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1. 发明授权

US06228739B1 Pre-treatment method performed on a semiconductor structure before forming hemi-spherical grains of capacitor storage node 失效
标题翻译：在形成电容器存储节点的半球形晶粒之前，在半导体结构上执行预处理方法
公开(公告)号：US06228739B1
公开(公告)日：2001-05-08
申请号：US09306917
申请日：1999-05-07
申请人： Heon-jae Ha , Hong-seong Son , Young-ki Hong , Jae-inh Song , Chun-yong Park
发明人： Heon-jae Ha , Hong-seong Son , Young-ki Hong , Jae-inh Song , Chun-yong Park
IPC分类号： H01L2120
CPC分类号： H01L28/84 , H01L21/02052 , H01L21/31111 , H01L21/31133 , H01L21/32137
摘要： A pre-treatment method for improving the growth of hemi-spherical grains (HSGs) on a semiconductor structure by removing etching residue before forming a capacitor storage node having the HSGs. The pre-treatment method includes dry-etching a material layer formed on a surface of a semiconductor substrate to form a storage node pattern on the semiconductor substrate. Multiple ashing sequences are then performed on the semiconductor structure using an etching gas, followed by a stripping step using H2SO4 to remove any residue remaining on the semiconductor structure after the multiple ashing sequences. The semiconductor structure is then cleaned with an ammonium peroxide mixture (APM), and HSGs are thereafter grown on capacitor storage nodes of the storage node pattern.
摘要翻译：一种用于通过在形成具有HSG的电容器存储节点之前去除蚀刻残留来改善半球结构上的半球形晶粒（HSG）的生长的预处理方法。预处理方法包括对形成在半导体衬底的表面上的材料层进行干蚀刻以在半导体衬底上形成存储节点图案。然后使用蚀刻气体在半导体结构上执行多个灰化序列，随后使用H 2 SO 4进行汽提步骤以除去在多个灰化序列之后残留在半导体结构上的残留物。然后用过氧化铵混合物（APM）清洁半导体结构，然后在存储节点图案的电容器存储节点上生长HSG。

2. 发明申请

US20130135392A1 INKJET PRINTING APPARATUS AND METHOD OF FORMING NOZZLES 有权
标题翻译：喷墨打印设备和形成喷嘴的方法
公开(公告)号：US20130135392A1
公开(公告)日：2013-05-30
申请号：US13477383
申请日：2012-05-22
申请人： Sung-gyu Kang , Young-ki Hong , Joong-hyuk Kim , Seung-ho Lee , Jae-woo Chung , Yong-wan Jin
发明人： Sung-gyu Kang , Young-ki Hong , Joong-hyuk Kim , Seung-ho Lee , Jae-woo Chung , Yong-wan Jin
IPC分类号： B41J2/14 , B41J2/16
CPC分类号： B41J2/14209 , B41J2/162 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631
摘要： A printing apparatus includes a first nozzle substrate having a first tapered nozzle unit aligned with a pressure chamber and a second nozzle substrate having a second tapered nozzle unit aligned with the first tapered nozzle unit and attached to the bottom of the first nozzle substrate.
摘要翻译：打印装置包括：第一喷嘴基板，具有与压力室对准的第一锥形喷嘴单元和具有与第一锥形喷嘴单元对准并附接到第一喷嘴基板的底部的第二锥形喷嘴单元的第二喷嘴基板。

3. 发明授权

US08372702B2 Method of manufacturing TFT and array TFT 有权
标题翻译：制造TFT和阵列TFT的方法
公开(公告)号：US08372702B2
公开(公告)日：2013-02-12
申请号：US12923051
申请日：2010-08-31
申请人： Jae-woo Chung , Seung-ho Lee , Young-ki Hong , Sung-gyu Kang , Joong-hyuk Kim
发明人： Jae-woo Chung , Seung-ho Lee , Young-ki Hong , Sung-gyu Kang , Joong-hyuk Kim
IPC分类号： H01L21/84 , H01L51/40
CPC分类号： H01L21/28008 , H01L27/1285 , H01L27/1292
摘要： A method of manufacturing a thin film transistor includes sequentially forming a gate and at least one insulation layer on a substrate, forming a source electrode and a drain electrode on the at least one insulation layer, and forming a channel layer formed of a semiconductor on a part of the source electrode and the drain electrode, wherein the gate, the source electrode, and the drain electrode are formed by using a hybrid inkjet printing apparatus.
摘要翻译：制造薄膜晶体管的方法包括在基板上依次形成栅极和至少一个绝缘层，在至少一个绝缘层上形成源电极和漏电极，以及在半导体层上形成沟道层源电极和漏电极的一部分，其中栅极，源电极和漏电极通过使用混合喷墨打印装置形成。

