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    • 3. 发明授权
    • Apparatus for measuring the thickness of thin layers
    • 用于测量薄层厚度的装置
    • US4293767A
    • 1981-10-06
    • US69610
    • 1979-08-24
    • Helmut FischerAlbert OttWilli Steegmuller
    • Helmut FischerAlbert OttWilli Steegmuller
    • G01N23/203G01N23/00
    • G01N23/203
    • The apparatus measures the thickness of thin layers on strips and wires which are moved relative to the apparatus. The apparatus is stationary and includes one or more beta emitters directed towards the layer and spatially arranges relative to the longitudinal axis of a beta radiation detector or counting tube which is arranged to the rear of the beta emitter for counting the backscattered beta radiation, and a guide for the strip or wire at a specified distance from the beta emitter. The ratio of the characteristic cross-sectional dimension (D) of the window of the beta radiation detector to the intersecting surface diameter (d) of the intersecting surface layer/intensity distribution curve of the beta emitter, being expressed as D/d=15 . . . 2; with the distance between the layer and the beta radiation emitter being in the plateau region of the curve of the counting rate/distance characteristic obtained by the above feature.
    • 该装置测量相对于装置移动的条和线上的薄层的厚度。 该装置是静止的并且包括一个或多个指向该层的β发射体,并相对于β辐射检测器或计数管的纵向轴线在空间上布置,该β辐射检测器或计数管被布置到用于计数背散射β辐射的β发射器的后部, 在距离beta发射器一定距离处的条或导线的引导。 β辐射检测器的窗口的特征截面尺寸(D)与β发射体的相交表面层/强度分布曲线的交叉表面直径(d)的比值表示为D / d = 15 。 。 。 2; 其中层和β辐射发射器之间的距离在通过上述特征获得的计数速率/距离特性的曲线的平台区域中。