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1. 发明申请

US20130000764A1 MULTI-LAYER MICRO/NANOFLUID DEVICES WITH BIO-NANOVALVES 有权
标题翻译：具有生物纳米值的多层微型/纳米级器件
公开(公告)号：US20130000764A1
公开(公告)日：2013-01-03
申请号：US12391486
申请日：2009-02-24
申请人： Hao Li , Leonidas E. Ocola , Orlando H. Auciello , Millicent A. Firestone
发明人： Hao Li , Leonidas E. Ocola , Orlando H. Auciello , Millicent A. Firestone
IPC分类号： F15C1/00 , B05D3/06
CPC分类号： B01F13/0061 , B01L3/50273 , B01L3/502738 , B01L2200/027 , B01L2300/0867 , B01L2300/0874 , B01L2300/0896 , B01L2400/0415 , B01L2400/0487 , B01L2400/0627 , B01L2400/0633 , F16K99/0003 , F16K99/0042 , F16K2099/0073 , Y10T137/206
摘要： A user-friendly multi-layer micro/nanofluidic flow device and micro/nano fabrication process are provided for numerous uses. The multi-layer micro/nanofluidic flow device can comprise: a substrate, such as indium tin oxide coated glass (ITO glass); a conductive layer of ferroelectric material, preferably comprising a PZT layer of lead zirconate titanate (PZT) positioned on the substrate; electrodes connected to the conductive layer; a nanofluidics layer positioned on the conductive layer and defining nanochannels; a microfluidics layer positioned upon the nanofluidics layer and defining microchannels; and biomolecular nanovalves providing bio-nanovalves which are moveable from a closed position to an open position to control fluid flow at a nanoscale. The micro/nano fabrication process for fabricating a multi-layer micro/nanofluidic flow device can comprise: forming a conductive layer on a substrate; forming an electrode pattern; forming a nanofluidics layer with a nanochannel pattern to define nanochannels; forming a microfluidics layer with a microchannel pattern to define microchannels; and assembling the microfluidics layer on the nanofluidics layer. The micro/nano fabrication process can include: synthesizing a thin film of PZT on ITO glass, electron beam lithography, sputtering, spin-coating, photolithography, and plasma treatment.
摘要翻译：提供用户友好的多层微/纳流体流动装置和微/纳米制造工艺用于许多用途。多层微/纳流体流动装置可以包括：衬底，例如氧化铟锡涂层玻璃（ITO玻璃）; 铁电材料的导电层，优选地包括位于基底上的锆钛酸铅（PZT）的PZT层; 连接到导电层的电极; 定位在导电层上并限定纳米通道的纳米流体层; 位于纳米流体层上并限定微通道的微流体层; 和生物分子纳米阀提供可从关闭位置移动到打开位置的生物纳米阀，以控制纳米尺度的流体流动。用于制造多层微/纳流体流动装置的微/纳米制造工艺可以包括：在衬底上形成导电层; 形成电极图案; 形成具有纳米通道图案的纳米流体层以限定纳米通道; 形成具有微通道图案的微流体层以限定微通道; 并将微流体层组装在纳米流体层上。微/纳米制造工艺可以包括：在ITO玻璃上合成PZT薄膜，电子束光刻，溅射，旋涂，光刻和等离子体处理。

