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1. 发明申请

US20120249983A1 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 有权
标题翻译： LITHOGRAPHIC装置和装置制造方法
公开(公告)号：US20120249983A1
公开(公告)日：2012-10-04
申请号：US13430159
申请日：2012-03-26
申请人： Herman Vogel , Jeroen Gerard Gosen , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
发明人： Herman Vogel , Jeroen Gerard Gosen , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
IPC分类号： G03B27/42
CPC分类号： G03F7/70908 , G03F7/70866
摘要： An apparatus, in an embodiment, having a patterning device support including a first planar element having a first flow-restricting surface; a second planar element including a second flow-restricting surface facing the first flow-restricting surface; a support driver to linearly move the support along a certain direction relative to the second planar element, wherein the first and/or second flow-restricting surface has one or more projections and/or recesses between the first and second flow-restricting surfaces, and wherein the projection and/or recess on the first and/or second flow-restricting surface is arranged to provide a flow resistance, per unit width of the first and/or second flow-restricting surface perpendicular to the flow, that is lower against flow that is parallel to the certain direction than against flow that is perpendicular to the certain direction. The flow-restricting surfaces may direct gas flow onto a driver part that generates heat.
摘要翻译：在一个实施例中，具有图案形成装置支撑件的装置包括具有第一流动限制表面的第一平面元件; 第二平面元件，包括面向第一流动限制表面的第二流动限制表面; 支撑驱动器，用于沿着相对于第二平面元件的某个方向线性地移动支撑件，其中第一和/或第二流动限制表面在第一和第二流动限制表面之间具有一个或多个突起和/或凹部，以及其中所述第一和/或第二限流表面上的所述突起和/或凹部被布置成提供与所述流动垂直的所述第一和/或第二流动限制表面的每单位宽度的流动阻力，其平行于一定方向，而不是垂直于某一方向的流动。流动限制表面可以将气流引导到产生热量的驱动器部件上。

2. 发明授权

US09081311B2 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US09081311B2
公开(公告)日：2015-07-14
申请号：US13430159
申请日：2012-03-26
申请人： Herman Vogel , Jeroen Gerard Gosen , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
发明人： Herman Vogel , Jeroen Gerard Gosen , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
IPC分类号： G03B27/62 , G03B27/64 , G03B27/52 , G03F7/20
CPC分类号： G03F7/70908 , G03F7/70866
摘要： An apparatus, in an embodiment, having a patterning device support including a first planar element having a first flow-restricting surface; a second planar element including a second flow-restricting surface facing the first flow-restricting surface; a support driver to linearly move the support along a certain direction relative to the second planar element, wherein the first and/or second flow-restricting surface has one or more projections and/or recesses between the first and second flow-restricting surfaces, and wherein the projection and/or recess on the first and/or second flow-restricting surface is arranged to provide a flow resistance, per unit width of the first and/or second flow-restricting surface perpendicular to the flow, that is lower against flow that is parallel to the certain direction than against flow that is perpendicular to the certain direction. The flow-restricting surfaces may direct gas flow onto a driver part that generates heat.
摘要翻译：在一个实施例中，具有图案形成装置支撑件的装置包括具有第一流动限制表面的第一平面元件; 第二平面元件，包括面向第一流动限制表面的第二流动限制表面; 支撑驱动器，用于沿着相对于第二平面元件的某个方向线性地移动支撑件，其中第一和/或第二流动限制表面在第一和第二流动限制表面之间具有一个或多个突起和/或凹部，以及其中所述第一和/或第二限流表面上的所述突起和/或凹部被布置成提供与所述流动垂直的所述第一和/或第二流动限制表面的每单位宽度的流动阻力，其平行于一定方向，而不是垂直于某一方向的流动。流动限制表面可以将气流引导到产生热量的驱动器部件上。

