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    • 5. 发明授权
    • Micro-electro-mechanical system (MEMS) capacitive OHMIC switch and design structures
    • 微机电系统(MEMS)电容OHMIC开关和设计结构
    • US08592876B2
    • 2013-11-26
    • US13342689
    • 2012-01-03
    • Hanyi DingQizhi LiuAnthony K. Stamper
    • Hanyi DingQizhi LiuAnthony K. Stamper
    • H01L29/80
    • H01H1/0036B81B7/0006B81B2201/016G06F17/5063G06F17/5068H01P1/127
    • A micro-electro-mechanical system (MEMS), methods of forming the MEMS and design structures are provided. The method comprises forming a coplanar waveguide (CPW) comprising a signal electrode and a pair of electrodes on a substrate. The method comprises forming a first sacrificial material over the CPW, and a wiring layer over the first sacrificial material and above the CPW. The method comprises forming a second sacrificial material layer over the wiring layer, and forming insulator material about the first sacrificial material and the second sacrificial material. The method comprises forming at least one vent hole in the insulator material to expose portions of the second sacrificial material, and removing the first and second sacrificial material through the vent hole to form a cavity structure about the wiring layer and which exposes the signal line and pair of electrodes below the wiring layer. The vent hole is sealed with sealing material.
    • 提供了微机电系统(MEMS),形成MEMS和设计结构的方法。 该方法包括在衬底上形成包括信号电极和一对电极的共面波导(CPW)。 该方法包括在CPW上形成第一牺牲材料,以及在第一牺牲材料上方和CPW上方的布线层。 该方法包括在布线层上形成第二牺牲材料层,以及围绕第一牺牲材料和第二牺牲材料形成绝缘体材料。 该方法包括在绝缘体材料中形成至少一个通气孔以暴露第二牺牲材料的部分,以及通过通气孔去除第一和第二牺牲材料,以形成围绕布线层的空腔结构,并使信号线和 一对电极在布线层下方。 通气孔用密封材料密封。