2. 发明授权

US08343425B1 Multi-layer micro/nanofluid devices with bio-nanovalves 有权
标题翻译：具有生物纳米阀的多层微/纳流体装置
公开(公告)号：US08343425B1
公开(公告)日：2013-01-01
申请号：US12391486
申请日：2009-02-24
申请人： Hao Li , Leonidas E. Ocola , Orlando H. Auciello , Millicent A. Firestone
发明人： Hao Li , Leonidas E. Ocola , Orlando H. Auciello , Millicent A. Firestone
IPC分类号： B01L99/00
CPC分类号： B01F13/0061 , B01L3/50273 , B01L3/502738 , B01L2200/027 , B01L2300/0867 , B01L2300/0874 , B01L2300/0896 , B01L2400/0415 , B01L2400/0487 , B01L2400/0627 , B01L2400/0633 , F16K99/0003 , F16K99/0042 , F16K2099/0073 , Y10T137/206
摘要： A user-friendly multi-layer micro/nanofluidic flow device and micro/nano fabrication process are provided for numerous uses. The multi-layer micro/nanofluidic flow device can comprise: a substrate, such as indium tin oxide coated glass (ITO glass); a conductive layer of ferroelectric material, preferably comprising a PZT layer of lead zirconate titanate (PZT) positioned on the substrate; electrodes connected to the conductive layer; a nanofluidics layer positioned on the conductive layer and defining nanochannels; a microfluidics layer positioned upon the nanofluidics layer and defining microchannels; and biomolecular nanovalves providing bio-nanovalves which are moveable from a closed position to an open position to control fluid flow at a nanoscale.
摘要翻译：提供用户友好的多层微/纳流体流动装置和微/纳米制造工艺用于许多用途。多层微/纳流体流动装置可以包括：衬底，例如氧化铟锡涂层玻璃（ITO玻璃）; 铁电材料的导电层，优选地包括位于基底上的锆钛酸铅（PZT）的PZT层; 连接到导电层的电极; 定位在导电层上并限定纳米通道的纳米流体层; 位于纳米流体层上并限定微通道的微流体层; 和生物分子纳米阀提供可从关闭位置移动到打开位置的生物纳米阀，以控制纳米尺度的流体流动。

3. 发明申请

US20080204970A1 Transparent oxide capacitor structures 审中-公开
标题翻译：透明氧化物电容器结构
公开(公告)号：US20080204970A1
公开(公告)日：2008-08-28
申请号：US11712063
申请日：2007-02-28
申请人： Leonidas E. Ocola , Krishna K. Uprety , Orlando H. Auciello
发明人： Leonidas E. Ocola , Krishna K. Uprety , Orlando H. Auciello
IPC分类号： H01G4/06
CPC分类号： H01G4/08 , H01G4/008 , H01G4/1227 , H01G9/21
摘要： A ferroelectric capacitor structure having a lattice matched lanthanide oxide film intervening layer for providing a high polarization state. The capacitor structure includes a glass substrate, a transparent electrode layer disposed on the glass substrate, a lanthanide oxide film disposed on the transparent layer and a ferroelectric perovskite layer disposed on the lanthanide oxide film. The claim also encompases semi-transparent applications where one conductive electrode (top or bottom) is not transparent.
摘要翻译：具有晶格匹配的镧系元素氧化物膜中间层以提供高极化状态的铁电电容器结构。电容器结构包括玻璃基板，设置在玻璃基板上的透明电极层，设置在透明层上的镧系氧化物膜和设置在镧系氧化物膜上的强电介质钙钛矿层。该声明还包含半透明应用，其中一个导电电极（顶部或底部）不透明。

4. 发明授权

US06610464B2 Process for patterning a membrane 有权
公开(公告)号：US06610464B2
公开(公告)日：2003-08-26
申请号：US09863437
申请日：2001-05-24
申请人： Leonidas E. Ocola
发明人： Leonidas E. Ocola
IPC分类号： G03F900
CPC分类号： G03F1/20 , G03F1/22 , G03F7/162 , Y10S430/136 , Y10S430/143
摘要： A process for patterning a non-rigid membrane in a closed gap environment including the optional step of applying a solvent to the non-rigid membrane, applying a layer of an energy-sensitive composition to the non-rigid membrane, spinning the non-rigid membrane, inverting the non-rigid membrane with the layer of an energy-sensitive composition, spinning the inverted non-rigid membrane, re-inverting the non-rigid membrane, and spinning the re-inverted, non-rigid membrane. As a result of the inverting step and the inverted spinning step, the layer of an energy-sensitive composition does not cause the non-rigid membrane to sag and the resulting layer of energy-sensitive composition is substantially uniform in thickness. The energy-sensitive composition may be a photoresist, such as a chemically amplified photoresist.

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