4. 发明授权

US08186811B2 Inkjet printing apparatus and method of driving inkjet printing apparatus 有权
标题翻译：喷墨打印设备和驱动喷墨打印设备的方法
公开(公告)号：US08186811B2
公开(公告)日：2012-05-29
申请号：US12662732
申请日：2010-04-30
申请人： Joonghyuk Kim , Jae-woo Chung , Young-ki Hong
发明人： Joonghyuk Kim , Jae-woo Chung , Young-ki Hong
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/04576 , B41J2/04581 , B41J2/04588 , B41J2/06
摘要： An inkjet printing apparatus according to example embodiments may include a flow channel plate including an ink inlet for introducing ink, a pressure chamber containing the introduced ink, and a nozzle connected to the pressure chamber and configured to eject ink. A piezoelectric voltage applier may apply a piezoelectric driving voltage to the piezoelectric actuator in such a way that the volume of the pressure chamber is reduced so as to eject an ink droplet. An electrohydrodynamic voltage applier may apply a first electrohydrodynamic driving voltage and a second electrohydrodynamic driving voltage to the electrohydrodynamic actuator. The first electrohydrodynamic driving voltage may generate a jet from the ink droplet such that the jet is ejected towards a printing medium, and the second electrohydrodynamic driving voltage (which has an opposite polarity to that of the first electrohydrodynamic driving voltage) may restore the ink droplet to the nozzle.
摘要翻译：根据示例性实施例的喷墨打印设备可以包括流路板，其包括用于引入墨的墨入口，包含引入的墨的压力室和连接到压力室并被配置为喷射墨的喷嘴。压电电压施加器可以将压电驱动电压施加到压电致动器，使得压力室的容积减小以便喷射墨滴。电氢动力电压施加器可以将第一电动力驱动电压和第二电动液压驱动电压施加到电动液压致动器。第一电动力驱动电压可以从墨滴产生射流，使得射流朝向打印介质喷射，并且第二电流动力学驱动电压（其具有与第一电动液压驱动电压的极性相反的极性）可以恢复墨滴到喷嘴。

5. 发明申请

US20110134195A1 Inkjet printing apparatus and method of driving inkjet printing apparatus 有权
标题翻译：喷墨打印设备和驱动喷墨打印设备的方法
公开(公告)号：US20110134195A1
公开(公告)日：2011-06-09
申请号：US12662732
申请日：2010-04-30
申请人： Joonghyuk Kim , Jae-woo Chung , Young-ki Hong
发明人： Joonghyuk Kim , Jae-woo Chung , Young-ki Hong
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2/04576 , B41J2/04581 , B41J2/04588 , B41J2/06
摘要： An inkjet printing apparatus according to example embodiments may include a flow channel plate including an ink inlet for introducing ink, a pressure chamber containing the introduced ink, and a nozzle connected to the pressure chamber and configured to eject ink. A piezoelectric voltage applier may apply a piezoelectric driving voltage to the piezoelectric actuator in such a way that the volume of the pressure chamber is reduced so as to eject an ink droplet. An electrohydrodynamic voltage applier may apply a first electrohydrodynamic driving voltage and a second electrohydrodynamic driving voltage to the electrohydrodynamic actuator. The first electrohydrodynamic driving voltage may generate a jet from the ink droplet such that the jet is ejected towards a printing medium, and the second electrohydrodynamic driving voltage (which has an opposite polarity to that of the first electrohydrodynamic driving voltage) may restore the ink droplet to the nozzle.
摘要翻译：根据示例性实施例的喷墨打印设备可以包括流路板，其包括用于引入墨的墨入口，包含引入的墨的压力室和连接到压力室并被配置为喷射墨的喷嘴。压电电压施加器可以将压电驱动电压施加到压电致动器，使得压力室的容积减小以便喷射墨滴。电氢动力电压施加器可以将第一电动力驱动电压和第二电动液压驱动电压施加到电动液压致动器。第一电动力驱动电压可以从墨滴产生射流，使得喷射朝向打印介质喷射，并且第二电流动力驱动电压（其具有与第一电动液压驱动电压的极性相反的极性）可以恢复墨滴到喷嘴。

