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1. 发明专利

JP2008311338A Vacuum treatment apparatus and abnormal discharge precognition device used therefor, and control method of vacuum treatment apparatus 审中-公开
标题翻译：真空处理设备及其使用的异常放电预防设备以及真空处理设备的控制方法
公开(公告)号：JP2008311338A
公开(公告)日：2008-12-25
申请号：JP2007156135
申请日：2007-06-13
申请人： Harada Sangyo Kk , 原田産業株式会社
发明人： SUZUKI KOICHI , SATO MITSUO , MINE HARUYUKI
IPC分类号： H01L21/3065 , C23C16/50 , C23C16/52 , H01L21/205 , H01L21/265 , H05H1/00 , H05H1/46
摘要： PROBLEM TO BE SOLVED: To prevent an object to be treated from being damaged and so on by foreseeing that an abnormal discharge will occur in a vacuum chamber. SOLUTION: A vacuum treatment apparatus includes: the vacuum chamber 10; a first detecting circuit 30 which detects a low-energy discharge generated continuously or intermittently in the vacuum chamber 10; a second detecting circuit which generates precognition signals 40a and 40b in response to the detection of the low-energy discharge generated continuously or intermittently by the first detection circuit 30 for a certain time; and an AC power source 20 which changes application patterns of an AC voltage to electrodes 11 and 14 disposed in the vacuum chamber 10 according to the precognition signals 40a and 40b. Thus, not the abnormal discharge itself, but a symptom phenomenon of the abnormal discharge is detected, so that the abnormal discharge can be prevented from occurring. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：通过预见在真空室中会发生异常放电，防止被处理物体受到损坏等。解决方案：真空处理装置包括：真空室10; 第一检测电路30，其检测在真空室10中连续地或间歇地产生的低能量放电; 第二检测电路，响应于由第一检测电路30连续或间歇地产生一定时间产生的低能量放电而产生预认识信号40a和40b; 以及根据预认识信号40a，40b将交流电压的应用模式改变为设置在真空室10中的电极11和14的交流电源20。因此，不是异常放电本身，而是检测到异常放电的症状现象，从而可以防止发生异常放电。版权所有（C）2009，JPO＆INPIT

2. 发明专利

JP2010027614A Chamber type ion-conveyance system ionization device 有权
标题翻译：室式离子输送系统离子化装置
公开(公告)号：JP2010027614A
公开(公告)日：2010-02-04
申请号：JP2009211905
申请日：2009-09-14
申请人： Hamamatsu Photonics Kk , Harada Sangyo Kk , Techno Ryowa Ltd , 原田産業株式会社 , 株式会社テクノ菱和 , 浜松ホトニクス株式会社
发明人： MIZUNO AKIRA , SUGITA AKIO , SUZUKI MASANORI , IZUMI TAKAHARU , ISHIKAWA MASAYOSHI , MINE HARUYUKI
IPC分类号： H05F3/06 , H01T23/00 , H05F3/02
摘要： PROBLEM TO BE SOLVED: To provide a chamber type ion-conveyance system ionization device doing away with generation of ozone, and electromagnetic noise, dust or the like to achieve elimination of static charge even in a narrow space.
SOLUTION: Generation sites of soft X rays, low-energy electron beams, ultraviolet rays, or surface creepage discharge, or ionizing sources 4 such as sealed radioisotope are arranged inside a chamber 1. A control device 5 consisting of a power source part of the ionizing sources 4 and a control part is arranged outside the chamber 1. A shielding part made of a plurality of barrier ribs 7, 7 is provided at a downstream side of the chamber 1 to shield the soft X rays and the low-energy electron beams generated from the ionizing sources 4 or radioactive rays or the like from the radioisotope.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种室内离子输送系统的电离装置消除臭氧的产生，以及电磁噪声，灰尘等，以便即使在狭窄的空间也能消除静电。解决方案：在室1内部布置有软X射线，低能电子束，紫外线或表面爬电放电的产生位置或诸如密封的放射性同位素的电离源4，由电源电离源4的一部分和控制部分设置在室1的外部。由多个隔壁7,7形成的屏蔽部分设置在室1的下游侧，以屏蔽软X射线和低频电极，从电离源4产生的能量电子束或来自放射性同位素的放射线等。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2004220872A Dust-free discharging and dust-removing system 审中-公开
公开(公告)号：JP2004220872A
公开(公告)日：2004-08-05
申请号：JP2003005335
申请日：2003-01-14
申请人： Hamamatsu Photonics Kk , Harada Sangyo Kk , Techno Ryowa Ltd , 原田産業株式会社 , 株式会社テクノ菱和 , 浜松ホトニクス株式会社
发明人： MIZUNO AKIRA , SUGITA AKIO , SUZUKI MASANORI , SATO TOMOKATSU , HINO TOSHIHIKO , MINE HARUYUKI
IPC分类号： B03C3/02 , B03C3/40 , H01T23/00 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a dust-free discharging and dust-removing system available for use with an explosion-proof facility or device without causing to generate ozone, electromagnetic noise, dust or the like and capable of surely removing dust accreted to a charged body. SOLUTION: An intermittent high-speed jet flow generating device D is fitted at a gas conveying channel 2b and is equipped with an electromagnetic valve 2c inside. The device D intermittently blows off ion-carrying gas sent from the gas conveying channel as high-speed airstream into a downstream chamber 1 by switching the electromagnetic valve 2c, and the gas conveying channel 2b supplies the ion-carrying gas blown off from the device D to the chamber 1 through a gas conveying channel connecting part 2a fitted at a side end part (at a right side end part in the figure) of the chamber 1. The intermittent high-speed jet flow is sprayed on the surface of the charged body S from a nozzle 9 of the chamber 1 to discharge/remove the dust accreted on the surface of the charged body S. COPYRIGHT: (C)2004,JPO&NCIPI

