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1. 发明授权

US07345771B2 Apparatus and method for measurement of critical dimensions of features and detection of defects in UV, VUV, and EUV lithography masks 失效
标题翻译：用于测量特征的临界尺寸和检测UV，VUV和EUV光刻掩模中的缺陷的装置和方法
公开(公告)号：US07345771B2
公开(公告)日：2008-03-18
申请号：US11124603
申请日：2005-05-06
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G01B11/02
CPC分类号： G03F1/84 , G01N21/45 , G01N21/956 , G01N2021/95676
摘要： Methods and apparatus are disclosed for measurement of critical dimensions (CD) of features and detection of defects in reflecting UV, VUV, and EUV lithography masks and in transmitting UV and VUV lithography masks. The measured CD's may be used in the determination of optical proximity corrections (OPC) and/or in mask fabrication process control. The transmitting masks may comprise binary and various types of phase shift masks.
摘要翻译：公开了用于测量特征的临界尺寸（CD）和检测反射UV，VUV和EUV光刻掩模中的缺陷以及传输UV和VUV光刻掩模的方法和装置。所测量的CD可用于确定光学邻近校正（OPC）和/或掩模制造工艺控制。发射掩模可以包括二进制和各种类型的相移掩模。

2. 发明授权

US07312877B2 Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy 失效
标题翻译：用于在非干涉和干涉显微镜中使用驻波束增强图像高空间频率分量分辨率的方法和装置
公开(公告)号：US07312877B2
公开(公告)日：2007-12-25
申请号：US10954625
申请日：2004-09-30
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G01B9/02
CPC分类号： G01B9/02022 , G01B9/02003 , G01B9/02024 , G01B2290/70 , G02B21/14
摘要： A method of measuring properties of a substrate, the method involving: illuminating a spot on the substrate with a standing wave measurement beam to generate a return measurement beam, the standing wave measurement beam characterized by a standing wave pattern; generating an electrical signal from the return measurement beam; causing the standing wave pattern to be at a succession of different positions on the surface of the substrate; and for each of the succession of different positions of the standing wave pattern, acquiring measurement data from the electrical signal.
摘要翻译：一种测量基板特性的方法，所述方法包括：用驻波测量光束照射所述基板上的点以产生返回测量光束，所述驻波测量光束以驻波图案为特征; 从返回测量光束产生电信号; 使驻波图案在基板的表面上处于不同位置的连续位置; 并且对于驻波图案的不同位置的连续中的每一个，从电信号获取测量数据。

3. 发明授权

US07263259B2 Multiple-source arrays fed by guided-wave structures and resonant guided-wave structure cavities 失效
标题翻译：由导波结构和谐振导波结构腔馈送的多源阵列
公开(公告)号：US07263259B2
公开(公告)日：2007-08-28
申请号：US10774250
申请日：2004-02-06
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G02B6/26 , G02B6/34 , G02B6/10
CPC分类号： G02B6/4206 , G02B6/124 , G02B6/4215 , G02B21/0056
摘要： A multiple source array including a guided-wave structure having a dielectric core and a cladding covering the dielectric core; and an array of dielectric-filled, guided-wave cavities in the cladding extending transversely from the dielectric core and forming an array of apertures through which optical energy that is introduced into the core exits from the core.
摘要翻译：一种多源阵列，包括具有介电芯的导波结构和覆盖所述介质芯的包层; 以及在所述包层中的电介质填充的导波腔的阵列，其从所述介质芯横向延伸并且形成孔阵列，通过所述孔的阵列引入到所述芯中的光能从所述芯离开。