6. 发明授权

US07588307B2 Piezolelectric inkjet printhead having temperature sensor and method of making the same 有权
标题翻译：具有温度传感器的压电式喷墨打印头及其制造方法
公开(公告)号：US07588307B2
公开(公告)日：2009-09-15
申请号：US11341364
申请日：2006-01-30
申请人： Young-ki Hong , Tae-gyun Kim , Jae-woo Chung
发明人： Young-ki Hong , Tae-gyun Kim , Jae-woo Chung
IPC分类号： B41J29/38 , B41J2/045 , B23P17/00
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/49401
摘要： A piezoelectric inkjet printhead having a channel forming plate including an ink channel having a pressure chamber coupled to a nozzle, a piezoelectric actuator including a lower electrode on the channel forming plate, a piezoelectric element on the lower electrode, and an upper electrode on the piezoelectric element, the piezoelectric actuator corresponding to the pressure chamber, an insulation element on the lower electrode and spaced apart from the piezoelectric element, a first electrode on the insulation element, and a temperature sensor on the first electrode, and a method of making the same.
摘要翻译：一种具有通道形成板的压电喷墨打印头，该通道形成板包括具有连接到喷嘴的压力室的墨水通道，在通道形成板上包括下部电极的压电致动器，下部电极上的压电元件和压电元件元件，对应于压力室的压电致动器，下电极上的绝缘元件并与压电元件间隔开，绝缘元件上的第一电极和第一电极上的温度传感器及其制造方法。

7. 发明申请

US20080165228A1 PIEZOELECTRIC INKJET HEAD AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：压电喷嘴头及其制造方法
公开(公告)号：US20080165228A1
公开(公告)日：2008-07-10
申请号：US11768293
申请日：2007-06-26
申请人： Sung-gyu KANG , Young-ki Hong , Jae-woo Chung , Se-young Oh
发明人： Sung-gyu KANG , Young-ki Hong , Jae-woo Chung , Se-young Oh
IPC分类号： B41J2/045 , H01L41/22
CPC分类号： B41J2/14233 , B41J2/055 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1642 , B41J2002/14403 , B41J2002/14419 , B41J2202/03 , B41J2202/11 , Y10T29/42
摘要： A piezoelectric inkjet head and a method of manufacturing the piezoelectric inkjet head. The piezoelectric inkjet head includes three single crystal silicon substrates bonded to each other. An upper substrate includes an ink inlet, a plurality of pressure chambers, and a plurality of piezoelectric actuators, a middle substrate includes a manifold, a plurality of restrictors, and a plurality of first dampers, and a lower substrate includes a plurality of nozzles. The middle substrate also includes a membrane that is formed under the manifold to mitigate a rapid pressure change in the manifold and if formed of a material different from the material used for forming the middle substrate. A cavity located under the membrane and at least one venting channel that connects the cavity to the outside are formed in the middle substrate or the lower substrate. Due to the above configuration, the membrane having flexibility mitigates a rapid pressure change in the manifold caused by backflow of ink, and thus, cross-talk between adjacent pressure chambers during ink ejection can be effectively prevented.
摘要翻译：压电喷墨头和压电喷墨头的制造方法。压电喷墨头包括彼此结合的三个单晶硅衬底。上基板包括墨入口，多个压力室和多个压电致动器，中间基板包括歧管，多个限流器和多个第一阻尼器，下基板包括多个喷嘴。中间基板还包括形成在歧管下方的膜，以减轻歧管中的快速压力变化，并且如果由不同于用于形成中间基板的材料形成的材料形成。在中间基板或下基板中形成位于膜下方的空腔和将空腔连接到外部的至少一个通气通道。由于上述结构，具有柔性的膜减轻了由于油墨的回流引起的歧管中的快速压力变化，因此可以有效地防止在喷墨期间相邻压力室之间的串扰。