4. 发明专利

JP2001257096A JET OUTLET FOR ELECTROSTATIC COUNTERMEASURE 失效
公开(公告)号：JP2001257096A
公开(公告)日：2001-09-21
申请号：JP2000066680
申请日：2000-03-10
申请人： TECHNO RYOWA LTD , HAMAMATSU PHOTONICS KK , HARADA SANGYO KK
发明人： MIZUNO AKIRA , SUGITA AKIO , SUZUKI MASANORI , IZUMI TAKAHARU , ISHIKAWA MASAYOSHI , MINE HARUYUKI
IPC分类号： F24F7/00 , F24F7/06 , H01L21/02 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a jet outlet for electrostatic countermeasure that is easy to install and that does not necessitate to make the surrounding area of installation an intercepting structure and that eliminates generation of ozone, electromagnetic noise and dust. SOLUTION: At the upstream side of a cylindrical or prism crack shape formed jet outlet 1, a chamber 2 and a duct 3 are connected and an intercepting portion 4 is provided in the vicinity of the outlet portion of the jet outlet 1. And an ion generating device 10 is provided in the vicinity of the jet outlet 1, and this ion generating device 10 is composed of an ionization source 11 disposed perpendicularly to the direction of flowing of ion transferring gas and a control device 12 which controls the generating amount of ion by the ionization source 11. And the radiant rays such as soft X-rays and the like generating from the ionization source is irradiated to the ion transferring gas in the jet outlet 1 and changed to ion and the generated plus and minus ion are supplied to the desired charged body.

5. 发明专利

JP2001203134A HEAT TREATMENT APPARATUS HAVING DESTATICIZER 失效
公开(公告)号：JP2001203134A
公开(公告)日：2001-07-27
申请号：JP2000008455
申请日：2000-01-18
申请人： TABAI ESPEC CORP , HOSHIDEN PHILIPS DISPLAY KK , HARADA SANGYO KK , HAMAMATSU PHOTONICS KK
发明人： KAJIYAMA TOSHIJI , YAMAMOTO MINORU , MINE HARUYUKI , ISHIKAWA MASAYOSHI
IPC分类号： G21K5/02 , G02F1/136 , G02F1/1368 , G21K5/10 , H01L21/02 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a heat treatment apparatus provided with a destaticizer, capable of performing static charge elimination of products at the same time as heat treatment. SOLUTION: A machine room 3 is arranged under a heat treatment room 1, a window is made on a partition 4 between the machine room 3 and the heat treatment room 1, the machine room 3 is shielded with a shield 38 formed of a member that passes through soft x-rays, and soft x-rays are radiated upward through the window to the heating air or cooling air in the heat treatment room 1 by a soft x-ray irradiation device 30 provided in the machine room 3.