4. 发明授权

US07084984B2 Apparatus and method for high speed scan for detection and measurement of properties of sub-wavelength defects and artifacts in semiconductor and mask metrology 失效
标题翻译：用于高速扫描的装置和方法，用于检测和测量半波长缺陷和半导体和掩模计量中的伪影
公开(公告)号：US07084984B2
公开(公告)日：2006-08-01
申请号：US10886010
申请日：2004-07-07
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G01B9/02
CPC分类号： G01N21/9501 , G01N21/4788 , G01N2021/4709 , G01N2021/95676
摘要： A method of detecting defects or artifacts on or in an object, wherein the defects or artifacts are characterized by a characteristic dimension, the method involving: generating an input beam for illuminating a spot at a selected location on or in the object, wherein the spot has a size L that is substantially larger than the characteristic dimension; deriving a measurement beam and a reference beam from the input beam; directing the measurement beam onto the object as an incident measurement beam that illuminates the spot at that selected location on or in the object to produce a backscattered measurement beam; interfering the backscattered measurement beam with the reference beam to produce an interference beam, the reference beam being oriented relative to the backscattered measurement beam so as to produce a peak sensitivity for a portion of the backscattered measurement beam that emanates from the object at a predetermined diffraction angle; converting the interference beam for that selected location into an interference signal; and using the interference signal for that selected location to determine whether any defects or artifacts characterized by said characteristic dimension are present anywhere within a region on or in the object defined by the spot at that selected location.
摘要翻译：一种检测物体上或物体中的缺陷或伪影的方法，其中所述缺陷或伪像由特征尺寸表征，所述方法包括：产生用于照亮所述物体上或物体中的选定位置处的斑点的输入光束，其中所述光点具有基本上大于特征尺寸的尺寸L; 从输入光束导出测量光束和参考光束; 将测量光束作为入射测量光束引导到物体上，该入射测量光束照亮物体上或物体中的该选定位置处的光斑以产生反向散射测量光束; 将背散射测量光束与参考光束干涉以产生干涉光束，参考光束相对于背散射测量光束定向，以便在预定衍射下产生从物体发出的反向散射测量光束的一部分的峰值灵敏度角度; 将所选择的位置的干扰波束转换成干扰信号; 以及使用所选择的位置的干扰信号来确定由所述特征维度表征的任何缺陷或伪影是否存在于由所选位置处的点定义的对象上或之内的区域内的任何地方。

5. 发明授权

US06201609B1 Interferometers utilizing polarization preserving optical systems 有权
标题翻译：采用偏振光保护光学系统的干涉仪
公开(公告)号：US06201609B1
公开(公告)日：2001-03-13
申请号：US09384855
申请日：1999-08-27
申请人： Henry Allen Hill , Peter J. de Groot
发明人： Henry Allen Hill , Peter J. de Groot
IPC分类号： G01B902
CPC分类号： G01B9/02059 , G01B9/02003 , G01B9/02018 , G01B2290/15 , G01B2290/70
摘要： Interferometers utilizing polarization preserving optical systems by plane polarized beams are deviated through preselected angles without changing their linear state of polarization. The interferometers utilizing such optical systems have a variety of applications and are particularly suitable for use in the field of distance measuring interferometry (DMI) to enhance measurement accuracy by reducing undesirable polarization effects that can introduce errors associated with an otherwise present undesirable polarization rotation found in classical retroreflectors. Prismatic optical elements are preferably used to construct assemblies which can include polarization beam splitting coating arrangements and/or birefringent materials to enhance the extinction ratio between orthogonally polarized beams propagating through such systems.
摘要翻译：通过平面偏振光束利用偏振保留光学系统的干涉仪偏离预选角度而不改变其线性极化状态。使用这种光学系统的干涉仪具有各种应用，并且特别适合于在距离测量干涉测量（DMI）领域中使用，以通过减少不期望的极化效应来提高测量精度，所述偏振效应可能引入与否存在的不期望的极化旋转相关的误差经典后向反射镜棱镜光学元件优选用于构造可以包括偏振分束涂覆装置和/或双折射材料的组件，以增强通过这种系统传播的正交偏振光束之间的消光比。

