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    • 1. 发明申请
    • Semiconductor device and method of fabricating the same
    • 半导体装置及其制造方法
    • US20070052041A1
    • 2007-03-08
    • US10558671
    • 2004-05-31
    • Haruyuki SoradaTakeshi TakagiAkira AsaiYoshihiko KanzawaKouji KatayamaJunko Iwanaga
    • Haruyuki SoradaTakeshi TakagiAkira AsaiYoshihiko KanzawaKouji KatayamaJunko Iwanaga
    • H01L29/94
    • H01L29/785H01L29/66795H01L29/78687
    • A semiconductor device according to this invention includes: a first insulating layer (11); a first body section (13) including an island-shaped semiconductor formed on the first insulating layer; a second body section (14) including an island-shaped semiconductor formed on the first insulating layer; a ridge-shaped connecting section (15) formed on the first insulating layer to interconnect the first body section and the second body section; a channel region (15a) formed by at least a part of the connecting section in lengthwise direction of the connecting section; a gate electrode (18) formed to cover a periphery of the channel region, with a second insulating layer intervening therebetween; a source region formed to extend over the first body section and a portion of the connecting section between the first body section and the channel region; and a drain region formed to extend over the second body section and a portion of the connecting section between the second body section and the channel region, wherein a semiconductor forming the channel region has a lattice strain.
    • 根据本发明的半导体器件包括:第一绝缘层(11); 第一主体部分(13),其包括形成在所述第一绝缘层上的岛状半导体; 包括形成在所述第一绝缘层上的岛状半导体的第二主体部分(14) 形成在第一绝缘层上以互连第一主体部分和第二主体部分的脊形连接部分(15); 由所述连接部的至少一部分在所述连接部的长度方向上形成的通路区域(15a) 形成为覆盖沟道区域的周边的栅极电极(18),其间插入有第二绝缘层; 形成为在第一主体部分上延伸的源极区域和在第一主体部分和沟道区域之间的连接部分的一部分; 以及形成为在第二主体部分上延伸的漏极区域和在第二主体部分和沟道区域之间的连接部分的一部分,其中形成沟道区域的半导体具有晶格应变。
    • 2. 发明授权
    • Strained channel finFET device
    • 应变通道finFET器件
    • US07473967B2
    • 2009-01-06
    • US10558671
    • 2004-05-31
    • Haruyuki SoradaTakeshi TakagiAkira AsaiYoshihiko KanzawaKouji KatayamaJunko Iwanaga
    • Haruyuki SoradaTakeshi TakagiAkira AsaiYoshihiko KanzawaKouji KatayamaJunko Iwanaga
    • H01L27/088
    • H01L29/785H01L29/66795H01L29/78687
    • A semiconductor device according to this invention includes: a first insulating layer (11); a first body section (13) including an island-shaped semiconductor formed on the first insulating layer; a second body section (14) including an island-shaped semiconductor formed on the first insulating layer; a ridge-shaped connecting section (15) formed on the first insulating layer to interconnect the first body section and the second body section; a channel region (15a) formed by at least a part of the connecting section in lengthwise direction of the connecting section; a gate electrode (18) formed to cover a periphery of the channel region, with a second insulating layer intervening therebetween; a source region formed to extend over the first body section and a portion of the connecting section between the first body section and the channel region; and a drain region formed to extend over the second body section and a portion of the connecting section between the second body section and the channel region, wherein a semiconductor forming the channel region has a lattice strain.
    • 根据本发明的半导体器件包括:第一绝缘层(11); 第一主体部分(13),其包括形成在所述第一绝缘层上的岛状半导体; 包括形成在所述第一绝缘层上的岛状半导体的第二主体部分(14) 形成在第一绝缘层上以互连第一主体部分和第二主体部分的脊形连接部分(15); 由连接部的长度方向的至少一部分形成的通道区域(15a); 形成为覆盖沟道区域的周边的栅极电极(18),其间插入有第二绝缘层; 形成为在第一主体部分上延伸的源极区域和在第一主体部分和沟道区域之间的连接部分的一部分; 以及形成为在第二主体部分上延伸的漏极区域和在第二主体部分和沟道区域之间的连接部分的一部分,其中形成沟道区域的半导体具有晶格应变。