8. 发明申请

US20060176347A1 Inkjet printhead assembly and ink supply apparatus for the same 有权
标题翻译：喷墨打印头组件和供墨装置相同
公开(公告)号：US20060176347A1
公开(公告)日：2006-08-10
申请号：US11345376
申请日：2006-02-02
申请人： Young-ki Hong , Jae-woo Chung , You-seop Lee
发明人： Young-ki Hong , Jae-woo Chung , You-seop Lee
IPC分类号： B41J2/175
CPC分类号： B41J2/17593
摘要： An inkjet printhead assembly including an inkjet printhead chip having an ink inflow hole, a frame having an ink supply hole, and an ink supply apparatus having a preheater and an ink supply outlet, wherein the frame is disposed between the inkjet printhead chip and the ink supply apparatus, the inkjet printhead chip is attached to the frame, and the ink supply hole is disposed between the ink supply outlet and the ink inflow hole, so as to channel ink between the ink supply apparatus and the inkjet printhead chip.
摘要翻译：一种喷墨打印头组件，包括具有墨水流入孔的喷墨打印头芯片，具有墨水供应孔的框架和具有预热器和墨水供应出口的墨水供应装置，其中框架设置在喷墨打印头芯片和墨水之间喷墨打印头芯片附接到框架，并且供墨孔设置在供墨口和墨水流入孔之间，以便在墨水供应装置和喷墨打印头芯片之间引导墨水。

9. 发明授权

US09153487B2 Methods of forming wirings in electronic devices 有权
标题翻译：在电子设备中形成布线的方法
公开(公告)号：US09153487B2
公开(公告)日：2015-10-06
申请号：US13601658
申请日：2012-08-31
申请人： Seung-ho Lee , Young-ki Hong , Sung-gyu Kang , Joong-hyuk Kim , Jae-woo Chung
发明人： Seung-ho Lee , Young-ki Hong , Sung-gyu Kang , Joong-hyuk Kim , Jae-woo Chung
IPC分类号： H01L21/285 , H01L21/768 , H01L21/311 , H01L27/12
CPC分类号： H01L21/76885 , H01L21/31127 , H01L21/76814 , H01L21/76822 , H01L21/76879 , H01L27/124 , H01L27/1292
摘要： A method of forming a wiring may include forming a first wire on a substrate; forming a material layer on the substrate, except on the first wire; forming a surface treatment film on the material layer; and forming a second wire on the first wire. The surface treatment film has physical properties opposite to the first wire. A method of forming a wiring may include forming a first wire on a substrate; forming a material layer on the substrate and the first wire; removing a portion of the material layer from the first wire; forming a surface treatment film on the material layer and the first wire; removing a portion of the surface treatment film from the first wire; and forming a second wire on the first wire. A thickness of the material layer on the substrate is greater than a thickness of the first wire on the substrate.
摘要翻译：形成布线的方法可以包括在基板上形成第一布线; 在所述基板上形成除了所述第一线之外的材料层; 在所述材料层上形成表面处理膜; 以及在所述第一线上形成第二线。表面处理膜具有与第一丝相反的物理性质。形成布线的方法可以包括在基板上形成第一布线; 在所述基板和所述第一线上形成材料层; 从所述第一丝线去除所述材料层的一部分; 在所述材料层和所述第一线上形成表面处理膜; 从所述第一丝线去除所述表面处理膜的一部分; 以及在所述第一线上形成第二线。基板上的材料层的厚度大于基板上的第一布线的厚度。

10. 发明授权

US09050793B2 Inkjet printing device and method of driving the same 有权
标题翻译：喷墨打印装置及其驱动方法
公开(公告)号：US09050793B2
公开(公告)日：2015-06-09
申请号：US12107133
申请日：2008-04-22
申请人： Jae-woo Chung , Young-ki Hong , Sung-gyu Kang
发明人： Jae-woo Chung , Young-ki Hong , Sung-gyu Kang
IPC分类号： B41J2/045 , B41J2/06 , B41J2/14
CPC分类号： B41J2/06 , B41J2/14 , B41J2/14233 , B41J2202/09
摘要： An inkjet printing device includes a flow path plate comprising a manifold to supply ink, a pressure chamber filled with the ink supplied from the manifold, and a nozzle via which the ink is ejected, a piezoelectric actuator which is disposed on a top surface of the flow path plate and includes a lower electrode, a piezoelectric layer, and an upper electrode that are stacked sequentially, a first electrostatic electrode to generate an electrostatic field, and a second electrostatic electrode which is disposed a predetermined distance apart from a bottom surface of the flow path plate to generate the electrostatic field between the first electrostatic electrode and the second electrostatic electrode.
摘要翻译：喷墨打印装置包括流路板，该流路板包括用于供应墨水的歧管，填充有从歧管供应的墨的压力室和喷射墨水的喷嘴，压电致动器，设置在喷嘴的顶表面上流路板，并且包括依次堆叠的下电极，压电层和上电极，产生静电场的第一静电电极和与所述第一静电电极的底表面隔开设置的第二静电电极流路板以产生第一静电电极和第二静电电极之间的静电场。

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