6. 发明授权

US5970077A Apparatus for efficiently transforming a single frequency, linearly polarized laser beam into principally two orthogonally polarized beams having different frequencies 失效
标题翻译：用于将单频线性偏振激光束有效地转换成主要具有不同频率的两个正交偏振光束的装置
公开(公告)号：US5970077A
公开(公告)日：1999-10-19
申请号：US986059
申请日：1997-12-05
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G02F1/11 , G02F2/02 , H01S3/106 , H01S3/10
CPC分类号： G02F1/116 , G02F1/11 , G02F2203/07 , H01S3/1068
摘要： Electro-optical devices comprising a multifaceted anisotropic acousto-optical crystal for transforming a single-frequency beam comprising two individual linearly-orthogonally, polarized input beams into an output beam having two linearly-orthogonally, polarized principal output beams having frequencies that differ from each other and the input beam where the input beam preferably is a laser of frequency, f.sub.L. While the directions of propagation of the individual input beams are preferably parallel, and the directions of propagation of the principal output beams are preferably parallel, they need not be and instead the individual input beams and the principal output beams may beneficially have their own predetermined angle of divergence or convergence, respectively. The energy flux profiles of the individual input beams may be spatially separated, partially coextensive, or substantially coextensive and the energy flux profiles of the principal output beams may be spatially separated, partially coextensive, or substantially coextensive in accordance with the details of particular device embodiments and the requirements of the metrology or other contemplated application. In addition, thermal compensation may be made available through the exploitation of the principles of symmetry while power requirements may be reduced through the use of multiple pass arrangements for optical beams traveling through the interaction region of the anisotropic acousto-optical crystal.
摘要翻译：包括用于将包括两个单独的线性正交极化输入光束的单频波束变换为具有两个具有彼此不同频率的线性正交极化主输出光束的输出光束的多光学各向异性声光晶体的电光装置输入光束优选为频率为fL的激光器的输入光束。尽管各个输入光束的传播方向优选地是平行的，并且主输出光束的传播方向优选地是平行的，但它们不需要并且代替地，各个输入光束和主输出光束可以有利地具有它们自己的预定角度分散或收敛。各个输入光束的能量通量分布可以在空间上分离，部分共延伸或基本上共同延伸，并且根据特定装置实施例的细节，主输出光束的能量通量分布可以在空间上分离，部分共延伸或基本共同延伸以及计量或其他预期应用的要求。此外，通过利用对称原理可以获得热补偿，同时通过对通过各向异性声光晶体的相互作用区域的光束使用多通路布置来降低功率需求。

7. 发明授权

US07355722B2 Catoptric and catadioptric imaging systems with adaptive catoptric surfaces 失效
标题翻译：具有自适应反射曲面的Catoptric和反折射成像系统
公开(公告)号：US07355722B2
公开(公告)日：2008-04-08
申请号：US10938408
申请日：2004-09-10
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G01B11/02 , G02B27/10 , G02B27/14
CPC分类号： G02B17/086 , G01J1/58 , G02B17/008 , G02B26/06 , G02B27/144 , G02B27/145
摘要： An imaging system for imaging an object point to an image point, the system including: a beam splitter positioned to receive light rays from the object point and separate each of a plurality of rays into a transmitted portion and a reflected portion, the transmitted portions defining a first set of rays and the reflected portions defining a second set of rays; and an array of independently positionable reflecting elements forming a reflecting surface positioned to receive one of the sets of rays from the beam splitter and focus that set of rays towards the image point via the beam splitter.
摘要翻译：一种成像系统，用于将物体点成像到图像点，所述系统包括：分束器，其被定位成接收来自所述物体点的光线并将多个光线中的每一个分离成透射部分和反射部分，所述透射部分限定第一组光线和反射部分限定第二组光线; 以及形成反射表面的可独立定位的反射元件的阵列，其被定位成接收来自分束器的一组射线，并且经由分束器将该组射线聚焦到图像点。

