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1. 发明申请

US20110100126A1 Capacitance Sensor 有权
标题翻译：电容传感器
公开(公告)号：US20110100126A1
公开(公告)日：2011-05-05
申请号：US12912580
申请日：2010-10-26
申请人： Heewon JEONG , Kiyoko YAMANAKA , Yasushi GOTO , Toshiaki NAKAMURA , Masahide HAYASHI
发明人： Heewon JEONG , Kiyoko YAMANAKA , Yasushi GOTO , Toshiaki NAKAMURA , Masahide HAYASHI
IPC分类号： G01P15/125
CPC分类号： G01P21/00 , G01C19/5719 , G01P15/125 , G01P2015/0814
摘要： A technique in which a false detection and a wrong diagnosis can be suppressed in a capacitance sensor represented by an acceleration sensor is provided. A first capacitative element and a second capacitative element, which configure a capacitance detection unit, and a third capacitative element and a fourth capacitative element, which configure a forced oscillation generation unit, are electrically separated from each other. That is, the diagnosis movable electrode that configures the third capacitative element and the fourth capacitative element is formed integrally with the movable part. On the other hand, the diagnosis fixed electrode and the diagnosis fixed electrode are electrically separated from the detection fixed electrode and the detection fixed electrode.
摘要翻译：提供了一种在由加速度传感器表示的电容传感器中可以抑制错误检测和错误诊断的技术。构成电容检测单元的第一电容元件和第二电容元件以及配置强制振荡产生单元的第三电容元件和第四电容元件彼此电分离。也就是说，构成第三电容元件和第四电容元件的诊断可移动电极与可动部一体地形成。另一方面，诊断固定电极和诊断固定电极与检测固定电极和检测固定电极电分离。

2. 发明申请

US20100127715A1 SEMICONDUCTOR PHYSICAL QUANTITY SENSOR AND CONTROL DEVICE USING THE SAME 审中-公开
标题翻译：半导体物理量传感器及其控制装置
公开(公告)号：US20100127715A1
公开(公告)日：2010-05-27
申请号：US12622549
申请日：2009-11-20
申请人： Heewon JEONG , Kiyoko YAMANAKA
发明人： Heewon JEONG , Kiyoko YAMANAKA
IPC分类号： G01R27/26 , H01G5/00
CPC分类号： G01P15/0802 , G01C19/5719 , G01C19/574 , G01P1/023 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A highly reliable semiconductor physical quantity sensor whose performance does not change much over time is provided. In the semiconductor physical quantity sensor, movable electrodes which can be displaced by applying a physical quantity are initially displaced using an electrostatic force, and the movable electrodes are used to detect the direction and magnitude of a physical quantity applied to the semiconductor physical quantity sensor. The semiconductor physical quantity sensor is highly reliable and its performance does not change much over time compared with semiconductor physical quantity sensors using a known method in which movable electrodes are initially displaced using a compressive stress film.
摘要翻译：提供了一种高可靠性的半导体物理量传感器，其性能随时间变化不大。在半导体物理量传感器中，通过施加物理量可移位的可动电极首先利用静电力移动，并且可移动电极用于检测施加到半导体物理量传感器的物理量的方向和幅度。半导体物理量传感器是高度可靠的，并且与使用已知方法的半导体物理量传感器相比，其性能不会随时间变化很大，其中可移动电极使用压缩应力膜最初位移。

3. 发明申请

US20090126491A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20090126491A1
公开(公告)日：2009-05-21
申请号：US12273068
申请日：2008-11-18
申请人： Kiyoko YAMANAKA , Heewon Jeong
发明人： Kiyoko YAMANAKA , Heewon Jeong
IPC分类号： G01P15/125
CPC分类号： G01C19/5726 , G01C19/5755 , G01P15/125 , G01P2015/0814
摘要： Techniques capable of suppressing fixation between a movable electrode and a fixed electrode in an inertial sensor and preventing the inertial sensor from malfunctioning are provided. The movable electrode, the fixed electrode provided so as to face the movable electrode, a peripheral conductor facing both the movable electrode and the fixed electrode, and a demodulation circuit and a voltage adjustment circuit which adjust the electric potential of the peripheral conductor so that the electric potential of the peripheral conductor becomes the same as the electric potential of the movable electrode are provided, and a change in the capacitance between the movable electrode and the fixed electrode is detected.
摘要翻译：提供了能够抑制惯性传感器中的可动电极和固定电极之间的固定并防止惯性传感器发生故障的技术。可动电极，设置成面对可动电极的固定电极，面向可动电极和固定电极的周边导体，以及调整电路和调整电路的电压调节电路，外围导体的电位变得与设置可动电极的电位相同，并且检测到可动电极与固定电极之间的电容变化。

4. 发明申请

US20090183568A1 INERTIAL SENSOR 有权
标题翻译：惯性传感器
公开(公告)号：US20090183568A1
公开(公告)日：2009-07-23
申请号：US12342137
申请日：2008-12-23
申请人： Kiyoko YAMANAKA , Hideaki Takano
发明人： Kiyoko YAMANAKA , Hideaki Takano
IPC分类号： G01P15/08
CPC分类号： G01P15/0802 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , G01C19/5719 , G01P1/02 , G01P15/125
摘要： An angular rate sensor and an acceleration sensor are sealed at the same sealing pressure. The sealing pressure at this time is put into a reduced pressure state below the atmospheric pressure in view of improving a detection sensitivity of the angular rate sensor. Even in the reduced pressure atmosphere, to improve the detection sensitivity of the acceleration sensor, a shift suppressing portion (damper) for suppressing shifts of a movable body of the acceleration sensor is provided. This shift suppressing portion includes a plurality of protruding portions integrally formed with the movable body and a plurality of protruding portions integrally formed with a peripheral portion, and the protruding portions are alternately disposed separately at equal intervals.
摘要翻译：在相同的密封压力下密封角速率传感器和加速度传感器。鉴于提高角速度传感器的检测灵敏度，此时的密封压力被置于低于大气压的减压状态。即使在减压气氛中，为了提高加速度传感器的检测灵敏度，提供了用于抑制加速度传感器的移动体的移动的偏移抑制部（阻尼器）。该偏移抑制部包括与可动体一体形成的多个突出部和与周缘部一体形成的多个突出部，突出部以相等的间隔分开交替设置。

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