3. 发明申请

US20110228239A1 LITHOGRAPHIC APPARATUS, AN ILLUMINATION SYSTEM, A PROJECTION SYSTEM AND A METHOD OF MANUFACTURING A DEVICE USING A LITHOGRAPHIC APPARATUS 有权
标题翻译：平面设备，照明系统，投影系统和使用平面设备制造设备的方法
公开(公告)号：US20110228239A1
公开(公告)日：2011-09-22
申请号：US13050476
申请日：2011-03-17
申请人： Jeroen Gerard GOSEN , Antonius Johannus Van Der Net , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
发明人： Jeroen Gerard GOSEN , Antonius Johannus Van Der Net , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
IPC分类号： G03B27/52
CPC分类号： G03F7/70916
摘要： A gas curtain is provided to separate a component of a lithographic apparatus from contaminated gas. The gas curtain is supplied by an opening. The opening is at a boundary of a protection environment with which a surface of the component comes into contact. The gas curtain may separate the component from a moving part of the apparatus.
摘要翻译：提供气帘以将光刻设备的部件与受污染的气体分离。气幕由开口提供。开口处于组件表面接触的保护环境的边界。气幕可以将组件与设备的移动部分分离。

4. 发明授权

US08810769B2 Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus 有权
标题翻译：光刻设备，照明系统，投影系统以及使用光刻设备制造设备的方法
公开(公告)号：US08810769B2
公开(公告)日：2014-08-19
申请号：US13050476
申请日：2011-03-17
申请人： Jeroen Gerard Gosen , Antonius Johannus Van Der Net , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
发明人： Jeroen Gerard Gosen , Antonius Johannus Van Der Net , Bart Dinand Paarhuis , Frank Johannes Jacobus Van Boxtel , Jinggao Li
IPC分类号： G03B27/52
CPC分类号： G03F7/70916
摘要： A gas curtain is provided to separate a component of a lithographic apparatus from contaminated gas. The gas curtain is supplied by an opening. The opening is at a boundary of a protection environment with which a surface of the component comes into contact. The gas curtain may separate the component from a moving part of the apparatus.
摘要翻译：提供气帘以将光刻设备的部件与受污染的气体分离。气幕由开口提供。开口处于组件表面接触的保护环境的边界。气幕可以将组件与设备的移动部分分离。

5. 发明申请

US20150205806A1 APPARATUS AND METHOD FOR EXCHANGING CAD DATA 审中-公开
标题翻译：用于交换CAD数据的装置和方法
公开(公告)号：US20150205806A1
公开(公告)日：2015-07-23
申请号：US14414043
申请日：2012-07-31
申请人： Soon Hung Han , Jinggao Li
发明人： Soon Hung Han , Jinggao Li
IPC分类号： G06F17/30 , G06F17/50
CPC分类号： G06F17/30076 , G06F17/50
摘要： A CAD file converting device for applying CAD files created in a CAD system for machines to a CAD system for ships maps modeling units that the CAD files created in the CAD system for machines and those applied in the CAD system for ships, and converts parameter values determining feature shapes in the mapped modeling units into parameter values proper to the CAD files of the CAD system for ship design. Accordingly, CAD files of a CAD system for machines can be accurately converted into CAD files of a CAD system for ships.
摘要翻译：用于将用于机器的CAD系统创建的CAD文件的CAD文件转换装置用于船舶的CAD系统映射CAD模型在CAD系统中为机器创建的CAD模型单元，以及用于船舶的CAD系统中应用的CAD文件转换装置，并转换参数值将映射的建模单元中的特征形状确定为用于船舶设计的CAD系统的CAD文件的适合的参数值。因此，用于机器的CAD系统的CAD文件可以被精确地转换成用于船舶的CAD系统的CAD文件。

6. 发明授权

US10198446B2 Apparatus and method for exchanging CAD data 有权
公开(公告)号：US10198446B2
公开(公告)日：2019-02-05
申请号：US14414043
申请日：2012-07-31
申请人： Soon Hung Han , Jinggao Li
发明人： Soon Hung Han , Jinggao Li
IPC分类号： G06F17/30 , G06F17/50
摘要： A CAD file converting device for applying CAD files created in a CAD system for machines to a CAD system for ships maps modeling units that the CAD files created in the CAD system for machines and those applied in the CAD system for ships, and converts parameter values determining feature shapes in the mapped modeling units into parameter values proper to the CAD files of the CAD system for ship design. Accordingly, CAD files of a CAD system for machines can be accurately converted into CAD files of a CAD system for ships.

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