8. 发明授权

US07298496B2 Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry 失效
标题翻译：基于光学干涉测量的覆盖，对准标记和关键尺寸计量的装置和方法
公开(公告)号：US07298496B2
公开(公告)日：2007-11-20
申请号：US11135605
申请日：2005-05-23
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02002 , G01B9/02014 , G01B9/02042 , G01B9/02072 , G01B9/02079 , G01B2290/70 , G03F9/7034 , G03F9/7049
摘要： Methods and apparatus based on optical homodyne displacement interferometry, optical coherent-domain reflectometry (OCDR), and optical interferometric imaging are disclosed for overlay, alignment mark, and critical dimension (CD) metrologies that are applicable to microlithography applications and integrated circuit (IC) and mask fabrication and to the detection and location of defects in/on unpatterned and patterned wafers and masks. The metrologies may also be used in advanced process control (APC), in determination of wafer induced shifts (WIS), and in the determination of optical proximity corrections (OPC).
摘要翻译：公开了适用于微光刻应用和集成电路（IC）的覆盖，对准标记和临界尺寸（CD）计量的基于光学零差位移干涉测量，光学相干域反射测量（OCDR）和光学干涉成像的方法和装置，和掩模制造以及在未图案化和图案化的晶片和掩模上/之上的缺陷的检测和定位。计量学也可用于先进的过程控制（APC），确定晶片诱发位移（WIS）以及在光学邻近校正（OPC）的确定中。

9. 发明授权

US07274468B2 Optical beam shearing apparatus 失效
标题翻译：光束剪切装置
公开(公告)号：US07274468B2
公开(公告)日：2007-09-25
申请号：US11132800
申请日：2005-05-19
申请人： Henry Allen Hill , Justin L. Kreuzer
发明人： Henry Allen Hill , Justin L. Kreuzer
IPC分类号： G01B9/02
CPC分类号： G01B9/02021 , G01B9/02003 , G01B9/02027 , G01B9/02098 , G01B2290/45 , G01B2290/70 , G01J9/00
摘要： Beam shearing apparatus for introducing a lateral shear between the components of a light beam. The apparatus is an optical assembly having a polarizing interface and input and output facets and two reflecting surfaces one of which is arranged at an angle generally opposite the input facet and the other of which is arranged at an angle generally opposite the output facet.
摘要翻译：用于在光束的部件之间引入横向剪切的光束剪切装置。该装置是具有偏振界面和输入和输出小面以及两个反射表面的光学组件，其中一个反射表面以大致与输入小面相对的角度布置，而另一个以大体上与输出小面相对的角度排列。

10. 发明授权

US07133139B2 Longitudinal differential interferometric confocal microscopy 失效
标题翻译：纵向微分干涉共焦显微镜
公开(公告)号：US07133139B2
公开(公告)日：2006-11-07
申请号：US10782057
申请日：2004-02-19
申请人： Henry Allen Hill
发明人： Henry Allen Hill
IPC分类号： G01B9/02
CPC分类号： G01B9/04 , G02B21/0024 , G02B21/0056 , G02B27/108 , G02B27/143 , G02B27/144 , G02B27/145
摘要： A differential interferometric confocal microscope for measuring an object, the microscope including a source-side pinhole array; a detector-side pinhole array; and an interferometer that images the array of pinholes of the source-side pinhole array onto a first array of spots located in front of an object plane located near where the object is positioned and onto a second array of spots behind the object plane, wherein the first and second arrays of spots are displaced from each other in both a direction normal to the object plane and a direction parallel to the object plane, the interferometer also imaging the first arrays of spots onto a first image plane that is behind the detector-side pinhole array and imaging the second array of spots onto a second image plane that is in front of the detector-side pinhole array wherein each spot of the imaged first array of spots is aligned with a corresponding different spot of the imaged second array of spots and a corresponding different pinhole of the detector-side pinhole array.
摘要翻译：用于测量物体的差分干涉式共焦显微镜，显微镜包括源极针孔阵列; 检测器侧针孔阵列; 以及干涉仪，其将源侧针孔阵列的针孔阵列成像到位于物体平面附近的物体平面前方的位于第一阵列的位置上，并且位于物平面后面的第二阵列上，其中，第一和第二阵列阵列在垂直于物平面的方向和平行于物平面的方向上彼此移位，干涉仪还将第一阵列阵列成像到检测器侧后面的第一图像平面上针孔阵列并将第二阵列阵列成像到位于检测器侧针孔阵列前面的第二图像平面上，其中所成像的第一阵列阵列的每个点与成像的第二阵列阵列的相应不同点对准，以及检测器侧针孔阵列的相应不同针孔。

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