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    • 7. 发明授权
    • Electrolytic method for the etch back of encapsulated
copper-Invar-copper core structures
    • 封装的铜 - 堇青铜核心结构的回蚀电解方法
    • US5098533A
    • 1992-03-24
    • US651073
    • 1991-02-06
    • Peter J. DukeKrystyna W. Semkow
    • Peter J. DukeKrystyna W. Semkow
    • C25F3/02H01L21/48H05K3/06H05K3/07H05K3/44
    • H05K3/44H01L21/4803H01L21/486H05K2201/0338H05K2201/068H05K2203/0285H05K2203/0323H05K2203/1184H05K3/062H05K3/07H05K3/445
    • Disclosed is a method of fabricating a microelectronic package having least one layer formed of a copper-Invar-copper core encapsulated between a pair of dielectric films. The method includes exposing a copper-Invar-copper surface of the copper-Invar-copper core, for example, exposing an edge of the copper-Invar-copper core or drilling a whole through the layer to expose internal copper-Invar-copper. The copper-Invar-copper is then shaped, that is, back etched. This is an electrolytic process where the package is immersed in a substantially pH neutral electrolyte including a counter- electrode. A preferred electrolyte is an aqueous alkali metal nitrate solution. The electrolyte wets the exposed surface of said copper-Invar-copper core. The exposed surface of the copper-Invar-copper core is rendered anodic with respect to the counter-electrode and an electrical potential is applied therebetween. This results in electrochemically etching and shaping the copper-Invar-copper surface.
    • 公开了一种制造微电子封装的方法,该微电子封装具有封装在一对电介质膜之间的由铜 - 英巴铜芯形成的至少一层。 该方法包括将铜 - Inv铜 - 铜芯的铜 - Inv铜 - 铜表面暴露出来,例如,暴露出铜 - Inv铜 - 铜芯的边缘,或者穿过该层进行整体钻孔以暴露内部铜 - Inv铜。 然后将铜 - 殷铜铜成形,即后蚀刻。 这是一种电解方法,其中将封装浸入包括反电极的基本上pH中性的电解质中。 优选的电解质是碱金属硝酸盐水溶液。 电解液润湿所述铜 - Inv铜 - 铜芯的暴露表面。 铜 - 铱铜芯的暴露表面相对于反电极呈阳极,并且在其间施加电位。 这导致电化学蚀刻和成形铜 - 阴极铜表面。