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    • 1. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20050133794A1
    • 2005-06-23
    • US11012205
    • 2004-12-16
    • Tetsuya HayashiMasakatsu HoshiSaichirou KanekoHideaki Tanaka
    • Tetsuya HayashiMasakatsu HoshiSaichirou KanekoHideaki Tanaka
    • H01L21/28H01L21/336H01L27/04H01L29/12H01L29/15H01L29/24H01L29/267H01L29/47H01L29/78
    • H01L29/7806H01L29/1608H01L29/165H01L29/47H01L29/66068H01L29/7802H01L29/7803H01L29/7813H01L29/7817H01L29/782H01L29/7828
    • A semiconductor device includes a heterojunction semiconductor region 9, which forms a heterojunction with a drain region 2. The heterojunction semiconductor region 9 is connected to a source electrode 7, and has a band gap different from a band gap of a semiconductor substrate constituting the drain region 2. It is possible to set the size of an energy barrier against conduction electrons, which is formed between the drain region 2 and the heterojunction semiconductor region 9, into a desired size by changing the conductivity type or the impurity density of the heterojunction semiconductor region 9. This is a characteristic not found in a Schottky junction, in which the size of the energy barrier is inherently determined by a work function of a metal material. It is easy to achieve optimal design of a passive element in response to a withstand voltage system of a MOSFET as a switching element. It is also possible to suppress diffusion potential in a reverse conduction mode and to improve a degree of integration per unit area. As a result, it is possible to reduce the size of elements and to simplify manufacturing processes thereof.
    • 半导体器件包括异质结半导体区域9,其与漏极区域2形成异质结。异质结半导体区域9连接到源电极7,并且具有与构成漏极的半导体衬底的带隙不同的带隙 可以通过改变异质结半导体的导电类型或杂质浓度来将能量势垒的大小与形成在漏极区域2和异质结半导体区域9之间的传导电子设置成所需的尺寸 这是肖特基结中没有发现的特征,其中能量势垒的尺寸固有地由金属材料的功函数决定。 响应MOSFET的耐压系统作为开关元件,很容易实现无源元件的最佳设计。 也可以抑制反向导通模式的扩散电位,提高单位面积的积分度。 结果,可以减小元件的尺寸并简化其制造工艺。