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    • 2. 发明申请
    • Evaporation system
    • 蒸发系统
    • US20100242842A1
    • 2010-09-30
    • US12656886
    • 2010-02-18
    • Hideaki TakeuchiJunji Nakada
    • Hideaki TakeuchiJunji Nakada
    • C23C16/00C23C14/34
    • C23C14/562
    • An evaporation system for forming evaporation films on a substrate film, includes: a first drive portion which is driven to rotate to thereby feed out the substrate film; a second drive portion which is driven to rotate to thereby take up the substrate film conveyed to the second drive portion; film-forming rollers which are provided on a conveyance path of the substrate film conveyed between the first drive portion and the second drive portion and which support one surface of the substrate film onto circumferential surfaces of the film-forming rollers; evaporation portions which form the evaporation films on a surface of the substrate film opposite to the surface supported by the film-forming rollers; and a third drive portion as defined herein.
    • 一种用于在基底膜上形成蒸发膜的蒸发系统,包括:第一驱动部分,被驱动旋转从而送出基底膜; 第二驱动部,被驱动旋转,从而卷取输送到第二驱动部的基板; 成膜辊设置在在第一驱动部和第二驱动部之间输送的基板膜的输送路径上,并且将基板膜的一个表面支撑在成膜辊的圆周面上; 在与由成膜辊支撑的表面相反的基板膜的表面上形成蒸发膜的蒸发部分; 以及如本文所定义的第三驱动部分。
    • 5. 发明授权
    • Sputtering apparatus
    • 溅射装置
    • US4956070A
    • 1990-09-11
    • US338078
    • 1989-04-14
    • Junji NakadaHideaki Takeuchi
    • Junji NakadaHideaki Takeuchi
    • C23C14/36C23C14/35H01J37/34
    • C23C14/352H01J37/3405
    • A plural-cathode sputtering apparatus capable of producing mixed thin films having a period of stratification as small as 10 .ANG. without putting an undue load on the power supplies. Two different types of targets are provided on a cathode side, and a substrate onto which sputtering is performed is provided on the anode side. Magnetic field generators produce magnetic fields substantially perpendicularly intersecting the electric fields generated between the plate and the targets near and front sides of the targets. The magnetic field generators are each composed of main magnets and electromagnets, which may be combined with the main magnets. Electrical currents are produced for exciting the electromagnets which are controlled in such a manner as to change the magnetic intensity of the magnetic fields and to thereby regulate the sputtering discharge.
    • 一种多阴极溅射装置,其能够制造具有小于10安培的分层周期的混合薄膜,而不会对电源造成不适当的负担。 在阴极侧设置两种不同的靶,在阳极侧设置溅射的基板。 磁场发生器产生与目标附近和前侧之间的板和目标之间产生的电场大致垂直相交的磁场。 磁场发生器各自由主磁体和电磁体组成,其可与主磁体组合。 产生用于激励电磁体的电流,这些电磁体以改变磁场的磁强度的方式被控制,从而调节溅射放电。
    • 7. 发明授权
    • Thermal head lapping apparatus
    • 热头研磨机
    • US06688951B2
    • 2004-02-10
    • US09534555
    • 2000-03-27
    • Makoto KashiwayaJunji Nakada
    • Makoto KashiwayaJunji Nakada
    • B24B700
    • B41J2/3353B24B19/26B24B21/004B24B27/0023
    • A thermal head lapping apparatus includes a pallet for holding at least one thermal head, a transport device for transporting the thermal head held on the pallet successively to a specified processing position, and a lapping device for forcing a lapping material being moved onto the thermal head that has been transported to said processing position. As a result, the apparatus is capable of advantageously performing lapping treatment with a good efficiency on surfaces to be coated with protective layers or the formed protective layers in a process of fabricating a thermal head, thereby improving the production efficiency of the thermal head and fabricating with a good productivity the suitably lapped thermal head of high quality that ensures high quality image recording.
    • 一种热头研磨装置,包括用于保持至少一个热敏头的托盘,用于将保持在托盘上的热敏头连续运送到指定加工位置的运送装置,以及用于迫使研磨材料移动到热敏头上的研磨装置 已经被运送到所述处理位置。 结果,该装置能够在制造热敏头的过程中有利地在保护层或形成的保护层的表面上以良好的效率执行研磨处理,从而提高热敏头的生产效率和制造 具有良好的生产效率,适合搭配高品质的热敏头,确保高质量的图像记录。
    • 9. 发明申请
    • Optical component and method of manufacturing the same
    • 光学部件及其制造方法
    • US20050064642A1
    • 2005-03-24
    • US10981601
    • 2004-11-05
    • Jun FujinawaJunji Nakada
    • Jun FujinawaJunji Nakada
    • G02B1/11H01L21/8238H01L31/0232H01L31/0336
    • G02B1/115G02B1/113
    • The optical component includes a substrate made of a resin material, a silicon oxide film formed on a surface of the substrate, and a multilayer light reflection preventing film formed on the silicon oxide film, and having at least one layer of a low-refractive-index material and at least one layer of a high-refractive-index material being alternately formed. The silicon oxide film is thick and/or formed by introducing oxygen during film forming by vacuum deposition so that a preset elasticity is imparted to the silicon oxide film. Other optical component includes a substrate made of a resin material and a plurality of films formed by vacuum deposition, and directions of internal stresses in each adjacent pair of the plurality of films are different from each other or a thickness of an impurity existing on a surface of the substrate is 0.2 nm or less. The plurality of films are formed by performing melting of film forming materials other than a film forming material for a film formed on the surface of the substrate after the film is formed on the surface of the substrate.
    • 光学部件包括由树脂材料制成的基板,形成在基板的表面上的氧化硅膜和形成在氧化硅膜上的多层光反射防止膜,并且具有至少一层低折射率膜, 折射率材料和交替形成的至少一层高折射率材料层。 氧化硅膜通过在成膜期间通过真空沉积引入氧来形成和/或形成,从而赋予氧化硅膜预定的弹性。 其他光学部件包括由树脂材料制成的基板和通过真空沉积形成的多个膜,并且每个相邻的多个膜中的内部应力的方向彼此不同或存在于表面上的杂质的厚度 的基板为0.2nm以下。 在膜形成在基板的表面上之后,通过对形成在基板表面上的膜的成膜材料以外的成膜材料进行熔融而形成多个膜。