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    • 9. 发明申请
    • TRIPLE OXIDATION ON DSB SUBSTRATE
    • DSB基板上的三重氧化
    • US20120080777A1
    • 2012-04-05
    • US12895095
    • 2010-09-30
    • Masafumi HamaguchiRyoji Hasumi
    • Masafumi HamaguchiRyoji Hasumi
    • H01L29/78H01L21/314
    • H01L21/02238H01L21/823412H01L21/823462H01L21/823481H01L21/823807H01L21/823857H01L21/823878
    • According to certain embodiments, a semiconductor structure is formed having a gate oxide formed over a semiconductor substrate. The gate oxide is formed as to have three different regions characterized by a different average thickness of gate oxide in each region. A first oxidation process is performed on a semiconductor substrate having both a Si (110) orientation region and a Si (100) orientation region on a surface thereof. Gate oxide is formed at a faster rate on the Si (110) orientation region of the semiconductor substrate relative to the Si (100) orientation region. A portion of the gate oxide is selectively removed and a second oxidation process is performed to form additional gate oxide. A triple oxide semiconductor substrate is recovered with the gate oxide having three different thickness formed thereon. The triple oxide semiconductor substrate is formed using a decreased number of processing acts.
    • 根据某些实施例,形成在半导体衬底上形成栅极氧化物的半导体结构。 栅极氧化物形成为具有三个不同的区域,其特征在于每个区域中栅极氧化物的平均厚度不同。 在其表面上具有Si(110)取向区域和Si(100)取向区域的​​半导体衬底上进行第一氧化工艺。 栅极氧化物以相对于Si(100)取向区域在半导体衬底的Si(110)取向区域上以更快的速率形成。 选择性地去除栅极氧化物的一部分,并且执行第二氧化工艺以形成另外的栅极氧化物。 用形成有三个不同厚度的栅极氧化物回收三重氧化物半导体衬底。 使用减少数量的处理作用形成三重氧化物半导体衬底。