FujiwaraHideo Matsuda
    • H01L29/74H01L23/051H01L23/48H01L25/04H01L25/07H01L25/18H01L23/16
    • H01L23/051H01L24/72H01L2924/01004H01L2924/01013H01L2924/01029H01L2924/01033H01L2924/01042H01L2924/01047H01L2924/01082H01L2924/1305H01L2924/13055
    • In the present invention, by virtue of heat buffer plates respectively located on the major surfaces of IGBT chips and FRD chips arranged in a single plane, the total thickness of each chip and a corresponding one of the heat can be set to a substantially predetermined value. A thickness-correcting member having elongated projections corresponding to the chips is provided on those surfaces of the heat buffer plates which is remote from the chips. A heat buffer disk plate is provided on those surfaces of the chips which are opposite to the major surfaces thereof. The thickness-correcting member, the heat buffer plates and the IGBT and FRD chips are held and simultaneously pressed between an emitter press-contact electrode plate and a collector press-contact electrode plate. Before using the device, a force of press, which is higher than that applied at the time of using the device and can plastically deform the thickness-correcting member, is applied to the emitter press-contact electrode plate and the collector press-contact electrode plate, thereby correcting variations in total thickness of each semiconductor chip and a corresponding one of the heat buffer plates.
    • 在本发明中,由于分别位于布置在单个平面中的IGBT芯片和FRD芯片的主表面上的热缓冲板,每个芯片的总厚度和相应的一个热量可以被设置为基本上预定的值 。 具有与芯片相对应的细长突起的厚度校正构件设置在远离芯片的热缓冲板的表面上。 在与其主表面相对的芯片的这些表面上设置有缓冲盘片。 厚度校正构件,热缓冲板和IGBT和FRD芯片被保持并同时按压在发射极压接电极板和集电体压接电极板之间。 在使用该装置之前,将加压力高于在使用该装置时施加的压力并使厚度校正构件塑性变形的压力施加到发射体压接电极板和集电体压接电极 从而校正每个半导体芯片和对应的一个热缓冲板的总厚度的变化。