6. 发明专利

JP2010225422A DISCHARGE ELECTRODE 审中-公开
公开(公告)号：JP2010225422A
公开(公告)日：2010-10-07
申请号：JP2009071610
申请日：2009-03-24
申请人： HARADA SANGYO KK
发明人： MINE HARUYUKI
IPC分类号： H01T19/04 , B23H1/06 , C23C8/36 , H05F3/04
摘要： PROBLEM TO BE SOLVED: To provide a discharge electrode applicable as an ionizer electrode or as various other discharge application electrodes having high ion generating efficiency, excellent durability with very long life, no trouble for occurrence of dust by interface peeling of a covered layer, and being capable of manufacturing with low-cost. SOLUTION: The discharge electrode is a metal electrode 1 on a surface portion of which a diffusion-hardened layer of metal 11 is formed by a penetron treatment. COPYRIGHT: (C)2011,JPO&INPIT

7. 发明专利

JP2002352997A EXPLOSION-PROOF, NON-DUSTING IONIZER 失效
公开(公告)号：JP2002352997A
公开(公告)日：2002-12-06
申请号：JP2001161060
申请日：2001-05-29
申请人： TECHNO RYOWA LTD , HAMAMATSU PHOTONICS KK , HARADA SANGYO KK
发明人： MIZUNO AKIRA , SUGITA AKIO , SUZUKI MASANORI , SATO TOMOKATSU , HINO TOSHIHIKO , MINE HARUYUKI
IPC分类号： H01T23/00 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide an explosion-proof, non-dusting ionizer, capable of being used in explosion-proof facility and apparatus, without using production of ozone, electromagnetic noise dust, etc. SOLUTION: The ionizer is equipped with an ionization part for ionizing a part of an ion-transport gas fed within a chamber and a chamber having a blowing part for feeding the ion-carrying gas toward a charged body, and the ionization part is constructed by an ionization source built in the chamber and a control unit, connected to the ionization source through a high-voltage cable. As the ionizing source, is used any of the generating part of a soft X-ray generator, the generating part of a low-energy electron beam generator and the generating part of an ultraviolet ray generator, and the control unit is used, and a connected area between the control unit and the high-voltage cable and a connecting area between the ionization source and the high-voltage cable are each made into an explosion-proof structure.

8. 发明专利

JP2001313197A LIGHT IRRADIATION STATIC ELECTRICITY REMOVING DEVICE WITH COOLING FUNCTION 失效
公开(公告)号：JP2001313197A
公开(公告)日：2001-11-09
申请号：JP2000132600
申请日：2000-05-01
申请人： HARADA SANGYO KK , PHILLIPS COMPONENTS KOBE KK , HAMAMATSU PHOTONICS KK
发明人： ISHIKAWA MASAYOSHI , MINE HARUYUKI , YAMAMOTO MINORU
IPC分类号： H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a static electricity removing device enabled to remove a static electricity of the object to be treated efficiently even in the severe circumstance to an X-ray generator. SOLUTION: The static electricity removing device has a body of equipment 7 fixed to the outer surface of a high temperature furnace 3, and an X-ray generator 8 generating X-ray is housed in the body of equipment 7. A pair of X-ray transmission plates 17A, 17B, transmitting the X-ray radiated from the X-ray generator 8, are installed on the high temperature furnace 3. An air supply path 19 and an air exhaust path 20 are connected to the space between the X-ray transmission plates 17A, 17B. Cooling air is supplied to the space between the X-ray transmission plates 17A, 17B through the air supply path 19, and exhausted through the air exhaust path 20. Thus, the X-ray generator 8 can be used in the state adjacent to the high temperature furnace 3.

9. 发明专利

JP2001176691A CHAMBER TYPE ION-CARRYING IONIZING DEVICE AND IONIZING METHOD 失效
公开(公告)号：JP2001176691A
公开(公告)日：2001-06-29
申请号：JP35880999
申请日：1999-12-17
申请人： TECHNO RYOWA LTD , HAMAMATSU PHOTONICS KK , HARADA SANGYO KK
发明人： MIZUNO AKIRA , SUGITA AKIO , SUZUKI MASANORI , IZUMI TAKAHARU , ISHIKAWA MASAYOSHI , MINE HARUYUKI
IPC分类号： B01J3/00 , H05F3/06
摘要： PROBLEM TO BE SOLVED: To provide a chamber type ion-carrying ionizing device and method capable of eliminating ozone or electromagnetic noises as well as dust or the like and also of electricity in a narrow space. SOLUTION: Ionization sources 4 such as soft X-ray, low energy electron beam, a generation part of ultra-violet ray or surface creepage or sealed radioisotope are arranged inside a chamber 1. A control device 5 consisting of a power source part and a control part of the ionization sources 4 are arranged outside the chamber 1. At downstream of the chamber 1, there is provided a shield part made of a plurality of partition walls 7, 7 which shield soft X-ray, low-energy electron beam, or radiation or the like from radioisotope.

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